FR1248843A - Détecteur de fuite combiné avec une jauge de vide - Google Patents
Détecteur de fuite combiné avec une jauge de videInfo
- Publication number
- FR1248843A FR1248843A FR818799A FR818799A FR1248843A FR 1248843 A FR1248843 A FR 1248843A FR 818799 A FR818799 A FR 818799A FR 818799 A FR818799 A FR 818799A FR 1248843 A FR1248843 A FR 1248843A
- Authority
- FR
- France
- Prior art keywords
- vacuum gauge
- leak detector
- detector combined
- combined
- leak
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US793718A US3085198A (en) | 1959-02-17 | 1959-02-17 | Combination leak detector and vacuum gauge |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1248843A true FR1248843A (fr) | 1960-12-23 |
Family
ID=25160615
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR818799A Expired FR1248843A (fr) | 1959-02-17 | 1960-02-17 | Détecteur de fuite combiné avec une jauge de vide |
Country Status (2)
Country | Link |
---|---|
US (1) | US3085198A (fr) |
FR (1) | FR1248843A (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3324729A (en) * | 1964-09-14 | 1967-06-13 | Gen Electric | Method and apparatus for detecting leaks |
US5979225A (en) * | 1997-08-26 | 1999-11-09 | Applied Materials, Inc. | Diagnosis process of vacuum failure in a vacuum chamber |
US6286362B1 (en) | 1999-03-31 | 2001-09-11 | Applied Materials, Inc. | Dual mode leak detector |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE534288A (fr) * | 1953-12-24 | |||
US2820946A (en) * | 1954-02-01 | 1958-01-21 | Cons Electrodynamics Corp | Apparatus for leak detection and pressure measurement |
US2830263A (en) * | 1955-01-26 | 1958-04-08 | Rca Corp | Metal detector |
US2873425A (en) * | 1956-04-24 | 1959-02-10 | William H Huggins | Apparatus and method for detecting voids in dielectric sheet material |
-
1959
- 1959-02-17 US US793718A patent/US3085198A/en not_active Expired - Lifetime
-
1960
- 1960-02-17 FR FR818799A patent/FR1248843A/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
US3085198A (en) | 1963-04-09 |
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