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Priority to FI20010736ApriorityCriticalpatent/FI20010736A0/fi
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FI20010736A2001-04-102001-04-10Menetelmä kuituoptisen venymä-ja lämpötila-anturin valmistamiseksi ja kyseisen menetelmän mukainen laite
FI20010736A0
(fi)
Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block