EP4433763A1 - Kryogene kühlvorrichtung - Google Patents
Kryogene kühlvorrichtungInfo
- Publication number
- EP4433763A1 EP4433763A1 EP22808814.2A EP22808814A EP4433763A1 EP 4433763 A1 EP4433763 A1 EP 4433763A1 EP 22808814 A EP22808814 A EP 22808814A EP 4433763 A1 EP4433763 A1 EP 4433763A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- flange
- cover
- cryogenic
- enclosure
- cryogenic cooler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/10—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point with several cooling stages
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
- F25B9/145—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
- F25D19/006—Thermal coupling structure or interface
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1414—Pulse-tube cycles characterised by pulse tube details
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—Component parts or details not otherwise provided for in this subclass
- F25B2400/21—Modules for refrigeration systems
Definitions
- the invention relates to a cryogenic refrigeration device.
- the invention relates more particularly to a cryogenic refrigeration device comprising an enclosure defining a sealed volume closed by a lid, the device comprising at least one cryogenic cooler mounted through the lid and having a first end located outside the enclosure and a second end located in the enclosure, the cryogenic cooler being configured to produce cold at its second end, the device comprising a set of heat-conducting plates arranged in the enclosure forming thermal stages cooled by the cryogenic cooler, the device comprising a set of passages formed through the cover and trays for the sealed passage of cable(s) and/or apparatus(es) in the enclosure.
- the invention relates to a refrigeration device making it possible to cool elements to a cryogenic temperature below 100K and in particular below 50K or below 4K.
- the invention relates to refrigeration devices which make it possible to cool to very low temperatures, of the order of one millikelvin. These very low temperatures are conventionally obtained via a dilution refrigerator.
- a dilution refrigerator uses a mixture of helium 3 and helium 4 in a working circuit comprising a boiler, a mixing chamber and a device for circulating the helium flow. Cooling is obtained at the level of the mixing chamber from the enthalpy of mixing when helium-3 is diluted in helium 4.
- a refrigeration device has a working loop circuit containing a cycle fluid comprising a mixture of isotope helium 3 (3He) and isotope helium 4 (4He).
- the working circuit comprises, arranged in series and fluidically connected via a first set of pipe(s), a mixing chamber, a boiler and a fluid transfer member.
- the first set of pipe(s) is configured to transfer cycle fluid from an outlet of the mixing chamber to an inlet of the boiler and from an outlet of the boiler to an inlet of the transfer member.
- the working circuit includes a second set of pipe(s) connecting an outlet of the transfer unit to an inlet of the mixing chamber.
- the working circuit comprises at least a first heat exchange portion between at least a part of the first set of conduit(s) and the second set of conduit(s), this first heat exchange portion being located between the boiler and mixing chamber.
- a cooling member is generally provided in heat exchange with the working circuit and configured to transfer cold temperatures to the cycle fluid.
- Such a dilution refrigerator typically comprises several stages of cooling, each stage being configured to obtain a respective temperature during the operation of the dilution refrigerator.
- the components to be cooled can be thermally coupled to these stages to meet the specifics of the application.
- dilution refrigerators are conventionally arranged in a cryogenic cooling device comprising an enclosure allowing access to the cold parts (cooling stages) via dedicated passages.
- An additional mechanical cryocooler is generally provided to cool the enclosure and provide cold temperatures to the dilution cooler.
- An object of the present invention is to overcome all or part of the drawbacks of the prior art noted above.
- the device according to the invention is essentially characterized in that at least part of the cover is composed of a flange forming a support for the cryogenic cooler, said flange carrying the cryogenic cooler being fixed in a leaktight and removable manner with respect to the rest of the cover.
- the invention may also relate to any alternative device or method comprising any combination of the characteristics above or below within the scope of the claims.
