FI960272A0 - Process for laser production of integrated structure for thin film solar cells - Google Patents

Process for laser production of integrated structure for thin film solar cells

Info

Publication number
FI960272A0
FI960272A0 FI960272A FI960272A FI960272A0 FI 960272 A0 FI960272 A0 FI 960272A0 FI 960272 A FI960272 A FI 960272A FI 960272 A FI960272 A FI 960272A FI 960272 A0 FI960272 A0 FI 960272A0
Authority
FI
Finland
Prior art keywords
thin film
solar cells
film solar
integrated structure
laser production
Prior art date
Application number
FI960272A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI960272A (en
FI117608B (en
Inventor
Franz Karg
Wolfgang Riedl
Richard Einzinger
Hubert Aulich
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of FI960272A publication Critical patent/FI960272A/en
Publication of FI960272A0 publication Critical patent/FI960272A0/en
Application granted granted Critical
Publication of FI117608B publication Critical patent/FI117608B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
    • H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264—Inorganic materials
    • H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
    • H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
    • H01L31/0463—PV modules composed of a plurality of thin film solar cells deposited on the same substrate characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
    • H01L31/204—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table including AIVBIV alloys, e.g. SiGe, SiC
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/16—Composite materials, e.g. fibre reinforced
    • B23K2103/166—Multilayered materials
    • B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/541—CuInSe2 material PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Sustainable Energy (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
FI960272A 1993-07-20 1996-01-19 A method for performing integrated laser structuring of thin-film solar cells FI117608B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE4324318A DE4324318C1 (en) 1993-07-20 1993-07-20 Method for series connection of an integrated thin-film solar cell arrangement
DE4324318 1993-07-20
PCT/DE1994/000803 WO1995003628A1 (en) 1993-07-20 1994-07-12 Integrated laser structuring process for thin film solar cells
DE9400803 1994-07-12

Publications (3)

Publication Number Publication Date
FI960272A FI960272A (en) 1996-01-19
FI960272A0 true FI960272A0 (en) 1996-01-19
FI117608B FI117608B (en) 2006-12-15

Family

ID=6493264

Family Applications (1)

Application Number Title Priority Date Filing Date
FI960272A FI117608B (en) 1993-07-20 1996-01-19 A method for performing integrated laser structuring of thin-film solar cells

Country Status (5)

Country Link
EP (1) EP0710402B1 (en)
JP (1) JP3414738B2 (en)
DE (2) DE4324318C1 (en)
FI (1) FI117608B (en)
WO (1) WO1995003628A1 (en)

