ES2171097A1 - Sensor electronico para la medida de la posicion angular de un objeto luminiscente. - Google Patents
Sensor electronico para la medida de la posicion angular de un objeto luminiscente.Info
- Publication number
- ES2171097A1 ES2171097A1 ES009901375A ES9901375A ES2171097A1 ES 2171097 A1 ES2171097 A1 ES 2171097A1 ES 009901375 A ES009901375 A ES 009901375A ES 9901375 A ES9901375 A ES 9901375A ES 2171097 A1 ES2171097 A1 ES 2171097A1
- Authority
- ES
- Spain
- Prior art keywords
- silicon wafers
- light radiation
- electronic sensor
- welding together
- object comprises
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Light Receiving Elements (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Sensor electrónico para la medida de la posición angular de un objeto luminiscente. La presente invención se refiere a un sensor electrónico para la medida de la posición angular de un objeto luminiscente respecto de su vertical consistente en dos obleas de silicio atacadas con reactivos de forma anisotrópica. En una de ellas (2)se difunden los dopajes necesarios para construir un diodo PN (4) lateral y, seguidamente, se efectúa un ataque anisotrópico por su parte inferior, con parada en la zona n. La otra oblea (1) es atacada anisotrópicamente para realizar un orificio (3). Las dos obleas son soldadas, de manera que formen una cavidad en su interior. Por el orificio (3) entra un rayo de luz que incide sobre el diodo que está polarizado inversamente. Por efecto fotoeléctrico aparecen portadores en el punto de incidencia del rayo de luz con la región de deserción de la unión (4). Como resultado aparecen corrientes por los electrodos A y B que permiten determinar el punto de incidencia del rayo, y por consiguiente el ángulo ({ze}) con la vertical.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES009901375A ES2171097B1 (es) | 1999-06-21 | 1999-06-21 | Sensor electronico para la medida de la posicion angular de un objeto luminiscente. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES009901375A ES2171097B1 (es) | 1999-06-21 | 1999-06-21 | Sensor electronico para la medida de la posicion angular de un objeto luminiscente. |
Publications (2)
Publication Number | Publication Date |
---|---|
ES2171097A1 true ES2171097A1 (es) | 2002-08-16 |
ES2171097B1 ES2171097B1 (es) | 2003-11-01 |
Family
ID=8308915
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES009901375A Expired - Fee Related ES2171097B1 (es) | 1999-06-21 | 1999-06-21 | Sensor electronico para la medida de la posicion angular de un objeto luminiscente. |
Country Status (1)
Country | Link |
---|---|
ES (1) | ES2171097B1 (es) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2806456A4 (en) * | 2012-03-29 | 2015-03-18 | Asahi Kasei Microdevices Corp | LIGHT RECEIVING DEVICE |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2003965A6 (es) * | 1985-12-10 | 1988-12-01 | Santa Barbara Res Center | Un dispositivo optico de direccion de llegada sensible a las radiaciones electromagneticas incidentes |
EP0340412A2 (en) * | 1988-03-07 | 1989-11-08 | Kanegafuchi Chemical Industry Co., Ltd. | Semiconductor light beam position sensor, and image input device using this sensor |
US5747894A (en) * | 1994-03-11 | 1998-05-05 | Kabushiki Kaisha Yaskawa Denki | Factory automation connector and work pallet |
-
1999
- 1999-06-21 ES ES009901375A patent/ES2171097B1/es not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2003965A6 (es) * | 1985-12-10 | 1988-12-01 | Santa Barbara Res Center | Un dispositivo optico de direccion de llegada sensible a las radiaciones electromagneticas incidentes |
EP0340412A2 (en) * | 1988-03-07 | 1989-11-08 | Kanegafuchi Chemical Industry Co., Ltd. | Semiconductor light beam position sensor, and image input device using this sensor |
US5747894A (en) * | 1994-03-11 | 1998-05-05 | Kabushiki Kaisha Yaskawa Denki | Factory automation connector and work pallet |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2806456A4 (en) * | 2012-03-29 | 2015-03-18 | Asahi Kasei Microdevices Corp | LIGHT RECEIVING DEVICE |
US9046410B2 (en) | 2012-03-29 | 2015-06-02 | Asahi Kasei Microdevices Corporation | Light receiving device |
Also Published As
Publication number | Publication date |
---|---|
ES2171097B1 (es) | 2003-11-01 |
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