FR1391077A - Optical scatterometer - Google Patents

Optical scatterometer

Info

Publication number
FR1391077A
FR1391077A FR960933A FR960933A FR1391077A FR 1391077 A FR1391077 A FR 1391077A FR 960933 A FR960933 A FR 960933A FR 960933 A FR960933 A FR 960933A FR 1391077 A FR1391077 A FR 1391077A
Authority
FR
France
Prior art keywords
optical scatterometer
scatterometer
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR960933A
Other languages
French (fr)
Inventor
Alexandre Ivanoff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR960933A priority Critical patent/FR1391077A/en
Priority to LU47689A priority patent/LU47689A1/xx
Priority to BE657960A priority patent/BE657960A/xx
Priority to NL6500790A priority patent/NL6500790A/xx
Application granted granted Critical
Publication of FR1391077A publication Critical patent/FR1391077A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
FR960933A 1964-01-21 1964-01-21 Optical scatterometer Expired FR1391077A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR960933A FR1391077A (en) 1964-01-21 1964-01-21 Optical scatterometer
LU47689A LU47689A1 (en) 1964-01-21 1964-12-29
BE657960A BE657960A (en) 1964-01-21 1965-01-06
NL6500790A NL6500790A (en) 1964-01-21 1965-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR960933A FR1391077A (en) 1964-01-21 1964-01-21 Optical scatterometer

Publications (1)

Publication Number Publication Date
FR1391077A true FR1391077A (en) 1965-03-05

Family

ID=8821310

Family Applications (1)

Application Number Title Priority Date Filing Date
FR960933A Expired FR1391077A (en) 1964-01-21 1964-01-21 Optical scatterometer

Country Status (4)

Country Link
BE (1) BE657960A (en)
FR (1) FR1391077A (en)
LU (1) LU47689A1 (en)
NL (1) NL6500790A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2460478A1 (en) * 1979-06-29 1981-01-23 Anvar Water pollution detector using diffusion-meter - uses photocells measuring direct and diffused light transmission paths

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2460478A1 (en) * 1979-06-29 1981-01-23 Anvar Water pollution detector using diffusion-meter - uses photocells measuring direct and diffused light transmission paths

Also Published As

Publication number Publication date
LU47689A1 (en) 1965-03-02
BE657960A (en) 1965-04-30
NL6500790A (en) 1965-07-22

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