FR1041901A - Device for the compensation of symmetry defects of electronic lenses - Google Patents

Device for the compensation of symmetry defects of electronic lenses

Info

Publication number
FR1041901A
FR1041901A FR1041901DA FR1041901A FR 1041901 A FR1041901 A FR 1041901A FR 1041901D A FR1041901D A FR 1041901DA FR 1041901 A FR1041901 A FR 1041901A
Authority
FR
France
Prior art keywords
compensation
electronic lenses
symmetry defects
symmetry
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SU DDEUTSCHE LAB GmbH
Original Assignee
SU DDEUTSCHE LAB GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SU DDEUTSCHE LAB GmbH filed Critical SU DDEUTSCHE LAB GmbH
Application granted granted Critical
Publication of FR1041901A publication Critical patent/FR1041901A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
FR1041901D 1948-10-02 1951-08-20 Device for the compensation of symmetry defects of electronic lenses Expired FR1041901A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEP13553A DE950312C (en) 1948-10-02 1948-10-02 Device for compensating the symmetry errors of electron lenses

Publications (1)

Publication Number Publication Date
FR1041901A true FR1041901A (en) 1953-10-27

Family

ID=6119981

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1041901D Expired FR1041901A (en) 1948-10-02 1951-08-20 Device for the compensation of symmetry defects of electronic lenses

Country Status (4)

Country Link
CH (1) CH304852A (en)
DE (1) DE950312C (en)
FR (1) FR1041901A (en)
NL (1) NL163078B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE563662A (en) * 1957-01-03
DE1187335B (en) * 1958-04-24 1965-02-18 Tesla Np Device for compensating the axial astigmatism of electron lenses
DE1231035B (en) * 1962-08-03 1966-12-22 Siemens Ag Method and device for examining thin layers which show changes that can be observed under the influence of electrical fields, using a corpuscular optical microscope
DE1514706C2 (en) * 1966-03-15 1975-11-06 Siemens Ag, 1000 Berlin Und 8000 Muenchen Deflection system for corpuscular beam devices

Also Published As

Publication number Publication date
DE950312C (en) 1956-10-04
CH304852A (en) 1955-01-31
NL163078B (en)

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