Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
  • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
  • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
  • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
  • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
  • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
  • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
  • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
  • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Definitions

• the present invention relates to a pressure measuring cell with integrated evaluation electronics and a 4-20 mA interface for the power supply.
• Pressure measuring cells are known from the prior art, which, for example, detect a change in pressure due to deformation of a membrane and a change in capacitance resulting therefrom. Such pressure measuring cells are called capacitive pressure measuring cells.
• capacitive pressure measuring cells There are also resistive or piezoresistive pressure measuring cells, in which the deformation of a membrane is detected using strain gauges, for example, and the pressure is inferred from a change in resistance of the strain gauges, as well as piezoelectric pressure measuring cells, which use the piezoelectric effect to determine pressure.
• the differentiation of pressure measuring cells according to the materials oriented towards the process i.e. the materials that come into contact with the process environment and the process media, usually differentiates between metallic and ceramic pressure measuring cells, with one having a metallic membrane and the other a ceramic membrane.
• a base body of the pressure measuring cell is often made of the same material as the membrane.
• Whether absolute or relative pressures can be measured usually depends on whether the back of the membrane is supplied with a second pressure, e.g. an external pressure, or whether the back of the membrane is evacuated.
• the evaluation electronics for the sensor signal of the sensor of the pressure measuring cell are usually placed outside the housing of the pressure measuring cell and are contacted via through-contacts led to the outside.
• the signal path from the sensor to the evaluation electronics is relatively long and the signal-to-noise distance is not optimal. If the signal-to-noise ratio is too high, the sensor signal will be distorted and thus less precise.
• the underlying object of the invention is therefore to provide a pressure measuring cell which has an optimized measuring structure and improves the signal quality arriving at the evaluation unit compared to the prior art.
• a pressure measuring cell according to the invention with a pressure sensor and evaluation electronics integrated into the pressure measuring cell is characterized in that the pressure measuring cell has only a 4-20 mA interface for the power supply.
• Evaluation electronics integrated into the pressure measurement cell means that the evaluation electronics are part of the pressure measurement cell and can be positioned, for example, within a housing of the pressure measurement cell. It is also conceivable that the evaluation electronics is positioned in an interior of the housing, in which the pressure sensor is also located. However, the evaluation electronics can also be positioned on the outside of the housing, since the signal paths can also be kept very short there. Another possibility is to position the evaluation electronics between two housing parts of the pressure measuring cell, such as between a base body and a closure element, or between two parts of a separable closure element. It is characteristic of an integrated evaluation electronics that it is associated with the pressure measuring cell and is not, for example, accommodated in another housing which is arranged further away from the sensor. By integrating the evaluation electronics in the pressure measuring cell, the signal processing takes place within the pressure measuring cell and no longer, as is usually the case, in external electronic circuits.
• connection of the evaluation electronics to the pressure measuring cell or its housing is preferably realized by an adhesive connection.
• connection possibilities such as glass soldering, soldering, welding or form-fitting connections, also come into consideration.
• the evaluation electronics are positioned in or on the housing of the pressure measuring cell in any case close to the sensor, which makes the signal paths between the sensor chip and the evaluation electronics very short.
• the signal paths are implemented with bonding wires, for example, which means that the signal-to-noise ratio is improved and the signal quality is also improved as a result.
• the shorter signal paths also result in a faster and more direct reaction time. Contacting to the outside can be done, for example, with the help of vias that are routed through the housing of the pressure measuring cell.
• the evaluation electronics are electrically connected to the pressure sensor by bonding wires if the evaluation electronics are positioned directly in the measuring room.
• the pressure measuring cell outputs the same signals as measured values, regardless of the measuring principle such as resistive or capacitive, since the evaluation electronics have already processed the output signal of the pressure sensor and can output a measured value for the pressure.
