FR1341047A - Dépôt de circuits de film mince sans utilisation de masques - Google Patents
Dépôt de circuits de film mince sans utilisation de masquesInfo
- Publication number
- FR1341047A FR1341047A FR913509A FR913509A FR1341047A FR 1341047 A FR1341047 A FR 1341047A FR 913509 A FR913509 A FR 913509A FR 913509 A FR913509 A FR 913509A FR 1341047 A FR1341047 A FR 1341047A
- Authority
- FR
- France
- Prior art keywords
- masks
- deposition
- thin film
- film circuits
- circuits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000008021 deposition Effects 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR913509A FR1341047A (fr) | 1961-10-27 | 1962-10-26 | Dépôt de circuits de film mince sans utilisation de masques |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14814861A | 1961-10-27 | 1961-10-27 | |
FR913509A FR1341047A (fr) | 1961-10-27 | 1962-10-26 | Dépôt de circuits de film mince sans utilisation de masques |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1341047A true FR1341047A (fr) | 1963-10-25 |
Family
ID=26198122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR913509A Expired FR1341047A (fr) | 1961-10-27 | 1962-10-26 | Dépôt de circuits de film mince sans utilisation de masques |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1341047A (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2345270A1 (fr) * | 1976-03-23 | 1977-10-21 | Warner Lambert Co | Perfectionnements aux lames de rasoir |
FR2535344A1 (fr) * | 1982-10-29 | 1984-05-04 | Thomson Csf | Procede de depot selectif d'une couche de metal refractaire sur une piece en graphite |
-
1962
- 1962-10-26 FR FR913509A patent/FR1341047A/fr not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2345270A1 (fr) * | 1976-03-23 | 1977-10-21 | Warner Lambert Co | Perfectionnements aux lames de rasoir |
FR2535344A1 (fr) * | 1982-10-29 | 1984-05-04 | Thomson Csf | Procede de depot selectif d'une couche de metal refractaire sur une piece en graphite |
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