- FIG. 1 represents a vertical sectional view, schematic and partial, illustrating an embodiment of a cryogenic refrigeration device according to the invention
- FIG. 1 represents a perspective, schematic and partial view, illustrating an example of a cryogenic cooler module that can be used in such a cryogenic refrigeration device
- FIG. 1 represents a perspective view, schematic and partially cut, illustrating an example of a detail of a cryogenic refrigeration device according to the invention
- FIG. 1 represents a top view, schematic and partial, illustrating an example of a lid of such a cryogenic refrigeration device in the disassembled configuration
- FIG. 1 represents a top view, schematic and partial, illustrating another example of a cover of such a cryogenic refrigeration device in mounted configuration
- FIG. 1 represents a vertical sectional view, schematic and partial, illustrating another example of a cover of such a cryogenic refrigeration device in mounted configuration
- FIG. 1 represents a perspective view, schematic and partial, illustrating another example of a lid of such a cryogenic refrigeration device in the disassembled configuration.
- the cryogenic refrigeration device 1 illustrated in comprises an enclosure 2 delimiting a sealed volume closed by a cover 3, 13 above.
- This type of device 1 is sometimes called a “cryostat”.
- the enclosure 2 is for example cylindrical and can be made of stainless steel or aluminum for example. In operation, the interior volume of enclosure 2 can be placed under vacuum for thermal insulation purposes in particular.
- the device 1 comprises, in the example of , two cryogenic coolers 4, 40 mounted through the cover 3, 13 and each having a first end located outside the enclosure 2 (at room temperature) and a second end located in the enclosure 2 (at cryogenic temperature Operating).
- Each cryogenic cooler 4, 40 is configured to produce or supply cold power at its second end.
- the device 1 comprises a set of plates 5, 6, 7, 8, 9 thermal conductors distributed vertically in the enclosure 2 and forming thermal stages cooled by at least cryogenic coolers 4, 40 (for example from top to bottom the trays are cooled to decreasing cryogenic temperatures).
- the plates 5, 6, 7, 8, 9 are made of a thermally conductive material, for example copper or any other alloy or any suitable material.
- the plates 5, 6, 7, 8, 9 can be spaced from each other by rods with low thermal conductivity (not shown for the sake of simplification).
- At least one of the plates 5, 6, 7, 8, 9 can be the support for various devices or samples to be cooled at low temperature, for example quantum chips, and/or superconducting circuits or sensors.
- Each plate 5, 6, 7, 8, 9 can be connected to a heat shield 23 which encompasses all or part of the following lower plates. That is to say, the screens 23 form volumes that are contained within each other ("nested" volumes). All or part of the screens 23 can be cooled by a cryogenic cooler 4, 40 by thermal coupling.
- the device 1 comprises a set of passages 10, 11 formed through the cover 3 and the plates 5, 6, 7, 8, 9 for the sealed passage of cable(s) and/or apparatus(es) (probe( s) or other) in the enclosure 2 and for example for access to the plates 5, 6, 7, 8, 9.
- the orifices 10, 11 can be provided in the device 1 to allow a "probe "experimental to pass inside enclosure 2 to provide a sample to be cooled while maintaining a vacuum inside enclosure 2.
- the cryogenic cooler(s) 4, 40 are provided to provide cold power in the enclosure 2 in order to cool the plates (and heat shields if applicable) to determined temperatures.
- the device 1 comprises in particular at least one cryogenic cooler 4 of the "mechanical" type, for example a cryogenic cooler such as a pulsed gas, Gifford McMahon, or Stirling type cooler.
- the device 1 can comprise in particular at least one cryogenic cooler 40 of the dilution type.
- At least a part of the cover 3, 13 is composed of a flange 13 forming a support for a cryogenic cooler 4, 40, said flange 13 carrying the cryogenic cooler 4, 40 being fixed in a sealed and removable manner by relative to the rest of the cover 3.
- cryogenic coolers 4, 40 are mounted on one or more flanges 13 which are removable from the rest of the cover 3.
- cryogenic cooler(s) 4, 40 removable and relatively independent from the rest of the device.
- the coolers 4, 40 can be mounted, tested separately from the rest of the device and can be standard and mounted on different types of devices 1 (different geometries of enclosures 2, covers 3, trays, etc.).
- the flange 13 can be made up of a molded and/or machined plate, for example of a material identical to that making up the rest of the cover 3.
- the flange 13 can in particular form a shutter for an open part of the rest 3 of the cover.
