FR1327674A - Beam deflection system for electrified carriers - Google Patents
Beam deflection system for electrified carriersInfo
- Publication number
- FR1327674A FR1327674A FR903005A FR903005A FR1327674A FR 1327674 A FR1327674 A FR 1327674A FR 903005 A FR903005 A FR 903005A FR 903005 A FR903005 A FR 903005A FR 1327674 A FR1327674 A FR 1327674A
- Authority
- FR
- France
- Prior art keywords
- electrified
- carriers
- beam deflection
- deflection system
- electrified carriers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR903005A FR1327674A (en) | 1961-08-31 | 1962-07-05 | Beam deflection system for electrified carriers |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1961H0043528 DE1248175B (en) | 1961-08-31 | 1961-08-31 | Electron gun |
FR903005A FR1327674A (en) | 1961-08-31 | 1962-07-05 | Beam deflection system for electrified carriers |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1327674A true FR1327674A (en) | 1963-05-17 |
Family
ID=25979810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR903005A Expired FR1327674A (en) | 1961-08-31 | 1962-07-05 | Beam deflection system for electrified carriers |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1327674A (en) |
-
1962
- 1962-07-05 FR FR903005A patent/FR1327674A/en not_active Expired
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