• the pressure measuring cell is supplied with energy via the 4 mA to 20 mA current signal via the two-wire line, so that no additional supply line is required in addition to the two-wire line.
• the signal transmission of the measured value of the pressure measuring cell for example to a higher-level unit, also takes place according to the well-known 4 mA to 20 mA standard, in which a 4 mA to 20 mA current loop or a two-wire line is formed between the pressure measuring cell and the higher-level unit.
• the units connected in this way transmit further information to or receive from the higher-level unit in accordance with various other protocols, in particular digital protocols. Examples of this are the HART protocol or the Profibus-PA protocol.
• the electronic evaluation system is an ASIC.
• An application-specific integrated circuit is referred to as an ASIC (application-specific integrated circuit). This can be designed as an independent module and applied to the displacement body, or integrated into the displacement body.
• the ASIC is an energy-saving processor which, thanks to its low power consumption, enables the pressure measuring cell to be operated with a 4-20 mA power supply. For this purpose, leakage currents are prevented and standby states of circuit parts such as the controller or the memory are activated as often as possible.
• the operating voltage of the ASIC is preferably limited to 2.1V, more preferably to 1.6V, more preferably to 1.2V. By limiting the operating voltage of the ASIC, energy can be saved and electrical losses minimized. To meet these specifications, a special 90nm semiconductor manufacturing process is used to manufacture the ASIC, allowing the resulting circuits to operate at lower voltages.
• the evaluation electronics are preferably set up to electrically isolate the pressure sensor from the electrical connections of the pressure measuring cell.
• the electrical connections of the pressure measuring cell mean the electrical connections that are routed to the outside of the pressure measuring cell.
• the evaluation electronics include a temperature sensor for detecting the temperature of the pressure measuring cell.
• An advantage of the positioning of the evaluation electronics in the pressure measuring cell results from the thermal connection to this. In this way, temperature fluctuations can be detected at the pressure sensor, which lead to an expansion of the materials and thus to a change in pressure inside the sensor.
• the evaluation electronics can use the measured temperature to carry out a temperature compensation and output a corrected measured value. In addition, the measured temperature can be used to draw conclusions about the process parameters and thus the process itself can be optimized.
• the evaluation electronics of the pressure measuring cell are set up in such a way that the pressure measuring cell can be calibrated by the evaluation electronics. Thanks to the integrated evaluation electronics, the pressure measuring cell or its pressure sensor can be checked and, if necessary, recalibrated by applying defined pressures and temperatures without the need for additional calibration devices.
• a further embodiment of the pressure measuring cell is characterized in that the evaluation electronics are SIL-2 certified.
• the SIL standard (safety integrity level) defined according to the safety standard
• EN 61508 four distinct levels to specify the requirement for the safety integrity of safety functions that are assigned to the E/E/PE safety-related system, with safety integrity level 4 representing the highest level of safety integrity and safety integrity level 1 representing the lowest.
• a further embodiment of the pressure measuring cell is characterized in that the evaluation electronics have a measuring frequency of at least 1 Hz with an accuracy of at least 19 bits.
• a low measuring frequency of 1 Hz and a low resolution of the measuring range can save energy during the measurement.
• the evaluation electronics preferably have a measurement frequency of at least 1 kHz with an accuracy of at least 12 bits.
• the evaluation electronics are therefore designed to save energy in order to enable measuring frequencies in the range of 1 kHz and accuracies of 12 bits without unnecessarily straining the power supply.
• a metallic pressure measuring cell has a base body and a metallic membrane arranged on the base body, with a membrane chamber being formed between the membrane and the base body, a pressure sensor arranged in a sensor chamber of the base body, with a pressure sensor arranged between the membrane chamber and the sensor chamber Connecting channel is formed and the chambers are filled with a pressure transmitter medium for transmitting a pressure acting on the membrane. Since the volume of the pressure transmitter medium should be kept as small as possible, it is characteristic of such a pressure measuring cell that a displacement body is seated in the sensor chamber. In such an embodiment of the pressure measuring cell, it is characterized in that the evaluation electronics are positioned on the displacement body.
• the evaluation electronics are arranged on the displacement body.
