EP4301904A1

EP4301904A1 - Device and method for the user-friendly and reliable galvanic growth of a plurality of nanowires

Info

Publication number: EP4301904A1
Application number: EP22707698.1A
Authority: EP
Inventors: Olav Birlem; Florian DASSINGER; Sebastian Quednau; Farough ROUSTAIE
Original assignee: Nanowired GmbH
Current assignee: Nanowired GmbH
Priority date: 2021-03-03
Filing date: 2022-02-22
Publication date: 2024-01-10
Also published as: WO2022184504A1; US20240191383A1; CN116964251A; JP2024508156A; DE102021105128A1; TW202248114A; KR20230152109A

Abstract

The invention relates to a device (1) for galvanically growing a plurality of nanowires (2) on a substrate (3), comprising a substrate holder (4) and a housing (34), in which a chamber (18), a control unit (8) and a storage container (35) for an electrolyte are arranged, wherein the device (1) is configured to allow the plurality of nanowires (2) to grow from the electrolyte on the substrate (3) when the substrate holder (4) with the substrate (3) is introduced in the chamber (18).

Description

DEVICE AND METHOD FOR USER-FRIENDLY AND RELIABLE ELECTROPLATICAL GROWTH OF A VARIETY OF NANOWIRE

The invention relates to a device and a method for the galvanic growth of a large number of nanowires on a substrate.

Devices and methods are known with which nanowires can be produced. For example, nanowires can be obtained via galvanic processes or using methods that are known from thin-film technology. What many known methods have in common is that they require complex machines and therefore usually only (can) be used in laboratories and clean rooms. In particular, most of the known methods are not suitable for industry.

Many known devices and methods also have the disadvantage that the nanowires obtained vary greatly in their properties and in particular in terms of their quality. The nanowires from different growth processes regularly differ, sometimes significantly, even if the same or the same machines, starting materials and/or recipes are used. The quality of nanowires often depends in particular on the ability of the user of a corresponding device or the user of a corresponding method, on environmental influences and/or simply on chance. All of this is made more difficult by the fact that nanowires are structures that sometimes cannot be visualized even with a light microscope. Extensive investigations may therefore be necessary in order to be able to determine the properties described (and in particular the fluctuations in them) at all.

Proceeding from this, it is the object of the invention to present a device and a method with which a large number of nanowires can be reliably produced in a particularly user-friendly manner.

This object is achieved with the device and the method according to the independent claims. Further advantageous developments are specified in the dependent claims. The features presented in the claims and in the description can be combined with one another in any technologically meaningful way. According to the invention, a device for the galvanic growth of a large number of nanowires on a substrate is presented. The device comprises a substrate holder and a housing in which a chamber, a control unit and a reservoir for an electrolyte are arranged, the device being set up to grow the plurality of nanowires from the electrolyte onto the substrate when the substrate holder with the Substrate is inserted into the chamber.

The device described is preferably set up to grow nanowires in an automated manner. The device can be set up in particular for industrial use.

Nanowires can be produced with the device described. A nanowire is understood here to mean any material body that has a wire-like shape and a size in the range from a few nanometers to a few micrometers. A nanowire can, for example, have a circular, oval or polygonal base. In particular, a nanowire have a hexagonal base.

The nanowires preferably have a length in the range from 100 nm [nanometers] to 100 mΐti [micrometers], in particular in the range from 500 nm to 60 mΐti. The length of the nanowires is preferably distributed with a standard deviation ranging from 5 to 20%. Furthermore, the nanowires preferably have a diameter in the range from 10 nm to 10 mh%, in particular in the range from 30 nm to 4 mΐti. The term diameter refers to a circular base area, with a base area deviating from this, a comparable definition of a diameter is to be used. It is particularly preferred that all the nanowires used have the same length and the same diameter.

