FI20125759A - Improved vibration gyroscope - Google Patents

Improved vibration gyroscope Download PDF

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Publication number
FI20125759A
FI20125759A FI20125759A FI20125759A FI20125759A FI 20125759 A FI20125759 A FI 20125759A FI 20125759 A FI20125759 A FI 20125759A FI 20125759 A FI20125759 A FI 20125759A FI 20125759 A FI20125759 A FI 20125759A
Authority
FI
Finland
Prior art keywords
signal
quadrature
control signal
controller
drive mode
Prior art date
Application number
FI20125759A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI124624B (en
Inventor
Lasse Aaltonen
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Priority to FI20125759A priority Critical patent/FI124624B/en
Priority to EP13810666.1A priority patent/EP2867614B1/en
Priority to JP2015519263A priority patent/JP5991431B2/en
Priority to CN201380031158.9A priority patent/CN105378430B/en
Priority to PCT/FI2013/050697 priority patent/WO2014001635A1/en
Priority to US13/927,443 priority patent/US10365105B2/en
Priority to TW102123159A priority patent/TWI623726B/en
Publication of FI20125759A publication Critical patent/FI20125759A/en
Application granted granted Critical
Publication of FI124624B publication Critical patent/FI124624B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Acoustics & Sound (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)

Abstract

An improved sensing device comprising micromechanical gyroscope and a feed-back loop with a controller for creating a damp control signal. A frequency generator generates a drive signal for drive mode vibration and a reference signal that is in quadrature-phase in relation to the drive mode vibration. The quadrature reference signal is summed with the damp control signal of the controller. The resulting transducer control signal is fed to the second mechanical resonator. Stable cancellation of the actual mechanical quadrature motion is achieved already at the sensing element level, before the detection of the Coriolis signal.
FI20125759A 2012-06-29 2012-06-29 Improved oscillating gyroscope FI124624B (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FI20125759A FI124624B (en) 2012-06-29 2012-06-29 Improved oscillating gyroscope
EP13810666.1A EP2867614B1 (en) 2012-06-29 2013-06-25 Improved vibratory gyroscope
JP2015519263A JP5991431B2 (en) 2012-06-29 2013-06-25 Improved vibratory gyroscope
CN201380031158.9A CN105378430B (en) 2012-06-29 2013-06-25 Improved vibration gyroscope
PCT/FI2013/050697 WO2014001635A1 (en) 2012-06-29 2013-06-25 Improved vibratory gyroscope
US13/927,443 US10365105B2 (en) 2012-06-29 2013-06-26 Vibratory gyroscope
TW102123159A TWI623726B (en) 2012-06-29 2013-06-28 Device with improved vibratory gyroscope and method for the device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20125759 2012-06-29
FI20125759A FI124624B (en) 2012-06-29 2012-06-29 Improved oscillating gyroscope

Publications (2)

Publication Number Publication Date
FI20125759A true FI20125759A (en) 2013-12-30
FI124624B FI124624B (en) 2014-11-14

Family

ID=49776762

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20125759A FI124624B (en) 2012-06-29 2012-06-29 Improved oscillating gyroscope

Country Status (7)

Country Link
US (1) US10365105B2 (en)
EP (1) EP2867614B1 (en)
JP (1) JP5991431B2 (en)
CN (1) CN105378430B (en)
FI (1) FI124624B (en)
TW (1) TWI623726B (en)
WO (1) WO2014001635A1 (en)