• the connection between the evaluation electronics and the displacement body is preferably designed as an adhesive connection.
• the adhesive connection is preferably matched to the usually different thermal expansion coefficients of the displacement body and the evaluation electronics. Ideally, the same The adhesive layer compensates for the resulting difference in length and can withstand the shearing forces that occur, so that a secure attachment is guaranteed.
• the evaluation electronics can be applied directly to the displacement body in the form of conductor tracks. A pressure measuring cell with a displacement body functionalized in this way takes up particularly little space.
• the evaluation electronics can thus be attached to the displacement body in the vicinity of the sensor chip. It is therefore placed close to the sensor, which makes the signal paths between the sensor chip and the evaluation electronics very short.
• the signal paths are implemented with bonding wires, for example, which means that the signal-to-noise ratio is improved and the signal quality is also improved as a result.
• the shorter signal paths also result in a faster and more direct reaction time.
• Contacting to the outside can be done, for example, with the help of contacts guided through the displacement body and the closure element, which in turn are electrically connected to the evaluation electronics by bonding wires on the upper side of the displacement body.
• the pressure measuring cell can be set up to work according to a capacitive or a resistive measuring principle.
• a capacitive pressure measuring cell has two electrodes that together form an electrical capacitor.
• One electrode is arranged on a membrane.
• a change in pressure acting on the membrane changes a distance between the electrodes, so that the capacitance of the capacitor changes.
• the capacitance of the capacitor can be recorded by the evaluation electronics and a pressure can be derived from this.
• a resistive pressure cell for example, uses strain gauges on a membrane that change resistance when pressure applied to the membrane deforms the membrane. Piezoresistive pressure sensors can also be used, which also change their resistance accordingly due to the deformation caused by pressure.
• the pressure measuring cell is set up for an operating temperature of up to 150°C.
• the pressure measuring cell is preferably set up for an operating temperature of up to 200°.
• the pressure measuring cell with its evaluation electronics is designed in such a way that it can still work correctly at operating temperatures of 150 °C or 200 °C, since, for example, the temperature, which has a direct effect on the evaluation electronics, can be compensated so that a corrected, correct measured value can be output.
• the pressure measuring cell is a pressure measuring cell for measuring an absolute pressure. That is, the pressure measurement is made against a vacuum as a reference level.
• the pressure measuring cell can be a pressure measuring cell that is designed to measure a relative pressure.
• the pressure measuring cell can have a closure element with a through-opening for pressure equalization, so that the rear side of the membrane can be subjected to a specific pressure.
• a method according to the invention for producing a pressure measuring cell with evaluation electronics integrated into the pressure measuring cell is characterized in that the pressure measuring cell is supplied with energy via a 4-20 mA interface.
• FIG. 2 shows a metal pressure measuring cell with integrated evaluation electronics in a closure element of the pressure measuring cell
• FIG. 3 shows a metallic pressure measuring cell with integrated evaluation electronics on an outside of the pressure measuring cell
• FIG. 4 shows a metal pressure measuring cell with integrated evaluation electronics in a recess in a base body of the pressure measuring cell.
• FIG. 1 shows an exemplary embodiment of a pressure measuring cell 1 according to the present application in a cross section with integrated evaluation electronics 62 and a two-wire power supply.
• the pressure measuring cell 1 shown is a metal pressure measuring cell 1 for measuring a relative pressure, since the structure has an opening 72 for pressure equalization.
• the pressure measuring cell 1 essentially has a metal base body 3 , a metal membrane 5 arranged on the front side of the base body 3 in the axial direction A, and a pressure sensor 7 arranged in a sensor chamber 71 formed in the base body 3 .
• the sensor chamber 71 is in fluid communication via a connecting channel 9 with a membrane chamber 51 formed between the base body 3 and the membrane 5 .
• the sensor chamber 71 is closed in the rear direction by a closure element 80, the closure element 80 having vias 79 for the 4-20 mA power supply.
• the evaluation electronics 62 are contacted to the outside through the vias 79 .
• the pressure sensor 7 is arranged in the sensor chamber 71 .
• the pressure sensor 7 has a sensor chip 73 as a pressure-sensitive element, which is arranged on the closure element 80 via a sensor carrier 75 .
• the sensor chip 73 is connected to the evaluation electronics 62 by electrical connections 63 implemented as bonding wires.
• a rear part of a membrane of the sensor chip 73 can be subjected to either an ambient pressure or a reference pressure via a line for pressure equalization 72, which is also routed through the closure element 80 to the rear of the sensor chip 73.
