FR1374972A - Process for obtaining extra-flat semiconductor surfaces - Google Patents

Process for obtaining extra-flat semiconductor surfaces

Info

Publication number
FR1374972A
FR1374972A FR895092A FR895092A FR1374972A FR 1374972 A FR1374972 A FR 1374972A FR 895092 A FR895092 A FR 895092A FR 895092 A FR895092 A FR 895092A FR 1374972 A FR1374972 A FR 1374972A
Authority
FR
France
Prior art keywords
semiconductor surfaces
flat semiconductor
obtaining extra
extra
obtaining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR895092A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Siemens AG
Original Assignee
Siemens Schuckertwerke AG
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DES73615A external-priority patent/DE1239669B/en
Application filed by Siemens Schuckertwerke AG, Siemens AG filed Critical Siemens Schuckertwerke AG
Priority to FR895092A priority Critical patent/FR1374972A/en
Application granted granted Critical
Publication of FR1374972A publication Critical patent/FR1374972A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
FR895092A 1961-04-22 1962-04-19 Process for obtaining extra-flat semiconductor surfaces Expired FR1374972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR895092A FR1374972A (en) 1961-04-22 1962-04-19 Process for obtaining extra-flat semiconductor surfaces

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DES73615A DE1239669B (en) 1961-04-22 1961-04-22 Process for the production of extremely flat semiconductor surfaces
DES0074875 1961-07-18
FR895092A FR1374972A (en) 1961-04-22 1962-04-19 Process for obtaining extra-flat semiconductor surfaces

Publications (1)

Publication Number Publication Date
FR1374972A true FR1374972A (en) 1964-10-16

Family

ID=27212719

Family Applications (1)

Application Number Title Priority Date Filing Date
FR895092A Expired FR1374972A (en) 1961-04-22 1962-04-19 Process for obtaining extra-flat semiconductor surfaces

Country Status (1)

Country Link
FR (1) FR1374972A (en)

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