- cryogenic cooler(s) 4, 40 can be characterized, dimensioned, manufactured and tested independently of the rest of the configuration of the device.
- these coolers 4, 40 on their support flange 13 can be identical for different ranges of devices.
- a number of one or more cryogenic refrigerators 4, 40 can be mounted on the cover 13 of a device 1 depending on the needs and specifications. Dismantling, maintenance, repair and replacement are also facilitated.
- cryogenic cooler(s) on a flange 13 can be placed in the lid 3 in a centered or off-centered manner depending on the geometry of the lid 3 and/or the architecture of the plates 5, 6, 7, 8, 9 or enclosures 23.
- the cryogenic cooler 4, 40 can be of the type comprising a working fluid circuit subjected to a working cycle and all or part of the components of the working circuit can also be mounted integral with the flange 13 .
- the flange 13 can carry at least one sealed sheath 15, 16 including cold parts, a dilution refrigeration system 16, a set 17, 21 of pipes for the working fluid, a set of capacity(s) 18 (buffer ) configured (s) to store working fluid, a pumping member 19 of the working fluid, a member 20 for injecting working fluid, a set of connector (s) fluid (s).
- a pumping device in particular a vacuum pump
- a set of wiring(s) for example for a thermometry and/or heating system.
- the flange 13 carries a set of lower components of the cryogenic cooler 4, 40 which protrude from the underside of the flange 13 and which are housed in the enclosure 2 when the flange 13 is mounted on the cover 3 through an orifice 30 for passage of the cover 3.
- the flange 13 also carries at least a part of upper components which protrude from the upper surface of the flange 13 (and located outside the enclosure 2 in the mounted position).
- the lower components are dimensioned and/or arranged to pass through the orifice 30 to allow the assembly or disassembly of the flange 13 and the components of the cryogenic cooler associated with respect to the enclosure 2 through the cover 3.
- the lower components of the cryogenic cooler 4, 40 extend for example in a longitudinal direction which is vertical when the flange 13 is mounted on the cover 3.
- these lower components of the cryogenic cooler 4, 40 have transverse dimensions by relative to the longitudinal direction which are smaller than the dimensions of the orifice 30 (to allow passage vertically).
- These lower components of the cryogenic cooler 4, 40 are for example aligned in the longitudinal direction up to a terminal end, forming a column of components. As illustrated, the transverse dimensions of the column are constant or decreasing from the flange 13 towards the terminal end. This allows easy assembly and disassembly through the hole 30 of the cover.
- cover 3 can be the support for a thermometry box 24 (measuring and/or heating).
- cover 3 (excluding the flange 13) can be the support for a pump 25 to ensure that the enclosure 2 is placed under vacuum. despite everything still be located on this lid 3.
- Each cryogenic refrigerator module 4, 40 can be mounted (or dismantled and removed) vertically relative to the rest of the cover 3.
- the lid 3 may comprise a cutout or recess delimiting an orifice 30 in the lid 3.
- the flange 13 In the fixed (mounted) position of the flange 13 on the rest of the lid 3, the flange 13 seals off said orifice 30.
- the cutout or recess in the cover 3 defines for example a complementary concave housing of at least a part of the flange 13 so that in the fixed position the flange 13 is fitted at least partially in said housing.
- the flange 13 can be fixed to the rest of the cover 3 by a set of fixing pins 14, for example screws.
- flange 13 is screwed from below cover 3.
- the device 1 preferably comprises at least one seal 22 interposed between the flange 13 and the rest of the cover 3 (cf. ) and/or at least one seal 22 interposed between the cryogenic cooler 4, 40 and the flange 13 (cf. ).
- the seal(s) 22 are for example O-rings.
- the device 1 can comprise a single cryogenic cooler 4 (cf. , ) or several cryogenic coolers 4, 40 (cf. , ) in which each cryogenic cooler 4, 40 is mounted on a respective support flange 13 (a single cryogenic cooler 4, 40 is mounted on a support flange 13).
- each cryogenic cooler 4, 40 is mounted on a respective support flange 13 (a single cryogenic cooler 4, 40 is mounted on a support flange 13).
