FR1288587A - Electronic probe x-ray analyzer - Google Patents

Electronic probe x-ray analyzer

Info

Publication number
FR1288587A
FR1288587A FR860931A FR860931A FR1288587A FR 1288587 A FR1288587 A FR 1288587A FR 860931 A FR860931 A FR 860931A FR 860931 A FR860931 A FR 860931A FR 1288587 A FR1288587 A FR 1288587A
Authority
FR
France
Prior art keywords
ray analyzer
electronic probe
probe
electronic
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR860931A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
APPLIED RES LAB
Applied Research Laboratories Inc
Original Assignee
APPLIED RES LAB
Applied Research Laboratories Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US52640A external-priority patent/US3107297A/en
Application filed by APPLIED RES LAB, Applied Research Laboratories Inc filed Critical APPLIED RES LAB
Priority to FR860931A priority Critical patent/FR1288587A/en
Application granted granted Critical
Publication of FR1288587A publication Critical patent/FR1288587A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
FR860931A 1960-08-29 1961-05-05 Electronic probe x-ray analyzer Expired FR1288587A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR860931A FR1288587A (en) 1960-08-29 1961-05-05 Electronic probe x-ray analyzer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US52640A US3107297A (en) 1960-08-29 1960-08-29 Electron probe X-ray analyzer wherein the emitted X-radiation passes through the objective lens
FR860931A FR1288587A (en) 1960-08-29 1961-05-05 Electronic probe x-ray analyzer

Publications (1)

Publication Number Publication Date
FR1288587A true FR1288587A (en) 1962-03-24

Family

ID=26190406

Family Applications (1)

Application Number Title Priority Date Filing Date
FR860931A Expired FR1288587A (en) 1960-08-29 1961-05-05 Electronic probe x-ray analyzer

Country Status (1)

Country Link
FR (1) FR1288587A (en)

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