FR1285343A - Device for the detection of ions of different masses and its method of operation - Google Patents

Device for the detection of ions of different masses and its method of operation

Info

Publication number
FR1285343A
FR1285343A FR849305A FR849305A FR1285343A FR 1285343 A FR1285343 A FR 1285343A FR 849305 A FR849305 A FR 849305A FR 849305 A FR849305 A FR 849305A FR 1285343 A FR1285343 A FR 1285343A
Authority
FR
France
Prior art keywords
ions
detection
different masses
masses
different
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR849305A
Other languages
French (fr)
Inventor
Guenter Reich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
E Leybolds Nachfolger AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by E Leybolds Nachfolger AG filed Critical E Leybolds Nachfolger AG
Priority to FR849305A priority Critical patent/FR1285343A/en
Application granted granted Critical
Publication of FR1285343A publication Critical patent/FR1285343A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR849305A 1961-01-10 1961-01-10 Device for the detection of ions of different masses and its method of operation Expired FR1285343A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR849305A FR1285343A (en) 1961-01-10 1961-01-10 Device for the detection of ions of different masses and its method of operation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR849305A FR1285343A (en) 1961-01-10 1961-01-10 Device for the detection of ions of different masses and its method of operation

Publications (1)

Publication Number Publication Date
FR1285343A true FR1285343A (en) 1962-02-23

Family

ID=8746448

Family Applications (1)

Application Number Title Priority Date Filing Date
FR849305A Expired FR1285343A (en) 1961-01-10 1961-01-10 Device for the detection of ions of different masses and its method of operation

Country Status (1)

Country Link
FR (1) FR1285343A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109997214A (en) * 2016-12-12 2019-07-09 应用材料公司 It generates ion energy distribution function (IEDF)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109997214A (en) * 2016-12-12 2019-07-09 应用材料公司 It generates ion energy distribution function (IEDF)
CN109997214B (en) * 2016-12-12 2023-08-22 应用材料公司 Generating Ion Energy Distribution Function (IEDF)

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