FR1369360A - Perfectionnements aux creusets pour la métallisation à l'aluminium de rubans en matière diélectrique - Google Patents
Perfectionnements aux creusets pour la métallisation à l'aluminium de rubans en matière diélectriqueInfo
- Publication number
- FR1369360A FR1369360A FR929892A FR929892A FR1369360A FR 1369360 A FR1369360 A FR 1369360A FR 929892 A FR929892 A FR 929892A FR 929892 A FR929892 A FR 929892A FR 1369360 A FR1369360 A FR 1369360A
- Authority
- FR
- France
- Prior art keywords
- crucibles
- aluminum metallization
- ribbons
- dielectric
- dielectric ribbons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR929892A FR1369360A (fr) | 1963-03-30 | 1963-03-30 | Perfectionnements aux creusets pour la métallisation à l'aluminium de rubans en matière diélectrique |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR929892A FR1369360A (fr) | 1963-03-30 | 1963-03-30 | Perfectionnements aux creusets pour la métallisation à l'aluminium de rubans en matière diélectrique |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1369360A true FR1369360A (fr) | 1964-08-14 |
Family
ID=8800536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR929892A Expired FR1369360A (fr) | 1963-03-30 | 1963-03-30 | Perfectionnements aux creusets pour la métallisation à l'aluminium de rubans en matière diélectrique |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1369360A (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0255965A3 (en) * | 1986-08-06 | 1988-08-10 | Sgs-Thomson Microelectronics | Refrigerant fluid trap for vacuum evaporators for the deposit of thin metal films |
EP1889942A1 (fr) * | 2006-08-16 | 2008-02-20 | Applied Materials GmbH & Co. KG | Dispositif d'évaporation avec chargement automatique du matèriau |
-
1963
- 1963-03-30 FR FR929892A patent/FR1369360A/fr not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0255965A3 (en) * | 1986-08-06 | 1988-08-10 | Sgs-Thomson Microelectronics | Refrigerant fluid trap for vacuum evaporators for the deposit of thin metal films |
EP1889942A1 (fr) * | 2006-08-16 | 2008-02-20 | Applied Materials GmbH & Co. KG | Dispositif d'évaporation avec chargement automatique du matèriau |
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