FI940743A0 - Electrically adjustable surface micromechanical Fabry-Perot interferometer for use with an optical sensor, for example a Fabry-Perot interferometer - Google Patents
Electrically adjustable surface micromechanical Fabry-Perot interferometer for use with an optical sensor, for example a Fabry-Perot interferometerInfo
- Publication number
- FI940743A0 FI940743A0 FI940743A FI940743A FI940743A0 FI 940743 A0 FI940743 A0 FI 940743A0 FI 940743 A FI940743 A FI 940743A FI 940743 A FI940743 A FI 940743A FI 940743 A0 FI940743 A0 FI 940743A0
- Authority
- FI
- Finland
- Prior art keywords
- fabry
- perot interferometer
- optical sensor
- electrically adjustable
- adjustable surface
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI940743A FI95838C (en) | 1994-02-17 | 1994-02-17 | Electrically controllable surface micromechanical Fabry-Perot interferometer for use with an optical sensor, for example a Fabry-Perot interferometer |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI940743A FI95838C (en) | 1994-02-17 | 1994-02-17 | Electrically controllable surface micromechanical Fabry-Perot interferometer for use with an optical sensor, for example a Fabry-Perot interferometer |
FI940743 | 1994-02-17 |
Publications (4)
Publication Number | Publication Date |
---|---|
FI940743A0 true FI940743A0 (en) | 1994-02-17 |
FI940743A FI940743A (en) | 1995-08-18 |
FI95838B FI95838B (en) | 1995-12-15 |
FI95838C FI95838C (en) | 1996-03-25 |
Family
ID=8540138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI940743A FI95838C (en) | 1994-02-17 | 1994-02-17 | Electrically controllable surface micromechanical Fabry-Perot interferometer for use with an optical sensor, for example a Fabry-Perot interferometer |
Country Status (1)
Country | Link |
---|---|
FI (1) | FI95838C (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI125368B (en) | 2012-06-08 | 2015-09-15 | Teknologian Tutkimuskeskus Vtt Oy | Micromechanically adjustable Fabry-Perot interferometer system and method for achieving this |
-
1994
- 1994-02-17 FI FI940743A patent/FI95838C/en active
Also Published As
Publication number | Publication date |
---|---|
FI95838B (en) | 1995-12-15 |
FI940743A (en) | 1995-08-18 |
FI95838C (en) | 1996-03-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BB | Publication of examined application |