The device described can be used for a wide variety of nanowire materials. Electrically conductive materials, in particular metals such as copper, silver, gold, nickel, tin and platinum, are preferred as the material for the nanowires. Copper is particularly preferred here. However, non-conductive materials such as metal oxides are also preferred. All nanowires are preferably formed from the same material.

The nanowires can be grown on the surface of the substrate with the device. The surface of the substrate is preferably designed to be electrically conductive. Unless the surface of the substrate is part of an otherwise non-electrical is conductive substrate, the electrical conductivity z. B. can be achieved by metallization. So e.g. B. a non-electrically conductive substrate can be coated with a thin layer of metal. In particular, an electrode layer can be produced by the metallization. Depending on the material of the surface of the substrate and/or the electrode layer, it may be useful to provide an adhesive layer between the surface of the substrate and the electrode layer, which provides adhesion between the surface of the substrate and the electrode layer.

Due to the electrical conductivity of the surface of the substrate, it can be used as an electrode for the galvanic growth of the nanowires. In particular, the substrate can be a silicon substrate. In particular, the substrate can be a body that is provided with electrically conductive structures. In particular, this can be a silicon chip or a so-called printed circuit board (PCB). However, the growth of the nanowires is also possible on a variety of other surfaces, such as glass, ceramics and polymers. The substrate can be rigid or flexible. The device is preferably suitable for substrates which have an extension of up to 80 cm in each direction parallel to the surface to be overgrown and/or which have an extension of 1 mΐti to 100 mm transversely to the surface to be overgrown. For example, 12-inch wafers can be used as the substrate. Alternatively, the substrate can, for example, have an extent of 30×40 cm in a plane parallel to the surface to be grown over.

With the device described, the nanowires can be grown galvanically in pores of a film on the surface of the substrate. An electrolyte is used for this. For example, 600 ml of the electrolyte can be sufficient to completely cover a 12-inch wafer with nanowires. The electrolyte is provided with the reservoir. The reservoir is preferably filled with the electrolyte. The device also preferably has at least one connection via which the reservoir for the electrolyte can be connected in such a way that the electrolyte can be used for the growth of the nanowires. The connection is preferably designed in such a way that the reservoir is opened by the connection when it is connected and is closed by the connection when it is disconnected from the connection. The reservoir is therefore opened or closed automatically. Thus, the container can have an opening which is closed with a valve which is opened when connecting the connection through the connection and which closes again when the reservoir is disconnected from the port. The reservoir is therefore closed unless the reservoir is connected to the port. In this way, the reservoir can be changed without a user being able to come into contact with the electrolyte. In that regard, the device described is particularly safe. In this embodiment, the reservoir can also be referred to as a cartridge.

The nanowires can be provided with a particularly uniform quality if the foil lies tightly against the surface of the substrate during growth and the electrolyte is evenly distributed over the foil. For this purpose, an elastic element that is permeable to the electrolyte can lie against the foil. An electrolyte can be supplied to the foil by the elastic element and the foil can be held on the surface of the substrate. If, after a first growth step, the nanowires have grown to such an extent that the foil is held on the surface of the substrate by the nanowires, the elastic element can be removed. In a second growth step, no elastic element is used, so that the electrolyte can be evenly distributed over the surface of the substrate.

The foil is preferably formed with a plastic material, in particular with a polymer material. The foil has a multitude of continuous pores in which the nanowires can be grown. The fact that the pores of the film are continuous is preferably realized in such a way that the pores form continuous channels from a top side of the film to a bottom side of the film. In particular, it is preferred that the pores are cylindrical. However, it is also possible for the pores to be in the form of channels with a curved course.

A pore can have a circular, oval or polygonal base area, for example. In particular, a pore can have a hexagonal base area. The pores are preferably uniform (ie the pores preferably do not differ in terms of size, shape, arrangement and/or distance from adjacent pores). When the nanowires are grown, the pores are preferably (particularly completely) filled with the electrodeposited material. This gives the nanowires the size, shape and arrangement of the pores. The properties of the nanowires to be grown can be determined or influenced by the choice of the foil or the pores in it. The film can therefore also be referred to as a “template”, “template film” or “stencil”. The pores in the film can obtained by irradiating the film with high-energy heavy ions. The ions can have energies ranging from MeV to GeV.

