EP4792107A1 - Optomechanisches druckmesssystem sowie verfahren zur bestimmung eines umgebungsdrucks mit solch einem optomechanischen druckmesssystem - Google Patents

Optomechanisches druckmesssystem sowie verfahren zur bestimmung eines umgebungsdrucks mit solch einem optomechanischen druckmesssystem

Info

Publication number
EP4792107A1
EP4792107A1 EP24794525.6A EP24794525A EP4792107A1 EP 4792107 A1 EP4792107 A1 EP 4792107A1 EP 24794525 A EP24794525 A EP 24794525A EP 4792107 A1 EP4792107 A1 EP 4792107A1
Authority
EP
European Patent Office
Prior art keywords
light beam
optomechanical
pressure
membrane element
measurement system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP24794525.6A
Other languages
English (en)
French (fr)
Inventor
Arthur Louis HENDRIKS
Andrea Fiore
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of EP4792107A1 publication Critical patent/EP4792107A1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • G01L7/086—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type with optical transmitting or indicating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0016—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a diaphragm
    • G01L9/0017—Optical excitation or measuring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G01L9/002—Optical excitation or measuring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/08—Testing mechanical properties
    • G01M11/083—Testing mechanical properties by using an optical fiber in contact with the device under test [DUT]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
EP24794525.6A 2023-10-13 2024-10-14 Optomechanisches druckmesssystem sowie verfahren zur bestimmung eines umgebungsdrucks mit solch einem optomechanischen druckmesssystem Pending EP4792107A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL2036028A NL2036028B1 (en) 2023-10-13 2023-10-13 An optomechanical pressure-measurement system as well as a method for determining an ambient pressure level using such optomechanical pressure-measurement system.
PCT/NL2024/050566 WO2025080140A1 (en) 2023-10-13 2024-10-14 An optomechanical pressure-measurement system as well as a method for determining an ambient pressure level using such optomechanical pressure-measurement system

Publications (1)

Publication Number Publication Date
EP4792107A1 true EP4792107A1 (de) 2026-08-19

Family

ID=89767637

Family Applications (1)

Application Number Title Priority Date Filing Date
EP24794525.6A Pending EP4792107A1 (de) 2023-10-13 2024-10-14 Optomechanisches druckmesssystem sowie verfahren zur bestimmung eines umgebungsdrucks mit solch einem optomechanischen druckmesssystem

Country Status (4)

Country Link
EP (1) EP4792107A1 (de)
CN (1) CN122029413A (de)
NL (1) NL2036028B1 (de)
WO (1) WO2025080140A1 (de)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8839683B2 (en) * 2009-05-01 2014-09-23 The University Of Western Ontario Photonic crystal pressure sensor
US20140043614A1 (en) * 2012-06-28 2014-02-13 Technion Research And Development Foundation Ltd. On-fiber optomechanical cavity based sensor
FR3088119B1 (fr) * 2018-11-06 2020-11-06 Commissariat Energie Atomique Dispositif de mesure base sur une mesure optique dans une cavite opto-mecanique.

Also Published As

Publication number Publication date
CN122029413A (zh) 2026-05-12
WO2025080140A1 (en) 2025-04-17
NL2036028B1 (en) 2025-04-30

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