FR1369116A - Extensomètre à semi-conducteurs et son procédé de fabrication - Google Patents

Extensomètre à semi-conducteurs et son procédé de fabrication

Info

Publication number
FR1369116A
FR1369116A FR946845A FR946845A FR1369116A FR 1369116 A FR1369116 A FR 1369116A FR 946845 A FR946845 A FR 946845A FR 946845 A FR946845 A FR 946845A FR 1369116 A FR1369116 A FR 1369116A
Authority
FR
France
Prior art keywords
extensometer
semiconductor
manufacturing process
manufacturing
semiconductor extensometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR946845A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Schenck AG
Original Assignee
Carl Schenck Maschinenfabrik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Schenck Maschinenfabrik GmbH filed Critical Carl Schenck Maschinenfabrik GmbH
Priority to FR946845A priority Critical patent/FR1369116A/fr
Application granted granted Critical
Publication of FR1369116A publication Critical patent/FR1369116A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
FR946845A 1963-09-06 1963-09-06 Extensomètre à semi-conducteurs et son procédé de fabrication Expired FR1369116A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR946845A FR1369116A (fr) 1963-09-06 1963-09-06 Extensomètre à semi-conducteurs et son procédé de fabrication

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR946845A FR1369116A (fr) 1963-09-06 1963-09-06 Extensomètre à semi-conducteurs et son procédé de fabrication

Publications (1)

Publication Number Publication Date
FR1369116A true FR1369116A (fr) 1964-08-07

Family

ID=8811928

Family Applications (1)

Application Number Title Priority Date Filing Date
FR946845A Expired FR1369116A (fr) 1963-09-06 1963-09-06 Extensomètre à semi-conducteurs et son procédé de fabrication

Country Status (1)

Country Link
FR (1) FR1369116A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0096156A2 (fr) * 1982-04-06 1983-12-21 Bran & Luebbe Industrie Automation GmbH & Co. Procédé pour couvrir des structures physiques sensibles d'une façon quasi-hermétique et avec une influence limitée, en particulier pour jauges de contrainte

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0096156A2 (fr) * 1982-04-06 1983-12-21 Bran & Luebbe Industrie Automation GmbH & Co. Procédé pour couvrir des structures physiques sensibles d'une façon quasi-hermétique et avec une influence limitée, en particulier pour jauges de contrainte
EP0096156A3 (en) * 1982-04-06 1984-11-14 Industrie Automation Wage- und Prozesstechnik GmbH & Co. Process for the quasi-hermetic, almost reactionless covering of sensitive physical structures, especially strain gauges

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