FR1341047A - Dépôt de circuits de film mince sans utilisation de masques - Google Patents

Dépôt de circuits de film mince sans utilisation de masques

Info

Publication number
FR1341047A
FR1341047A FR913509A FR913509A FR1341047A FR 1341047 A FR1341047 A FR 1341047A FR 913509 A FR913509 A FR 913509A FR 913509 A FR913509 A FR 913509A FR 1341047 A FR1341047 A FR 1341047A
Authority
FR
France
Prior art keywords
masks
deposition
thin film
film circuits
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR913509A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to FR913509A priority Critical patent/FR1341047A/fr
Application granted granted Critical
Publication of FR1341047A publication Critical patent/FR1341047A/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/048Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00Electric solid-state thin-film or thick-film devices, not otherwise provided for

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR913509A 1961-10-27 1962-10-26 Dépôt de circuits de film mince sans utilisation de masques Expired FR1341047A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR913509A FR1341047A (fr) 1961-10-27 1962-10-26 Dépôt de circuits de film mince sans utilisation de masques

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14814861A 1961-10-27 1961-10-27
FR913509A FR1341047A (fr) 1961-10-27 1962-10-26 Dépôt de circuits de film mince sans utilisation de masques

Publications (1)

Publication Number Publication Date
FR1341047A true FR1341047A (fr) 1963-10-25

Family

ID=26198122

Family Applications (1)

Application Number Title Priority Date Filing Date
FR913509A Expired FR1341047A (fr) 1961-10-27 1962-10-26 Dépôt de circuits de film mince sans utilisation de masques

Country Status (1)

Country Link
FR (1) FR1341047A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2345270A1 (fr) * 1976-03-23 1977-10-21 Warner Lambert Co Perfectionnements aux lames de rasoir
FR2535344A1 (fr) * 1982-10-29 1984-05-04 Thomson Csf Procede de depot selectif d'une couche de metal refractaire sur une piece en graphite

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2345270A1 (fr) * 1976-03-23 1977-10-21 Warner Lambert Co Perfectionnements aux lames de rasoir
FR2535344A1 (fr) * 1982-10-29 1984-05-04 Thomson Csf Procede de depot selectif d'une couche de metal refractaire sur une piece en graphite

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