FR1416272A - Metallization process - Google Patents

Metallization process

Info

Publication number
FR1416272A
FR1416272A FR997321A FR997321A FR1416272A FR 1416272 A FR1416272 A FR 1416272A FR 997321 A FR997321 A FR 997321A FR 997321 A FR997321 A FR 997321A FR 1416272 A FR1416272 A FR 1416272A
Authority
FR
France
Prior art keywords
metallization process
metallization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR997321A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Consolidated Electronics Industries Corp
Original Assignee
Consolidated Electronics Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consolidated Electronics Industries Corp filed Critical Consolidated Electronics Industries Corp
Priority to FR997321A priority Critical patent/FR1416272A/en
Application granted granted Critical
Publication of FR1416272A publication Critical patent/FR1416272A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
FR997321A 1963-12-06 1964-12-03 Metallization process Expired FR1416272A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR997321A FR1416272A (en) 1963-12-06 1964-12-03 Metallization process

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32845663A 1963-12-06 1963-12-06
FR997321A FR1416272A (en) 1963-12-06 1964-12-03 Metallization process

Publications (1)

Publication Number Publication Date
FR1416272A true FR1416272A (en) 1965-10-29

Family

ID=26211524

Family Applications (1)

Application Number Title Priority Date Filing Date
FR997321A Expired FR1416272A (en) 1963-12-06 1964-12-03 Metallization process

Country Status (1)

Country Link
FR (1) FR1416272A (en)

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