- flange 13 being the support for several cryogenic coolers 4, 40 .
- the device comprises three cryogenic coolers 4, 40 mounted in the central part of the cover 3 via their respective flanges 13.
- the passages 10 formed through the lid 3 can be located on the periphery of the cryogenic refrigerators 4, 40.
- a first cryogenic cooler 4 can be of the mechanical type (pulsed gas tube for example) and configured to cool a first plate 5 above a first cold temperature, for example around 50K and a second plate 6 at a second cold temperature, by example around 5K.
- the trays 7, 8, 9 are for example cooled to lower and lower temperatures, for example of the order of 800 mK, 50 mK and 3 mK respectively by the dilution refrigerator 16 of the other cryogenic refrigerator 40.
- cryogenic coolers 4, 40 and trays can be envisaged, for example four mechanical cryogenic refrigerators 4 and two dilution refrigerators.
- At least one of the cryogenic coolers 4, 40 can be of the type using a cold source of liquefied cycle fluid such as helium, hydrogen or nitrogen. That is to say that the cryogenic cooler 4, 40 is connected to a cold source located outside the enclosure 2, this cold source supplying a flow of liquefied fluid, cooled outside the enclosure , this flow circulates in the cryogenic cooler 4, 40 and is heat exchanged with at least part of the plates 5, 6, 7, 8, 9 in the enclosure 2.
- a cold source of liquefied cycle fluid such as helium, hydrogen or nitrogen.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR2112152A FR3129199B1 (fr) | 2021-11-17 | 2021-11-17 | Dispositif de réfrigération cryogénique |
| PCT/EP2022/079867 WO2023088647A1 (fr) | 2021-11-17 | 2022-10-26 | Dispositif de réfrigération cryogénique |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP4433763A1 true EP4433763A1 (de) | 2024-09-25 |
Family
ID=80122472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP22808814.2A Pending EP4433763A1 (de) | 2021-11-17 | 2022-10-26 | Kryogene kühlvorrichtung |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20250003644A1 (de) |
| EP (1) | EP4433763A1 (de) |
| CN (1) | CN118202209A (de) |
| AU (1) | AU2022392367A1 (de) |
| FR (1) | FR3129199B1 (de) |
| WO (1) | WO2023088647A1 (de) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4223540A (en) * | 1979-03-02 | 1980-09-23 | Air Products And Chemicals, Inc. | Dewar and removable refrigerator for maintaining liquefied gas inventory |
| JPS62185383A (ja) * | 1986-02-12 | 1987-08-13 | Toshiba Corp | 極低温容器 |
| JP6509473B1 (ja) * | 2017-10-12 | 2019-05-08 | 住友重機械工業株式会社 | 極低温冷凍機の装着構造および装着方法 |
| GB2584135A (en) * | 2019-05-23 | 2020-11-25 | Oxford Instruments Nanotechnology Tools Ltd | Cryogenic cooling system |
-
2021
- 2021-11-17 FR FR2112152A patent/FR3129199B1/fr active Active
-
2022
- 2022-10-26 CN CN202280073961.8A patent/CN118202209A/zh active Pending
- 2022-10-26 WO PCT/EP2022/079867 patent/WO2023088647A1/fr not_active Ceased
- 2022-10-26 US US18/709,726 patent/US20250003644A1/en active Pending
- 2022-10-26 AU AU2022392367A patent/AU2022392367A1/en active Pending
- 2022-10-26 EP EP22808814.2A patent/EP4433763A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20250003644A1 (en) | 2025-01-02 |
| CN118202209A (zh) | 2024-06-14 |
| FR3129199B1 (fr) | 2023-11-24 |
| AU2022392367A1 (en) | 2024-06-20 |
| WO2023088647A1 (fr) | 2023-05-25 |
| FR3129199A1 (fr) | 2023-05-19 |
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Legal Events
| Date | Code | Title | Description |
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| STAA | Information on the status of an ep patent application or granted ep patent |
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| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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| STAA | Information on the status of an ep patent application or granted ep patent |
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| 17P | Request for examination filed |
Effective date: 20240617 |
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