FI940743A0 - Electrically adjustable surface micromechanical Fabry-Perot interferometer for use with an optical sensor, for example a Fabry-Perot interferometer - Google Patents

Electrically adjustable surface micromechanical Fabry-Perot interferometer for use with an optical sensor, for example a Fabry-Perot interferometer

Info

Publication number
FI940743A0
FI940743A0 FI940743A FI940743A FI940743A0 FI 940743 A0 FI940743 A0 FI 940743A0 FI 940743 A FI940743 A FI 940743A FI 940743 A FI940743 A FI 940743A FI 940743 A0 FI940743 A0 FI 940743A0
Authority
FI
Finland
Prior art keywords
fabry
perot interferometer
optical sensor
electrically adjustable
adjustable surface
Prior art date
Application number
FI940743A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI95838B (en
FI940743A (en
FI95838C (en
Inventor
Martti Blomberg
Markku Orpana
Ari Lehto
Original Assignee
Vaisala Technologies Inc Oy
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Technologies Inc Oy, Valtion Teknillinen filed Critical Vaisala Technologies Inc Oy
Priority to FI940743A priority Critical patent/FI95838C/en
Publication of FI940743A0 publication Critical patent/FI940743A0/en
Publication of FI940743A publication Critical patent/FI940743A/en
Publication of FI95838B publication Critical patent/FI95838B/en
Application granted granted Critical
Publication of FI95838C publication Critical patent/FI95838C/en

Links

FI940743A 1994-02-17 1994-02-17 Electrically controllable surface micromechanical Fabry-Perot interferometer for use with an optical sensor, for example a Fabry-Perot interferometer FI95838C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FI940743A FI95838C (en) 1994-02-17 1994-02-17 Electrically controllable surface micromechanical Fabry-Perot interferometer for use with an optical sensor, for example a Fabry-Perot interferometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI940743A FI95838C (en) 1994-02-17 1994-02-17 Electrically controllable surface micromechanical Fabry-Perot interferometer for use with an optical sensor, for example a Fabry-Perot interferometer
FI940743 1994-02-17

Publications (4)

Publication Number Publication Date
FI940743A0 true FI940743A0 (en) 1994-02-17
FI940743A FI940743A (en) 1995-08-18
FI95838B FI95838B (en) 1995-12-15
FI95838C FI95838C (en) 1996-03-25

Family

ID=8540138

Family Applications (1)

Application Number Title Priority Date Filing Date
FI940743A FI95838C (en) 1994-02-17 1994-02-17 Electrically controllable surface micromechanical Fabry-Perot interferometer for use with an optical sensor, for example a Fabry-Perot interferometer

Country Status (1)

Country Link
FI (1) FI95838C (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI125368B (en) 2012-06-08 2015-09-15 Teknologian Tutkimuskeskus Vtt Oy Micromechanically adjustable Fabry-Perot interferometer system and method for achieving this

Also Published As

Publication number Publication date
FI95838B (en) 1995-12-15
FI940743A (en) 1995-08-18
FI95838C (en) 1996-03-25

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Legal Events

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