FR1210117A - Dépôt d'aluminium à partir d'un composé gazeux, en particulier du triisobutyle d'aluminium - Google Patents

Dépôt d'aluminium à partir d'un composé gazeux, en particulier du triisobutyle d'aluminium

Info

Publication number
FR1210117A
FR1210117A FR1210117DA FR1210117A FR 1210117 A FR1210117 A FR 1210117A FR 1210117D A FR1210117D A FR 1210117DA FR 1210117 A FR1210117 A FR 1210117A
Authority
FR
France
Prior art keywords
aluminum
gaseous compound
triisobutyl
deposition
particular aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Engineering Company of Ohio
Original Assignee
Commonwealth Engineering Company of Ohio
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Engineering Company of Ohio filed Critical Commonwealth Engineering Company of Ohio
Application granted granted Critical
Publication of FR1210117A publication Critical patent/FR1210117A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
    • C23C16/20—Deposition of aluminium only

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR1210117D 1958-09-02 1958-09-02 Dépôt d'aluminium à partir d'un composé gazeux, en particulier du triisobutyle d'aluminium Expired FR1210117A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1210117T 1958-09-02

Publications (1)

Publication Number Publication Date
FR1210117A true FR1210117A (fr) 1960-03-07

Family

ID=9675014

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1210117D Expired FR1210117A (fr) 1958-09-02 1958-09-02 Dépôt d'aluminium à partir d'un composé gazeux, en particulier du triisobutyle d'aluminium

Country Status (1)

Country Link
FR (1) FR1210117A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2426743A1 (fr) * 1978-05-25 1979-12-21 Itt Procede et dispositif de revetement metallique par depot sous forme de vapeurs

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2426743A1 (fr) * 1978-05-25 1979-12-21 Itt Procede et dispositif de revetement metallique par depot sous forme de vapeurs

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