FR1291262A - Process for the production of metallic or non-metallic deposits, and products obtained - Google Patents
Process for the production of metallic or non-metallic deposits, and products obtainedInfo
- Publication number
- FR1291262A FR1291262A FR863643A FR863643A FR1291262A FR 1291262 A FR1291262 A FR 1291262A FR 863643 A FR863643 A FR 863643A FR 863643 A FR863643 A FR 863643A FR 1291262 A FR1291262 A FR 1291262A
- Authority
- FR
- France
- Prior art keywords
- metallic
- production
- products obtained
- deposits
- metallic deposits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/022—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02244—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of a metallic layer
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR863643A FR1291262A (en) | 1961-06-01 | 1961-06-01 | Process for the production of metallic or non-metallic deposits, and products obtained |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR863643A FR1291262A (en) | 1961-06-01 | 1961-06-01 | Process for the production of metallic or non-metallic deposits, and products obtained |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1291262A true FR1291262A (en) | 1962-04-20 |
Family
ID=8756388
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR863643A Expired FR1291262A (en) | 1961-06-01 | 1961-06-01 | Process for the production of metallic or non-metallic deposits, and products obtained |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1291262A (en) |
-
1961
- 1961-06-01 FR FR863643A patent/FR1291262A/en not_active Expired
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