FR1409657A - Semiconductor device and its manufacturing process - Google Patents

Semiconductor device and its manufacturing process

Info

Publication number
FR1409657A
FR1409657A FR989489A FR989489A FR1409657A FR 1409657 A FR1409657 A FR 1409657A FR 989489 A FR989489 A FR 989489A FR 989489 A FR989489 A FR 989489A FR 1409657 A FR1409657 A FR 1409657A
Authority
FR
France
Prior art keywords
semiconductor device
manufacturing process
manufacturing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR989489A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to FR989489A priority Critical patent/FR1409657A/en
Application granted granted Critical
Publication of FR1409657A publication Critical patent/FR1409657A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
    • H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
FR989489A 1963-09-28 1964-09-26 Semiconductor device and its manufacturing process Expired FR1409657A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR989489A FR1409657A (en) 1963-09-28 1964-09-26 Semiconductor device and its manufacturing process

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5163763 1963-09-28
FR989489A FR1409657A (en) 1963-09-28 1964-09-26 Semiconductor device and its manufacturing process

Publications (1)

Publication Number Publication Date
FR1409657A true FR1409657A (en) 1965-08-27

Family

ID=26210200

Family Applications (1)

Application Number Title Priority Date Filing Date
FR989489A Expired FR1409657A (en) 1963-09-28 1964-09-26 Semiconductor device and its manufacturing process

Country Status (1)

Country Link
FR (1) FR1409657A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2058408A1 (en) * 1969-08-20 1971-05-28 Gen Electric

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2058408A1 (en) * 1969-08-20 1971-05-28 Gen Electric

Similar Documents

Publication Publication Date Title
CH465079A (en) Photosensitive semiconductor device and its manufacturing process
FR1319897A (en) Semiconductor device and its manufacturing process
FR1385209A (en) Photosensitive device and its manufacturing process
FR1456952A (en) Semiconductor device and its manufacturing process
FR1516465A (en) Semiconductor device and its manufacturing process
FR1459371A (en) Semiconductor device and its manufacturing process
FR1409657A (en) Semiconductor device and its manufacturing process
FR1417944A (en) Semiconductor device and its manufacturing process
FR1381808A (en) Semiconductor device and its manufacturing process
FR1409543A (en) Semiconductor device and its manufacturing process
FR1462034A (en) Semiconductor device and its manufacturing process
FR1420926A (en) Semiconductor device and its manufacturing process
FR1524758A (en) Semiconductor device and its manufacturing process
FR1404315A (en) Semiconductor device and manufacturing process
FR1419908A (en) Semiconductor device and its manufacturing process
FR1411100A (en) Semiconductor device and its manufacturing process
FR1382719A (en) Semiconductor device and its manufacturing process
FR1414117A (en) Semiconductor device and its manufacturing process
BE613411A (en) Semiconductor device and its manufacturing process
FR1363745A (en) Semiconductor device and its manufacturing process
FR1454921A (en) Semiconductor device and its manufacturing process
FR1367910A (en) Semiconductor device and its manufacturing process
FR1358232A (en) Semiconductor device and its manufacturing process
FR1477382A (en) Semiconductor device and its manufacturing process
FR1429874A (en) Semiconductor device and its manufacturing process