ES330267A1 - Improvements in the formation of thin film condensers. (Machine-translation by Google Translate, not legally binding) - Google Patents
Improvements in the formation of thin film condensers. (Machine-translation by Google Translate, not legally binding)Info
- Publication number
- ES330267A1 ES330267A1 ES0330267A ES330267A ES330267A1 ES 330267 A1 ES330267 A1 ES 330267A1 ES 0330267 A ES0330267 A ES 0330267A ES 330267 A ES330267 A ES 330267A ES 330267 A1 ES330267 A1 ES 330267A1
- Authority
- ES
- Spain
- Prior art keywords
- thin film
- translation
- formation
- machine
- legally binding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 title abstract 3
- 230000015572 biosynthetic process Effects 0.000 title abstract 2
- 239000010408 film Substances 0.000 abstract 3
- 239000003990 capacitor Substances 0.000 abstract 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910001936 tantalum oxide Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/10—Metal-oxide dielectrics
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Inorganic Insulating Materials (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Improvements in the formation of thin film capacitors composed of a thin film electrode on a non-conductive substrate, an oxide dielectric film covering a chosen area of the electrode, and a counter electrode opposite the electrode and separated therefrom by the dielectric film; characterized by making said dielectric film of beta tantalum oxide. (Machine-translation by Google Translate, not legally binding)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US48038365A | 1965-08-17 | 1965-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES330267A1 true ES330267A1 (en) | 1967-06-16 |
Family
ID=23907747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES0330267A Expired ES330267A1 (en) | 1965-08-17 | 1966-08-03 | Improvements in the formation of thin film condensers. (Machine-translation by Google Translate, not legally binding) |
Country Status (10)
| Country | Link |
|---|---|
| JP (1) | JPS497434B1 (en) |
| AT (1) | AT266276B (en) |
| BE (1) | BE685408A (en) |
| CH (1) | CH455942A (en) |
| DE (1) | DE1589060A1 (en) |
| ES (1) | ES330267A1 (en) |
| GB (1) | GB1157903A (en) |
| IL (1) | IL26086A (en) |
| NL (1) | NL153012B (en) |
| SE (1) | SE327011B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE791139A (en) * | 1972-01-14 | 1973-03-01 | Western Electric Co | PROCESS FOR THE DEPOSIT OF BETA-TANTALUM DOPED BY NITROGEN |
| DE2513858C3 (en) * | 1975-03-27 | 1981-08-06 | Siemens AG, 1000 Berlin und 8000 München | Process for the production of a tantalum thin film capacitor |
-
1966
- 1966-07-04 IL IL2608666A patent/IL26086A/en unknown
- 1966-08-02 DE DE19661589060 patent/DE1589060A1/en active Pending
- 1966-08-03 ES ES0330267A patent/ES330267A1/en not_active Expired
- 1966-08-04 SE SE1061066A patent/SE327011B/xx unknown
- 1966-08-09 JP JP5195766A patent/JPS497434B1/ja active Pending
- 1966-08-10 AT AT766666A patent/AT266276B/en active
- 1966-08-11 BE BE685408D patent/BE685408A/xx unknown
- 1966-08-12 CH CH1164366A patent/CH455942A/en unknown
- 1966-08-16 GB GB3658066A patent/GB1157903A/en not_active Expired
- 1966-08-17 NL NL6611578A patent/NL153012B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JPS497434B1 (en) | 1974-02-20 |
| GB1157903A (en) | 1969-07-09 |
| BE685408A (en) | 1967-01-16 |
| NL6611578A (en) | 1967-02-20 |
| SE327011B (en) | 1970-08-10 |
| AT266276B (en) | 1968-11-11 |
| IL26086A (en) | 1970-07-19 |
| CH455942A (en) | 1968-05-15 |
| DE1589060A1 (en) | 1970-01-02 |
| NL153012B (en) | 1977-04-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FD1A | Patent lapsed |
Effective date: 19840217 |