FI20040902A0 - Mikromekaaninen komponentin lämpötilariippuvuuden pienentäminen - Google Patents

Mikromekaaninen komponentin lämpötilariippuvuuden pienentäminen

Info

Publication number
FI20040902A0
FI20040902A0 FI20040902A FI20040902A FI20040902A0 FI 20040902 A0 FI20040902 A0 FI 20040902A0 FI 20040902 A FI20040902 A FI 20040902A FI 20040902 A FI20040902 A FI 20040902A FI 20040902 A0 FI20040902 A0 FI 20040902A0
Authority
FI
Finland
Prior art keywords
micromechanical
reduction
temperature dependence
component temperature
component
Prior art date
Application number
FI20040902A
Other languages
English (en)
Swedish (sv)
Other versions
FI20040902A (fi
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI20040902A priority Critical patent/FI20040902A/fi
Publication of FI20040902A0 publication Critical patent/FI20040902A0/fi
Priority to PCT/FI2005/000285 priority patent/WO2006000621A1/en
Publication of FI20040902A publication Critical patent/FI20040902A/fi

Links

FI20040902A 2004-06-29 2004-06-29 Mikromekaanisen komponentin lämpötilariippuvuuden pienentäminen FI20040902A (fi)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FI20040902A FI20040902A (fi) 2004-06-29 2004-06-29 Mikromekaanisen komponentin lämpötilariippuvuuden pienentäminen
PCT/FI2005/000285 WO2006000621A1 (en) 2004-06-29 2005-06-16 Enhancing stability and reducing temperature factor in a micromechanical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20040902A FI20040902A (fi) 2004-06-29 2004-06-29 Mikromekaanisen komponentin lämpötilariippuvuuden pienentäminen

Publications (2)

Publication Number Publication Date
FI20040902A0 true FI20040902A0 (fi) 2004-06-29
FI20040902A FI20040902A (fi) 2005-12-30

Family

ID=32524568

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20040902A FI20040902A (fi) 2004-06-29 2004-06-29 Mikromekaanisen komponentin lämpötilariippuvuuden pienentäminen

Country Status (1)

Country Link
FI (1) FI20040902A (fi)

Also Published As

Publication number Publication date
FI20040902A (fi) 2005-12-30

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Legal Events

Date Code Title Description
FD Application lapsed