FR1331853A - Vacuum pumping device - Google Patents

Vacuum pumping device

Info

Publication number
FR1331853A
FR1331853A FR907642A FR907642A FR1331853A FR 1331853 A FR1331853 A FR 1331853A FR 907642 A FR907642 A FR 907642A FR 907642 A FR907642 A FR 907642A FR 1331853 A FR1331853 A FR 1331853A
Authority
FR
France
Prior art keywords
pumping device
vacuum pumping
vacuum
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR907642A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US135010A external-priority patent/US3147910A/en
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Priority to FR907642A priority Critical patent/FR1331853A/en
Application granted granted Critical
Publication of FR1331853A publication Critical patent/FR1331853A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR907642A 1961-08-30 1962-08-23 Vacuum pumping device Expired FR1331853A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR907642A FR1331853A (en) 1961-08-30 1962-08-23 Vacuum pumping device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US135010A US3147910A (en) 1961-08-30 1961-08-30 Vacuum pump apparatus
FR907642A FR1331853A (en) 1961-08-30 1962-08-23 Vacuum pumping device

Publications (1)

Publication Number Publication Date
FR1331853A true FR1331853A (en) 1963-07-05

Family

ID=26197217

Family Applications (1)

Application Number Title Priority Date Filing Date
FR907642A Expired FR1331853A (en) 1961-08-30 1962-08-23 Vacuum pumping device

Country Status (1)

Country Link
FR (1) FR1331853A (en)

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