ES421844A1 - Semiconductor manufacturing systems - Google Patents

Semiconductor manufacturing systems

Info

Publication number
ES421844A1
ES421844A1 ES421844A ES421844A ES421844A1 ES 421844 A1 ES421844 A1 ES 421844A1 ES 421844 A ES421844 A ES 421844A ES 421844 A ES421844 A ES 421844A ES 421844 A1 ES421844 A1 ES 421844A1
Authority
ES
Spain
Prior art keywords
workpiece
treatment
transport
transferring
loading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES421844A
Other languages
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00319563A external-priority patent/US3850105A/en
Priority claimed from US329920A external-priority patent/US3889355A/en
Priority claimed from US00329494A external-priority patent/US3845286A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of ES421844A1 publication Critical patent/ES421844A1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

A manufacturing system intended to subject workpieces to a series of treatment operations, a system comprising: a plurality of independently manageable or operable treatment sectors, each equipped with a loading and unloading position and being each sector destined to carry out a certain treatment operation on a workpiece; transport means for transporting a workpiece from a certain treatment sector to another; transfer means for transferring or transferring a workpiece between said means of transport and said loading or unloading positions; and control means for controlling said transport means and said transfer means so that an individual workpiece is routed through any prescribed sequence of treatment sectors, such that, in operation, it is carried out on said workpiece. individual labor a corresponding prescribed series of treatment operations. (Machine-translation by Google Translate, not legally binding)
ES421844A 1972-12-29 1973-12-28 Semiconductor manufacturing systems Expired ES421844A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US00319563A US3850105A (en) 1972-12-29 1972-12-29 Apparatus for transferring articles through various processing sectors of a manufacturing system
US329920A US3889355A (en) 1973-02-05 1973-02-05 Continuous processing system
US00329494A US3845286A (en) 1973-02-05 1973-02-05 Manufacturing control system for processing workpieces

Publications (1)

Publication Number Publication Date
ES421844A1 true ES421844A1 (en) 1976-05-01

Family

ID=27406059

Family Applications (1)

Application Number Title Priority Date Filing Date
ES421844A Expired ES421844A1 (en) 1972-12-29 1973-12-28 Semiconductor manufacturing systems

Country Status (6)

Country Link
CH (1) CH566843A5 (en)
DE (1) DE2364790C2 (en)
ES (1) ES421844A1 (en)
FR (1) FR2212965A5 (en)
GB (1) GB1451668A (en)
NL (1) NL184986C (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4571685A (en) * 1982-06-23 1986-02-18 Nec Corporation Production system for manufacturing semiconductor devices
JPS60184678A (en) * 1984-03-02 1985-09-20 Canon Inc Vacuum treating device
EP0162703A3 (en) * 1984-05-23 1987-02-04 Machine Technology Inc. Modular processing apparatus and modules for use therewith
JPS6126229A (en) * 1984-07-16 1986-02-05 Oki Electric Ind Co Ltd Apparatus for manufacturing semiconductor device
GB2191310A (en) * 1986-05-29 1987-12-09 Ford Motor Co Conveying system
JP2598305B2 (en) * 1988-06-06 1997-04-09 日東電工株式会社 Semiconductor wafer processing system
DE19821389B4 (en) * 1998-02-12 2010-02-18 Claas Fertigungstechnik Gmbh Method and device for handling workpieces

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL297192A (en) * 1962-07-20
AT288112B (en) * 1966-05-12 1971-02-25 Molins Machine Co Ltd Machine tool system with a central control unit
US3543392A (en) * 1967-12-15 1970-12-01 Cincinnati Milacron Inc Machine tools having conveyor means extending therebetween and carrying pallet means which are selectively connectable to the machine tools

Also Published As

Publication number Publication date
DE2364790C2 (en) 1985-11-28
AU6308273A (en) 1975-06-05
NL184986B (en) 1989-07-17
CH566843A5 (en) 1975-09-30
DE2364790A1 (en) 1974-07-04
NL7317755A (en) 1974-07-02
NL184986C (en) 1989-12-18
GB1451668A (en) 1976-10-06
FR2212965A5 (en) 1974-07-26

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