• the reference pressure can also be a vacuum, so that an absolute pressure measurement can be carried out.
• the closure element 80 also has a filling opening 11 with a pipe section arranged thereon, via which the sensor chamber 71, the connecting channel 9 and the diaphragm chamber 51 can be filled with a pressure transmitter medium 13, for example a synthetic oil.
• a pressure transmitter medium 13 for example a synthetic oil.
• the membrane 5 is connected to the base body 3 via a peripheral connection 57, in this case a weld.
• the membrane 5 has a wavy surface contour which is designed to correspond to a surface contour of a wall of the base body 3 facing the membrane 5 .
• This wavy surface contour 55 ensures that the membrane 5 is flexible in the axial direction A, whereas in the radial direction R the greatest possible rigidity is achieved.
• the surface contour 55 of the membrane 5 is transferred from the base body 3 to the membrane 5 during the manufacture of the pressure measuring cell 1 .
• the membrane 5 is subjected to excess pressure from the front after it has been attached to the base body 3 , so that it is molded into the membrane bed formed by the base body 3 .
• the displacement body 61 is arranged within the sensor chamber 71 and occupies a substantial part of the sensor chamber 71, which otherwise Pressure medium medium 13 would be filled. In this way, only a small volume remains, mainly flat areas, which are filled with pressure medium 13 .
• the displacement body 61 is essentially rotationally symmetrical, but can deviate from this rotational symmetry, for example due to cutouts for filling the sensor chamber 71 through the filling opening 11 .
• the evaluation electronics 62 are arranged on the displacement body 61 . This can be attached to the surface by means of an adhesive bond.
• the evaluation electronics 62 are positioned in the direct vicinity of the sensor chip 73 and connected to it by bonding wires 63 .
• the bonding wires 63 are very short in comparison to a connection led to the outside, such as the vias 79, and are therefore particularly advantageous for the quality of the signal of the sensor chip, since the signal-to-noise ratio is lower.
• the evaluation electronics 62 here include a temperature chip that detects the actual temperature of the pressure transmitter medium 13 and thus makes it possible to correct the temperature of the pressure measurement signal that is output.
• the pressure measuring cell 1 and the evaluation electronics 62 are supplied with energy via the 4 mA to 20 mA current signal via a two-wire line 81, so that no additional supply line is required in addition to the two-wire line 81. At the same time, the signal transmission of the measured value of the pressure measuring cell 1 to a higher-level unit is realized via this two-wire line 81 .
• the pressure measuring cell 1 and the higher-level unit are connected by the two-wire line 81 .
• FIG. 2 shows a metallic pressure measuring cell 1 similar to that in FIG.
• the evaluation electronics 62 are electrically connected with the aid of vias 79 .
• the sensor chip 73 is contacted by bonding wires 63 which are connected to the vias 79 on the upper side of the displacement body 61 .
• the evaluation electronics 62 are contacted to the outside by the two-wire power supply.
• the evaluation electronics 62 are connected via the two-wire line 81 as in FIG. Figure 3 shows a metal pressure measuring cell 1 similar to Figure 1, but with integrated evaluation electronics 62 housed on an outside of the pressure measuring cell 1.
• the evaluation electronics 62 is placed on the closure element 80 from the outside and is electrically connected there to the sensor chip with the aid of vias 79 and bonding wires 63 73 connected.
• the evaluation electronics 62 itself is supplied with energy by a two-wire line 81 .
• Fig. 4 shows a metal pressure measuring cell 1 similar to that in Figure 1, but with integrated evaluation electronics 62 in a recess in a base body 3 of the pressure measurement cell 1.
• the recess is accommodated in the base body 3 of the pressure sensor 1, so that the evaluation electronics 62 are fixed therein by means of an adhesive connection can be.
• the two-wire power supply is connected to the evaluation electronics 62 with the aid of the vias 79 or the two-wire line 81 .
• the evaluation electronics 62 are in turn connected to the sensor chip 73 with bonding wires 63 .

Landscapes

• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Measuring Fluid Pressure (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=84359291

Family Applications (1)

Country Status (6)

Citations (1)

Family Cites Families (3)

• 2021
  • 2021-10-29 DE DE102021128370.1A patent/DE102021128370A1/de active Pending
• 2022
  • 2022-10-17 CN CN202280067906.8A patent/CN118076867A/zh active Pending
  • 2022-10-17 CA CA3233831A patent/CA3233831A1/en active Pending
  • 2022-10-17 JP JP2024526793A patent/JP2024537529A/ja active Pending
  • 2022-10-17 WO PCT/EP2022/078839 patent/WO2023072660A1/de not_active Ceased
  • 2022-10-17 EP EP22803232.2A patent/EP4423470A1/de active Pending

Patent Citations (1)

Non-Patent Citations (3)

Also Published As

Similar Documents

Legal Events