FR1181870A - Semiconductor silicon preparation process - Google Patents

Semiconductor silicon preparation process

Info

Publication number
FR1181870A
FR1181870A FR1181870DA FR1181870A FR 1181870 A FR1181870 A FR 1181870A FR 1181870D A FR1181870D A FR 1181870DA FR 1181870 A FR1181870 A FR 1181870A
Authority
FR
France
Prior art keywords
preparation process
semiconductor silicon
silicon preparation
semiconductor
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plessey Co Ltd
Original Assignee
Plessey Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plessey Co Ltd filed Critical Plessey Co Ltd
Application granted granted Critical
Publication of FR1181870A publication Critical patent/FR1181870A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/043—Monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/046—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
FR1181870D 1957-08-31 1957-08-31 Semiconductor silicon preparation process Expired FR1181870A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1181870T 1957-08-31

Publications (1)

Publication Number Publication Date
FR1181870A true FR1181870A (en) 1959-06-19

Family

ID=9662327

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1181870D Expired FR1181870A (en) 1957-08-31 1957-08-31 Semiconductor silicon preparation process

Country Status (1)

Country Link
FR (1) FR1181870A (en)

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