FR1285700A - Système de contrôle d'épaisseur - Google Patents

Système de contrôle d'épaisseur

Info

Publication number
FR1285700A
FR1285700A FR857756A FR857756A FR1285700A FR 1285700 A FR1285700 A FR 1285700A FR 857756 A FR857756 A FR 857756A FR 857756 A FR857756 A FR 857756A FR 1285700 A FR1285700 A FR 1285700A
Authority
FR
France
Prior art keywords
control system
thickness control
thickness
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR857756A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US40707A external-priority patent/US3059611A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to FR857756A priority Critical patent/FR1285700A/fr
Application granted granted Critical
Publication of FR1285700A publication Critical patent/FR1285700A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D5/00—Control of dimensions of material
    • G05D5/02—Control of dimensions of material of thickness, e.g. of rolled material
    • G05D5/03—Control of dimensions of material of thickness, e.g. of rolled material characterised by the use of electric means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR857756A 1960-07-05 1961-04-05 Système de contrôle d'épaisseur Expired FR1285700A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR857756A FR1285700A (fr) 1960-07-05 1961-04-05 Système de contrôle d'épaisseur

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US40707A US3059611A (en) 1960-07-05 1960-07-05 Monitoring apparatus
FR857756A FR1285700A (fr) 1960-07-05 1961-04-05 Système de contrôle d'épaisseur

Publications (1)

Publication Number Publication Date
FR1285700A true FR1285700A (fr) 1962-02-23

Family

ID=26189975

Family Applications (1)

Application Number Title Priority Date Filing Date
FR857756A Expired FR1285700A (fr) 1960-07-05 1961-04-05 Système de contrôle d'épaisseur

Country Status (1)

Country Link
FR (1) FR1285700A (fr)

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