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JPH11126916A (en) * 1997-10-24 1999-05-11 Sharp Corp Integrated-type thin film solar cell and its manufacture
JP4786010B2 (en) * 2000-03-23 2011-10-05 株式会社カネカ Manufacturing method of integrated hybrid thin film solar cell
DE10017610C2 (en) 2000-03-30 2002-10-31 Hahn Meitner Inst Berlin Gmbh Process for producing a solar module with integrated series-connected thin-film solar cells and use thereof
TWI226139B (en) 2002-01-31 2005-01-01 Osram Opto Semiconductors Gmbh Method to manufacture a semiconductor-component
DE10203795B4 (en) * 2002-01-31 2021-12-09 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Method for manufacturing a semiconductor component
EP1588414B1 (en) 2003-01-31 2014-12-03 OSRAM Opto Semiconductors GmbH Method for the separation of a semiconductor layer by laser pulses
JP4703350B2 (en) * 2005-10-13 2011-06-15 本田技研工業株式会社 Manufacturing method of solar cell
JP2007123532A (en) * 2005-10-27 2007-05-17 Honda Motor Co Ltd Solar cell
JP2007201304A (en) * 2006-01-30 2007-08-09 Honda Motor Co Ltd Solar cell and its manufacturing method
DE102007023697A1 (en) * 2006-05-25 2007-12-06 Honda Motor Co., Ltd. Chalcopyrite solar cell for converting light into electricity, has contact electrode with conductivity, which is higher than that of light absorption layer, and upper electrode divided into parts in area adjacent to contact electrode
WO2009082141A2 (en) * 2007-12-21 2009-07-02 Jusung Engineering Co., Ltd. Thin film type solar cell and method for manufacturing the same
KR101425890B1 (en) * 2007-12-26 2014-08-04 주성엔지니어링(주) Thin film type Solar Cell and Method for manufacturing the same
DE112009001438B4 (en) 2008-06-09 2013-08-08 Mitsubishi Electric Corp. Photoelectric thin-film converter and method for its production
US20100078064A1 (en) * 2008-09-29 2010-04-01 Thinsilicion Corporation Monolithically-integrated solar module
WO2010086042A1 (en) * 2009-01-29 2010-08-05 Applied Materials Inc. Scribing device and method of producing a thin-film solar cell module
EP2214215A1 (en) * 2009-01-29 2010-08-04 Applied Materials Inc., A Corporation Of The State Of Delaware Scribing Device and Method of Producing a Thin-Film Solar Cell Module
JP2010282998A (en) * 2009-06-02 2010-12-16 Seiko Epson Corp Solar cell and method for manufacturing the same
EP2284892A1 (en) * 2009-08-12 2011-02-16 Applied Materials, Inc. Method of manufacturing a semiconductor device module, semiconductor device connecting device, semiconductor device module manufacturing device, semiconductor device module
DE102009055675B4 (en) * 2009-11-25 2016-05-19 Calyxo Gmbh Photovoltaic module structure for the thin-film photovoltaic with an electrical line connection and method for producing the electrical line connection
EP2352171A1 (en) 2010-01-29 2011-08-03 Saint-Gobain Glass France Solar cell configuration and thin film solar module and method for producing same
EP2352178A1 (en) 2010-01-29 2011-08-03 Saint-Gobain Glass France Solar module assemblies and diode cable
DE102011075328A1 (en) * 2011-05-05 2012-11-08 Interpane Entwicklungs-Und Beratungsgesellschaft Mbh Apparatus and method for edge delamination and scoring of coated substrates
CN103718307A (en) 2011-08-10 2014-04-09 法国圣戈班玻璃厂 Solar module with reduced power loss and process for the production thereof
WO2013026463A1 (en) * 2011-08-19 2013-02-28 Universita' Degli Studi Di Padova Laser scribing process
ES2685519T3 (en) 2011-09-30 2018-10-09 Saint-Gobain Glass France Frameless solar module with mounting holes and procedure to produce such a solar module
WO2013045679A1 (en) 2011-09-30 2013-04-04 Saint-Gobain Glass France Laminated composite with drying means, and method for producing same
ES2784850T3 (en) 2011-09-30 2020-10-01 Cnbm Bengbu Design & Res Institute For Glass Industry Co Ltd Solar module with connection box and method of manufacturing it
KR20140066238A (en) 2011-10-19 2014-05-30 쌩-고벵 글래스 프랑스 Solar module with ribbon cable, and a method for the manufacture of same
WO2013079375A2 (en) 2011-11-30 2013-06-06 Saint-Gobain Glass France Frameless solar module having a module carrier and method for producing same
US9799543B2 (en) 2012-02-16 2017-10-24 Saint-Gobain Glass France Process box, arrangements and methods for processing coated substrates
CN103426975A (en) * 2012-05-25 2013-12-04 浙江慈能光伏科技有限公司 Weak light amorphous silicon solar cell chip manufacturing method
CN104937706B (en) 2012-07-09 2019-02-26 蚌埠玻璃工业设计研究院 Device and method for processing a substrate
ES2862409T3 (en) 2012-07-09 2021-10-07 Cnbm Bengbu Design & Res Institute For Glass Industry Co Ltd Device and method for heat treatment of an object
EP2685507B1 (en) 2012-07-09 2019-11-13 (CNBM) Bengbu Design & Research Institute for Glass Industry Co., Ltd. Solar module with connection assemblies for electrical external connection
EP2870623B1 (en) 2012-07-09 2021-01-13 (CNBM) Bengbu Design & Research Institute for Glass Industry Co., Ltd. Process box, assembly and method for processing coated substrates
WO2015004247A1 (en) 2013-07-10 2015-01-15 Saint-Gobain Glass France Solar module having an electrically insulated fastening element and method for the production thereof
CN104425637A (en) 2013-08-30 2015-03-18 中国建材国际工程集团有限公司 Partially transparent thin solar module
EP3493274A1 (en) 2017-12-04 2019-06-05 Bengbu Design & Research Institute for Glass Industry Thin film solar module with improved shunt resistor
KR102419215B1 (en) 2018-02-15 2022-07-11 씨엔비엠 리서치 인스티튜트 포 어드밴스드 글래스 머터리얼즈 그룹 컴퍼니 리미티드 How to make thin film solar modules
CN113707546A (en) * 2021-08-16 2021-11-26 成都莱普科技有限公司 Method for forming ohmic contact of semiconductor device by selective laser annealing

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Also Published As

Publication number Publication date
DE59410443D1 (en) 2006-11-30
WO1995003628A1 (en) 1995-02-02
EP0710402B1 (en) 2006-10-18
EP0710402A1 (en) 1996-05-08
DE4324318C1 (en) 1995-01-12
JP3414738B2 (en) 2003-06-09
FI960272A (en) 1996-01-19
FI117608B (en) 2006-12-15
JPH09500236A (en) 1997-01-07

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