FR1369983A - Method and device for making monocrystalline films - Google Patents

Method and device for making monocrystalline films

Info

Publication number
FR1369983A
FR1369983A FR919569A FR919569A FR1369983A FR 1369983 A FR1369983 A FR 1369983A FR 919569 A FR919569 A FR 919569A FR 919569 A FR919569 A FR 919569A FR 1369983 A FR1369983 A FR 1369983A
Authority
FR
France
Prior art keywords
making monocrystalline
monocrystalline films
films
making
monocrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR919569A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GTE Sylvania Inc
Original Assignee
Sylvania Electric Products Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US161992A external-priority patent/US3139361A/en
Application filed by Sylvania Electric Products Inc filed Critical Sylvania Electric Products Inc
Priority to FR919569A priority Critical patent/FR1369983A/en
Application granted granted Critical
Publication of FR1369983A publication Critical patent/FR1369983A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • C30B25/18Epitaxial-layer growth characterised by the substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR919569A 1961-12-26 1962-12-21 Method and device for making monocrystalline films Expired FR1369983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR919569A FR1369983A (en) 1961-12-26 1962-12-21 Method and device for making monocrystalline films

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US161992A US3139361A (en) 1961-12-26 1961-12-26 Method of forming single crystal films on a material in fluid form
FR919569A FR1369983A (en) 1961-12-26 1962-12-21 Method and device for making monocrystalline films

Publications (1)

Publication Number Publication Date
FR1369983A true FR1369983A (en) 1964-08-21

Family

ID=26199059

Family Applications (1)

Application Number Title Priority Date Filing Date
FR919569A Expired FR1369983A (en) 1961-12-26 1962-12-21 Method and device for making monocrystalline films

Country Status (1)

Country Link
FR (1) FR1369983A (en)

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