FR1257306A - Method and apparatus for the manufacture of pure monosilane - Google Patents

Method and apparatus for the manufacture of pure monosilane

Info

Publication number
FR1257306A
FR1257306A FR825491A FR825491A FR1257306A FR 1257306 A FR1257306 A FR 1257306A FR 825491 A FR825491 A FR 825491A FR 825491 A FR825491 A FR 825491A FR 1257306 A FR1257306 A FR 1257306A
Authority
FR
France
Prior art keywords
manufacture
pure monosilane
monosilane
pure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR825491A
Other languages
French (fr)
Inventor
Hiroshi Ishizuka
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to FR825491A priority Critical patent/FR1257306A/en
Application granted granted Critical
Publication of FR1257306A publication Critical patent/FR1257306A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/043—Monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/06—Metal silicides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
FR825491A 1960-04-27 1960-04-27 Method and apparatus for the manufacture of pure monosilane Expired FR1257306A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR825491A FR1257306A (en) 1960-04-27 1960-04-27 Method and apparatus for the manufacture of pure monosilane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR825491A FR1257306A (en) 1960-04-27 1960-04-27 Method and apparatus for the manufacture of pure monosilane

Publications (1)

Publication Number Publication Date
FR1257306A true FR1257306A (en) 1961-03-31

Family

ID=8730186

Family Applications (1)

Application Number Title Priority Date Filing Date
FR825491A Expired FR1257306A (en) 1960-04-27 1960-04-27 Method and apparatus for the manufacture of pure monosilane

Country Status (1)

Country Link
FR (1) FR1257306A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0164250A2 (en) * 1984-06-07 1985-12-11 Idemitsu Kosan Company Limited Process for production of silane

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0164250A2 (en) * 1984-06-07 1985-12-11 Idemitsu Kosan Company Limited Process for production of silane
EP0164250A3 (en) * 1984-06-07 1986-03-19 Idemitsu Kosan Company Limited Process for production of silane

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