FI20155282A - Three axis gyroscope - Google Patents

Three axis gyroscope Download PDF

Info

Publication number
FI20155282A
FI20155282A FI20155282A FI20155282A FI20155282A FI 20155282 A FI20155282 A FI 20155282A FI 20155282 A FI20155282 A FI 20155282A FI 20155282 A FI20155282 A FI 20155282A FI 20155282 A FI20155282 A FI 20155282A
Authority
FI
Finland
Prior art keywords
axis gyroscope
gyroscope
axis
Prior art date
Application number
FI20155282A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI127202B (en
Inventor
Tommi Piirainen
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Priority to FI20155282A priority Critical patent/FI127202B/en
Priority to TW105109418A priority patent/TWI600882B/en
Priority to US15/095,299 priority patent/US10101159B2/en
Priority to EP16716911.9A priority patent/EP3283845B1/en
Priority to JP2017554263A priority patent/JP6477918B2/en
Priority to PCT/IB2016/052058 priority patent/WO2016166654A1/en
Publication of FI20155282A publication Critical patent/FI20155282A/en
Application granted granted Critical
Publication of FI127202B publication Critical patent/FI127202B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
FI20155282A 2015-04-16 2015-04-16 Triaxate gyroscope FI127202B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI20155282A FI127202B (en) 2015-04-16 2015-04-16 Triaxate gyroscope
TW105109418A TWI600882B (en) 2015-04-16 2016-03-25 Three axis gyroscope
US15/095,299 US10101159B2 (en) 2015-04-16 2016-04-11 Three axis gyroscope
EP16716911.9A EP3283845B1 (en) 2015-04-16 2016-04-12 Three axis gyroscope
JP2017554263A JP6477918B2 (en) 2015-04-16 2016-04-12 3-axis gyroscope
PCT/IB2016/052058 WO2016166654A1 (en) 2015-04-16 2016-04-12 Three axis gyroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20155282A FI127202B (en) 2015-04-16 2015-04-16 Triaxate gyroscope

Publications (2)

Publication Number Publication Date
FI20155282A true FI20155282A (en) 2016-10-17
FI127202B FI127202B (en) 2018-01-31

Family

ID=55755623

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20155282A FI127202B (en) 2015-04-16 2015-04-16 Triaxate gyroscope

Country Status (6)

Country Link
US (1) US10101159B2 (en)
EP (1) EP3283845B1 (en)
JP (1) JP6477918B2 (en)
FI (1) FI127202B (en)
TW (1) TWI600882B (en)
WO (1) WO2016166654A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107192384B (en) * 2017-07-24 2022-04-05 深迪半导体(绍兴)有限公司 MEMS triaxial gyroscope
DE102020202158A1 (en) * 2020-02-19 2021-08-19 Robert Bosch Gesellschaft mit beschränkter Haftung Micromechanical yaw rate sensor arrangement, yaw rate sensor array and corresponding manufacturing process
US11519726B2 (en) 2020-06-19 2022-12-06 Analog Devices, Inc. Mechanism for selective coupling in microelectromechanical systems inertial sensors

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5239868A (en) * 1989-05-19 1993-08-31 Matsushita Electric Industrial Co., Ltd. Angular rate detecting device
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5635640A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
DE19530007C2 (en) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Yaw rate sensor
FR2741151B1 (en) 1995-11-13 1998-01-30 Sfim Ind MECHANICAL RESONATOR GYROMETER
US6257057B1 (en) * 1998-12-16 2001-07-10 L-3 Communications Corporation Epitaxial coriolis rate sensor
FR2821422B1 (en) 2001-02-23 2003-05-23 Sagem PLANAR MECHANICAL RESONATOR SENSITIVE ACCORDING TO AN AXIS PERPENDICULAR TO ITS PLAN
US6918297B2 (en) * 2003-02-28 2005-07-19 Honeywell International, Inc. Miniature 3-dimensional package for MEMS sensors
FR2859528B1 (en) * 2003-09-09 2006-01-06 Thales Sa MICRO-FACTORY GYROMETER WITH DOUBLE DIAPASON AND DETECTION IN PLATE PLATE
US7370530B2 (en) * 2004-09-01 2008-05-13 Honeywell International Inc. Package for MEMS devices
US20080276706A1 (en) * 2004-09-27 2008-11-13 Conti Temic Microelectronic Gmbh Rotation Speed Sensor
US7421897B2 (en) * 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
US7617728B2 (en) * 2006-05-17 2009-11-17 Donato Cardarelli Tuning fork gyroscope
US7461552B2 (en) * 2006-10-23 2008-12-09 Custom Sensors & Technologies, Inc. Dual axis rate sensor
DE102007054505B4 (en) * 2007-11-15 2016-12-22 Robert Bosch Gmbh Yaw rate sensor
IT1391972B1 (en) * 2008-11-26 2012-02-02 St Microelectronics Rousset MICROELETTROMECHANICAL GYROSCOPE WITH ROTARY DRIVE MOVEMENT AND IMPROVED ELECTRICAL CHARACTERISTICS
IT1392741B1 (en) * 2008-12-23 2012-03-16 St Microelectronics Rousset MICROELETTROMECHANICAL GYROSCOPE WITH IMPROVED REJECTION OF ACCELERATION DISORDERS
DE102009001244A1 (en) * 2009-02-27 2010-09-02 Sensordynamics Ag Micro gyroscope for determining rotational movements about an x, y or z axis
DE102009001247A1 (en) * 2009-02-27 2010-09-09 Sensordynamics Ag Micro-electro-mechanical sensor
US8256290B2 (en) * 2009-03-17 2012-09-04 Minyao Mao Tri-axis angular rate sensor
FR2945621B1 (en) * 2009-05-15 2011-08-26 Commissariat Energie Atomique COUPLING STRUCTURE FOR RESIN GYROMETER
DE102009046506B4 (en) * 2009-11-06 2024-01-18 Robert Bosch Gmbh Rotation rate sensor
ITTO20091042A1 (en) * 2009-12-24 2011-06-25 St Microelectronics Srl MICROELETTROMECHANICAL INTEGRATED GYROSCOPE WITH IMPROVED DRIVE STRUCTURE
DE102010028005A1 (en) * 2010-04-20 2011-10-20 Sensordynamics Ag Micro gyroscope for detecting movements
FR2969278B1 (en) 2010-12-20 2013-07-05 Onera (Off Nat Aerospatiale) PLANAR STRUCTURE FOR TRI-AXIS GYROMETER
JP5822177B2 (en) * 2011-05-20 2015-11-24 セイコーエプソン株式会社 Gyro sensor, electronic equipment
TWI469254B (en) * 2011-12-29 2015-01-11 Ind Tech Res Inst Microelectromechanical system device having multi-path electrical interconnection and method for fabricating the same
FI125695B (en) * 2013-09-11 2016-01-15 Murata Manufacturing Co Improved gyroscope structure and gyroscope
US9404747B2 (en) * 2013-10-30 2016-08-02 Stmicroelectroncs S.R.L. Microelectromechanical gyroscope with compensation of quadrature error drift

Also Published As

Publication number Publication date
WO2016166654A1 (en) 2016-10-20
EP3283845A1 (en) 2018-02-21
US20160305781A1 (en) 2016-10-20
EP3283845B1 (en) 2019-06-26
TW201706566A (en) 2017-02-16
JP2018511808A (en) 2018-04-26
TWI600882B (en) 2017-10-01
FI127202B (en) 2018-01-31
JP6477918B2 (en) 2019-03-06
US10101159B2 (en) 2018-10-16

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