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Elektrochemische Werkek G M B H
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Elektrochemische Werkek G M B H
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Publication of FR10756EpublicationCriticalpatent/FR10756E/en
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J37/32055—Arc discharge
H—ELECTRICITY
H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
H05B7/00—Heating by electric discharge
H05B7/18—Heating by arc discharge
H05B7/185—Heating gases for arc discharge
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Engineering & Computer Science
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Analytical Chemistry
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FR10756D1908-04-101909-03-31
Process for the production of electric discharges with high energy consumption
ExpiredFR10756E
(en)