FI20106060A - Balanced-unbalanced filter based on laterally connected BAW thin films - Google Patents

Balanced-unbalanced filter based on laterally connected BAW thin films Download PDF

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Publication number
FI20106060A
FI20106060A FI20106060A FI20106060A FI20106060A FI 20106060 A FI20106060 A FI 20106060A FI 20106060 A FI20106060 A FI 20106060A FI 20106060 A FI20106060 A FI 20106060A FI 20106060 A FI20106060 A FI 20106060A
Authority
FI
Finland
Prior art keywords
balanced
thin films
filter based
laterally connected
unbalanced filter
Prior art date
Application number
FI20106060A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI20106060A0 (en
Inventor
Johanna Meltaus
Tuomas Pensala
Markku Ylilammi
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI20106060A priority Critical patent/FI20106060A/en
Publication of FI20106060A0 publication Critical patent/FI20106060A0/en
Priority to PCT/FI2011/050895 priority patent/WO2012049374A1/en
Publication of FI20106060A publication Critical patent/FI20106060A/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/0023—Balance-unbalance or balance-balance networks
    • H03H9/0095—Balance-unbalance or balance-balance networks using bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/562—Monolithic crystal filters comprising a ceramic piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
FI20106060A 2010-10-14 2010-10-14 Balanced-unbalanced filter based on laterally connected BAW thin films FI20106060A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FI20106060A FI20106060A (en) 2010-10-14 2010-10-14 Balanced-unbalanced filter based on laterally connected BAW thin films
PCT/FI2011/050895 WO2012049374A1 (en) 2010-10-14 2011-10-14 Balanced-unbalanced filter based on laterally coupled baw thin films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20106060A FI20106060A (en) 2010-10-14 2010-10-14 Balanced-unbalanced filter based on laterally connected BAW thin films

Publications (2)

Publication Number Publication Date
FI20106060A0 FI20106060A0 (en) 2010-10-14
FI20106060A true FI20106060A (en) 2012-04-15

Family

ID=43064218

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20106060A FI20106060A (en) 2010-10-14 2010-10-14 Balanced-unbalanced filter based on laterally connected BAW thin films

Country Status (2)

Country Link
FI (1) FI20106060A (en)
WO (1) WO2012049374A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10790801B2 (en) 2018-09-07 2020-09-29 Vtt Technical Research Centre Of Finland Ltd Loaded resonators for adjusting frequency response of acoustic wave resonators
US10630256B2 (en) 2018-09-07 2020-04-21 Vtt Technical Research Centre Of Finland Ltd Two-stage lateral bulk acoustic wave filter
US10756696B2 (en) 2018-09-10 2020-08-25 Vtt Technical Research Centre Of Finland Ltd Lateral bulk acoustic wave filter
US11088670B2 (en) 2019-09-11 2021-08-10 Vtt Technical Research Centre Of Finland Ltd Loaded series resonators for adjusting frequency response of acoustic wave resonators
US11223341B2 (en) 2019-10-22 2022-01-11 Vtt Technical Research Centre Of Finland Ltd Suppressing parasitic sidebands in lateral bulk acoustic wave resonators

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4442471B2 (en) * 2005-03-04 2010-03-31 セイコーエプソン株式会社 Potassium niobate deposit and manufacturing method thereof, piezoelectric thin film vibrator, frequency filter, oscillator, electronic circuit, and electronic device
WO2006126168A1 (en) * 2005-05-27 2006-11-30 Nxp B.V. Bulk acoustic wave resonator device
FI121722B (en) * 2006-09-18 2011-03-15 Valtion Teknillinen Disc capacitor or disc resonator arrangement

Also Published As

Publication number Publication date
WO2012049374A1 (en) 2012-04-19
FI20106060A0 (en) 2010-10-14

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