FR1375523A - Workpiece holder for glow discharge device - Google Patents
Workpiece holder for glow discharge deviceInfo
- Publication number
- FR1375523A FR1375523A FR955021A FR955021A FR1375523A FR 1375523 A FR1375523 A FR 1375523A FR 955021 A FR955021 A FR 955021A FR 955021 A FR955021 A FR 955021A FR 1375523 A FR1375523 A FR 1375523A
- Authority
- FR
- France
- Prior art keywords
- discharge device
- glow discharge
- workpiece holder
- workpiece
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR955021A FR1375523A (en) | 1962-11-26 | 1963-11-26 | Workpiece holder for glow discharge device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US240000A US3141989A (en) | 1962-11-26 | 1962-11-26 | Workpiece support for glow discharge apparatus |
FR955021A FR1375523A (en) | 1962-11-26 | 1963-11-26 | Workpiece holder for glow discharge device |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1375523A true FR1375523A (en) | 1964-10-16 |
Family
ID=26204535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR955021A Expired FR1375523A (en) | 1962-11-26 | 1963-11-26 | Workpiece holder for glow discharge device |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1375523A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2416439A1 (en) * | 1978-01-31 | 1979-08-31 | Blinov Viktor | Electric furnace using glow discharge - for chemical treatment and hardening of workpieces, esp. nitriding and/or carburising |
-
1963
- 1963-11-26 FR FR955021A patent/FR1375523A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2416439A1 (en) * | 1978-01-31 | 1979-08-31 | Blinov Viktor | Electric furnace using glow discharge - for chemical treatment and hardening of workpieces, esp. nitriding and/or carburising |
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