FR1348684A - Folded filament beam generator - Google Patents

Folded filament beam generator

Info

Publication number
FR1348684A
FR1348684A FR921515A FR921515A FR1348684A FR 1348684 A FR1348684 A FR 1348684A FR 921515 A FR921515 A FR 921515A FR 921515 A FR921515 A FR 921515A FR 1348684 A FR1348684 A FR 1348684A
Authority
FR
France
Prior art keywords
beam generator
filament beam
folded filament
folded
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR921515A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stauffer Chemical Co
Original Assignee
Stauffer Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US166255A external-priority patent/US3172007A/en
Application filed by Stauffer Chemical Co filed Critical Stauffer Chemical Co
Priority to FR921515A priority Critical patent/FR1348684A/en
Application granted granted Critical
Publication of FR1348684A publication Critical patent/FR1348684A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
FR921515A 1962-01-15 1963-01-15 Folded filament beam generator Expired FR1348684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR921515A FR1348684A (en) 1962-01-15 1963-01-15 Folded filament beam generator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US166255A US3172007A (en) 1962-01-15 1962-01-15 Folded filament beam generator
FR921515A FR1348684A (en) 1962-01-15 1963-01-15 Folded filament beam generator

Publications (1)

Publication Number Publication Date
FR1348684A true FR1348684A (en) 1964-01-10

Family

ID=26199378

Family Applications (1)

Application Number Title Priority Date Filing Date
FR921515A Expired FR1348684A (en) 1962-01-15 1963-01-15 Folded filament beam generator

Country Status (1)

Country Link
FR (1) FR1348684A (en)

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