FR1327520A - Enhancements to high vacuum devices - Google Patents

Enhancements to high vacuum devices

Info

Publication number
FR1327520A
FR1327520A FR902512A FR902512A FR1327520A FR 1327520 A FR1327520 A FR 1327520A FR 902512 A FR902512 A FR 902512A FR 902512 A FR902512 A FR 902512A FR 1327520 A FR1327520 A FR 1327520A
Authority
FR
France
Prior art keywords
enhancements
high vacuum
vacuum devices
devices
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR902512A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB2374461A external-priority patent/GB956399A/en
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Priority to FR902512A priority Critical patent/FR1327520A/en
Application granted granted Critical
Publication of FR1327520A publication Critical patent/FR1327520A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
FR902512A 1961-06-30 1962-06-29 Enhancements to high vacuum devices Expired FR1327520A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR902512A FR1327520A (en) 1961-06-30 1962-06-29 Enhancements to high vacuum devices

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB2374461A GB956399A (en) 1961-06-30 1961-06-30 Improvements relating to high vacuum electron or ion beam devices
FR902512A FR1327520A (en) 1961-06-30 1962-06-29 Enhancements to high vacuum devices

Publications (1)

Publication Number Publication Date
FR1327520A true FR1327520A (en) 1963-05-17

Family

ID=26196432

Family Applications (1)

Application Number Title Priority Date Filing Date
FR902512A Expired FR1327520A (en) 1961-06-30 1962-06-29 Enhancements to high vacuum devices

Country Status (1)

Country Link
FR (1) FR1327520A (en)

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