FR1307408A - Electron beam analyzer - Google Patents

Electron beam analyzer

Info

Publication number
FR1307408A
FR1307408A FR874836A FR874836A FR1307408A FR 1307408 A FR1307408 A FR 1307408A FR 874836 A FR874836 A FR 874836A FR 874836 A FR874836 A FR 874836A FR 1307408 A FR1307408 A FR 1307408A
Authority
FR
France
Prior art keywords
electron beam
beam analyzer
analyzer
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR874836A
Other languages
French (fr)
Inventor
Louis Shapiro
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US92889A external-priority patent/US3235727A/en
Application filed filed Critical
Priority to FR874836A priority Critical patent/FR1307408A/en
Application granted granted Critical
Publication of FR1307408A publication Critical patent/FR1307408A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR874836A 1961-03-02 1961-10-03 Electron beam analyzer Expired FR1307408A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR874836A FR1307408A (en) 1961-03-02 1961-10-03 Electron beam analyzer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US92889A US3235727A (en) 1961-03-02 1961-03-02 Electron probe system
FR874836A FR1307408A (en) 1961-03-02 1961-10-03 Electron beam analyzer

Publications (1)

Publication Number Publication Date
FR1307408A true FR1307408A (en) 1962-10-26

Family

ID=26192530

Family Applications (1)

Application Number Title Priority Date Filing Date
FR874836A Expired FR1307408A (en) 1961-03-02 1961-10-03 Electron beam analyzer

Country Status (1)

Country Link
FR (1) FR1307408A (en)

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