After the nanowires have grown into the pores of the foil, the foil can be removed, for example with a plasma or with a solvent. The nanowires are then exposed.

The device has a housing in which all other elements of the device are preferably arranged. In that regard, the device can be regarded as a compact machine. The housing preferably has a floor area of at most 1 m ² [square meter]. This is possible because, in particular, the chamber, the control unit and the reservoir for the electrolyte are arranged together in the housing. The housing preferably has a rectangular base. The housing preferably has a height of 1 to 3 m [meters], in particular 1.5 to 2.5 m. The housing is preferably made of a metal, in particular stainless steel. The material of the housing preferably has a coating, in particular on an outside of the housing. For example, the housing can be made of coated stainless steel. The coating can protect the housing from chemicals.

The housing includes the chamber into which a substrate holder can be inserted. The chamber preferably has a receptacle for the substrate holder. The substrate holder is set up to hold the substrate to be covered with the nanowires. Once the substrate holder with the substrate is inserted into the chamber, the nanowires can be grown onto the substrate. This is done in such a way that the nanowires are galvanically grown from the electrolyte onto a surface of the substrate.

The substrate holder is preferably designed as a drawer. This means that the substrate holder can be pushed into the receptacle, for example via guide rails arranged laterally in the chamber. It is preferred that the drawer can be completely separated from the rest of the device. Alternatively, a maximum extension of the drawer may be limited such that the drawer cannot be moved beyond the maximum extension.

The device preferably has a drive for moving the substrate holder. For example, the substrate holder can be manually moved to an insertion position are automatically drawn into the receptacle from there with the drive. After the end of the growth of the nanowires, the substrate holder can be moved out of the receptacle in an automated manner, in particular into a removal position, which is preferably identical to the insertion position. The substrate holder can be removed manually from the removal position. Alternatively, the device can be set up to move the substrate holder into and out of the receptacle completely manually. It is also conceivable for a device with a drive for the substrate holder to be operated either with an automatically moved substrate holder or with a manually moved substrate holder.

The device preferably has a locking device for locking the substrate holder in the receptacle. The detent is preferably designed such that the detent has an active and a deactivated state. The lock can therefore be switched on and off. For this purpose, for example, an electromagnet can be provided, which holds the substrate holder in the receptacle when switched on. In this way, the substrate holder can be secured with the locking device during the growth of the nanowires in the receptacle. After the growth of the nanowires is complete, the lock can be deactivated and the substrate holder can be removed from the holder.

