ES374897A1 - Un metodo de medir el espesor de una pelicula sobre una su-perficie de un sustrato. - Google Patents

Un metodo de medir el espesor de una pelicula sobre una su-perficie de un sustrato.

Info

Publication number
ES374897A1
ES374897A1 ES374897A ES374897A ES374897A1 ES 374897 A1 ES374897 A1 ES 374897A1 ES 374897 A ES374897 A ES 374897A ES 374897 A ES374897 A ES 374897A ES 374897 A1 ES374897 A1 ES 374897A1
Authority
ES
Spain
Prior art keywords
film
translation
measuring
substrate
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES374897A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of ES374897A1 publication Critical patent/ES374897A1/es
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G01B9/02065—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry using a second interferometer before or after measuring interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
ES374897A 1969-02-05 1969-12-24 Un metodo de medir el espesor de una pelicula sobre una su-perficie de un sustrato. Expired ES374897A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US79681969A 1969-02-05 1969-02-05

Publications (1)

Publication Number Publication Date
ES374897A1 true ES374897A1 (es) 1972-02-16

Family

ID=25169136

Family Applications (1)

Application Number Title Priority Date Filing Date
ES374897A Expired ES374897A1 (es) 1969-02-05 1969-12-24 Un metodo de medir el espesor de una pelicula sobre una su-perficie de un sustrato.

Country Status (5)

Country Link
BR (1) BR6915745D0 (es)
DE (1) DE1962359A1 (es)
ES (1) ES374897A1 (es)
FR (1) FR2030857A5 (es)
NL (1) NL6919571A (es)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2457253C2 (de) * 1974-12-04 1982-09-02 Krautkrämer, GmbH, 5000 Köln Optisches interferometrisches Verfahren und Vorrichtung zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings
DE102018202985A1 (de) 2018-02-28 2018-04-12 Carl Zeiss Smt Gmbh Verfahren zum Bestimmen einer Ablösewahrscheinlichkeit einer Schicht

Also Published As

Publication number Publication date
FR2030857A5 (en) 1970-11-13
NL6919571A (es) 1970-08-07
BR6915745D0 (pt) 1973-05-03
DE1962359A1 (de) 1970-09-03

Similar Documents

Publication Publication Date Title
NL7510450A (nl) Laserstraal-koppelinrichting.
DK137101B (da) Optoelektronisk arrangement til brændplansdetektion.
IT1050633B (it) Otturatore piano di strozzamento..particolarmente per condotte di alimentazione di turbine idrauliche
ES178055U (es) Prisma e interruptor que lo incluye.
ES374897A1 (es) Un metodo de medir el espesor de una pelicula sobre una su-perficie de un sustrato.
ES306276A1 (es) Un metodo para la determinacion de la geometria litologica de una seccion de la tierra.
CH482172A (fr) Télémètre à faisceau lumineux réfléchi
IT7824404A0 (it) Complesso di piano ottico mobile di precisione.
JPS51126846A (en) A data processing system
ES378076A1 (es) Perfeccionamientos en la construccion de diafragmas para cadena amplificadora.
JPS51138453A (en) Light information processing apparatus
ES422223A1 (es) Procedimiento y dispositivo para el control de homogeneidadde las capas metalicas depositadas sobre vidrio.
AT239061B (de) Filmkamera mit teilreflektierendem Strahlenteiler
ES332525A1 (es) Metodo para la obtencion de un revestimiento transmisor de la luz.
JPS5226848A (en) Reflection factor measuring method of curved surface mirror
ES136498U (es) Una lente optica compleja de una sola pieza.
JPS5240925A (en) Information output equipment
ES227239A1 (es) Procedimiento e instalación para l amedición de longitudes de micro-ondas
ES332007A3 (es) Procedimiento para marcar vidrio, especialmente vidrio optico.
ES9113Y (es) Espejo indistintamente opaco y transparente, aplicado a efectos de reflexión y transparencia con fines de propaganda y artísticos.
CA502091A (en) Multilayer low light reflecting films
ES142774U (es) Nueva esfera de reloj.
ES218903A3 (es) Un dispositivo para lograr efectos ópticos conseguidos con espejos semimetalizados
JPS5374381A (en) Thin film measurement method
ES402098A3 (es) Mejoras introducidas en la fabricacion de dispositivos de medicion dimensional.