FR1439756A - Temperature control and control device - Google Patents

Temperature control and control device

Info

Publication number
FR1439756A
FR1439756A FR24648A FR24648A FR1439756A FR 1439756 A FR1439756 A FR 1439756A FR 24648 A FR24648 A FR 24648A FR 24648 A FR24648 A FR 24648A FR 1439756 A FR1439756 A FR 1439756A
Authority
FR
France
Prior art keywords
control
control device
temperature
temperature control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR24648A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to FR24648A priority Critical patent/FR1439756A/en
Application granted granted Critical
Publication of FR1439756A publication Critical patent/FR1439756A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR24648A 1965-07-15 1965-07-15 Temperature control and control device Expired FR1439756A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR24648A FR1439756A (en) 1965-07-15 1965-07-15 Temperature control and control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR24648A FR1439756A (en) 1965-07-15 1965-07-15 Temperature control and control device

Publications (1)

Publication Number Publication Date
FR1439756A true FR1439756A (en) 1966-05-20

Family

ID=8584503

Family Applications (1)

Application Number Title Priority Date Filing Date
FR24648A Expired FR1439756A (en) 1965-07-15 1965-07-15 Temperature control and control device

Country Status (1)

Country Link
FR (1) FR1439756A (en)

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