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FR2958030B1 (en) * 2010-03-23 2012-04-20 Sagem Defense Securite METHOD AND DEVICE FOR ANGULAR MEASUREMENT WITH NON-LINEARITY COMPENSATION
FI124794B (en) * 2012-06-29 2015-01-30 Murata Manufacturing Co Improved resonator
FR3005160B1 (en) * 2013-04-29 2016-02-12 Sagem Defense Securite BALANCED MEMS TYPE INERTIAL ANGULAR SENSOR AND METHOD FOR BALANCING SENSOR THEREOF
US9709399B2 (en) * 2015-01-12 2017-07-18 The Boeing Company Approach for control redistribution of coriolis vibratory gyroscope (CVG) for performance improvement
JP2016161451A (en) * 2015-03-03 2016-09-05 セイコーエプソン株式会社 Gyro sensor, electronic apparatus, mobile body, and method for manufacturing the gyro sensor
WO2016164543A1 (en) 2015-04-07 2016-10-13 Analog Devices, Inc. Quality factor estimation for resonators
US9709400B2 (en) * 2015-04-07 2017-07-18 Analog Devices, Inc. System, apparatus, and method for resonator and coriolis axis control in vibratory gyroscopes
US10571267B1 (en) 2015-09-01 2020-02-25 Hrl Laboratories, Llc High stability angular sensor
JP6687130B2 (en) * 2016-05-11 2020-04-22 株式会社村田製作所 Secondary sense loop with force feedback function
US10247600B2 (en) * 2016-11-10 2019-04-02 Analog Devices, Inc. Mode-matching of MEMS resonators
FI128195B (en) * 2017-09-05 2019-12-13 Tikitin Oy Frequency reference oscillator device and method of stabilizing a frequency reference signal
US10578435B2 (en) 2018-01-12 2020-03-03 Analog Devices, Inc. Quality factor compensation in microelectromechanical system (MEMS) gyroscopes
US11041722B2 (en) 2018-07-23 2021-06-22 Analog Devices, Inc. Systems and methods for sensing angular motion in the presence of low-frequency noise
CN115605765A (en) * 2021-04-23 2023-01-13 深圳市韶音科技有限公司（Cn） Acceleration sensing device

Family Cites Families (21)

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DE3508248A1 (en) 1985-03-08 1986-09-11 E.G.O. Elektro-Geräte Blanc u. Fischer, 7519 Oberderdingen ELECTRIC HEATING FOR A BIMETAL, IN PARTICULAR FOR AN ELECTRICAL POWER CONTROL UNIT
JP2548679B2 (en) * 1993-12-16 1996-10-30 本田技研工業株式会社 Vibrating gyroscope
FR2736153B1 (en) * 1995-06-29 1997-08-22 Asulab Sa ANGULAR SPEED MEASURING DEVICE
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6862934B2 (en) * 2001-10-05 2005-03-08 The Charles Stark Draper Laboratory, Inc. Tuning fork gyroscope
DE10248733B4 (en) * 2002-10-18 2004-10-28 Litef Gmbh Method for electronically tuning the read oscillation frequency of a Coriolis gyro
CN100561126C (en) 2003-03-06 2009-11-18 Bei科技公司 Utilize little processing gyrotron of electrostatic coupling
WO2005083356A1 (en) * 2004-02-23 2005-09-09 Halliburton Energy Services, Inc. Motion-responsive coupled masses
EP1624286B1 (en) * 2004-08-03 2017-10-04 STMicroelectronics Srl Micro-electro-mechanical sensor with force feedback loop
TWI268348B (en) 2004-11-12 2006-12-11 Chung-Shan Institute Of Science And Tech Armaments Bureau M N D Angular velocity detection device with temperature and vibration compensation comprising a base, a multi-mass-block vibrator, a plurality of flexible support sections and a plurality of planar electrodes
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US7444868B2 (en) * 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing for MEMS inertial sensors using time-varying voltages
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Also Published As

Publication number Publication date
US20140000365A1 (en) 2014-01-02
JP5991431B2 (en) 2016-09-14
CN105378430A (en) 2016-03-02
JP2015528899A (en) 2015-10-01
US10365105B2 (en) 2019-07-30
EP2867614A4 (en) 2016-05-18
FI124624B (en) 2014-11-14
WO2014001635A1 (en) 2014-01-03
EP2867614A1 (en) 2015-05-06
EP2867614B1 (en) 2017-06-14
TW201411095A (en) 2014-03-16
TWI623726B (en) 2018-05-11
CN105378430B (en) 2018-08-31

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