The chamber is preferably lockable. For example, the chamber can be accessible via an opening in a housing wall, so that the substrate holder can be inserted through the opening into the chamber and into the receptacle. The opening can be closed with a flap, for example. When closed, the chamber is preferably liquid and gas tight. In this way, a desired atmosphere for the growth of the nanowires can be created inside the chamber. In addition, chemicals can be prevented from escaping from the chamber. The chamber can preferably be locked. For example, the opening can be closed with a flap and the flap can be held in its position by a lock. This can prevent accidental opening of the chamber during a growth process. The chamber is preferably formed between a boundary of a material that is resistant to the chemicals used in the growth of the nanowires, such as steel or plastic. The chamber preferably has a respective supply for at least one chemical. For example, the electrolyte used to grow the nanowires can be provided. The electrolyte can be fed into a depression of the substrate holder, for example, via the corresponding supply, so that the electrolyte comes into contact with the substrate arranged in the depression. Furthermore, a supply for water can be provided, in particular for deionized water (DI water). This can be used to rinse the substrate after the nanowire growth is complete. It is thus possible to prevent residues of the electrolyte from escaping the device with the substrate. Furthermore, the chamber preferably has at least one outlet. For example, an outlet can be provided through which the electrolyte can be let out of the chamber once the growth of the nanowires is complete. An outlet for the water used for rinsing can also be provided. The electrolyte and water can be discharged from the chamber through the same outlet or through different outlets. Furthermore, the chamber preferably has a ventilation opening. Gases in the chamber can be let out of the chamber via this. In this way, a user can be protected from harmful gases escaping from the chamber when it is opened. The gases can be evacuated from the chamber via the ventilation opening and replaced with fresh air or an inert atmosphere, for example. The extracted gases can be cleaned, for example. Furthermore, an electrode that is set up for the growth of the nanowires is preferably arranged in the chamber. An electrical voltage can thus be applied between the electrode and the substrate surface to be grown in order to grow the nanowires. The electrode is preferably held on a stamp. The stamp can preferably be moved automatically. Thus, the electrode can be brought into contact with the electrolyte via the stamp to grow the nanowires. An elastic element placed on the film, like a sponge, can be pressed onto the film with a stamp. This allows the film to be held in place. The stamp can also have an electrolyte distributor. In this way, the electrolyte can be fed via the stamp to the surface of the substrate to be covered with growth. The electrolyte distributor can have a large number of outlets on an outlet side, so that the electrolyte can be supplied uniformly via the electrolyte distributor to the surface of the substrate to be grown. The electrode can be attached to the outlet side of the lyte distributor be trained. The outlets can thus connect to corresponding through-openings in the electrode, so that the electrolyte can pass through the electrode via the through-openings.

A control unit is also arranged in the housing. The control unit is preferably set up to control the growth of the nanowires. For this purpose, the control unit can, for example, set the electrical voltage or the electrical current that is used to grow the nanowires. In addition, the control unit can set a dosage, a pressure and/or a flow rate of the electrolyte. The growth of the nanowires can be automated by the control unit. The control unit is preferably set up to set a length of the nanowires to be grown and/or a growth rate.

The storage container preferably has an identification via which the control unit can identify the storage container. For this purpose, the control unit can be connected to an identification sensor. For example, the identification can be a bar code, which can be recognized with a bar code scanner as an identification sensor. The identification can also be an RFID chip, which can be recognized as an identification sensor with a corresponding reading device. By identifying the reservoir, for example, it can be recognized whether the correct electrolyte has been provided.

The substrate holder preferably includes electronics configured to affect the growth of the nanowires. The control unit is preferably connected to the substrate holder via an interface when the substrate holder is inserted into the chamber. The interface can include, for example, one or more plug connections. The plug-in connections are preferably designed in such a way that the electronics of the substrate holder are connected to the control unit when the substrate holder is inserted into the receptacle. A separate action by an operator, for example connecting cables, is not required in this case.

The control unit is preferably set up to process signals output by the electronics of the substrate holder and/or to output control signals to the electronics of the substrate holder. The control unit preferably has a database and/or is set up to access an external database. to grab. For example, the control unit can communicate with an external database via an internet connection. Parameters that have been transmitted from the electronics of the substrate holder to the control unit can be compared with corresponding expected values from the database. In the event of discrepancies, for example, a warning signal can be output, the process can be interrupted and/or a correction can be made automatically via a corresponding control signal. A corresponding control signal can also be used to control heating of the substrate holder with the control unit. A temperature of the substrate can be set via the heater.

Furthermore, the device preferably has a display means and/or an operating means, which are connected in particular to the control unit. The display means and/or the operating means are preferably held in or on the housing in such a way that they are accessible to a user. Information about the growth process can be displayed to the user via the display means, and the user can control the process via the operating means. The display means and the operating means can also be embodied as a display and operating means, for example as a touch screen.

If the device has a lock for locking the substrate holder in the receptacle, the control unit is preferably set up to monitor and/or control the lock. If the device has a drive for moving the substrate holder, the control unit is preferably set up to monitor and/or control the drive. If the device has a chamber which can be closed by a flap that can be locked with a lock, the control unit is preferably set up to monitor and/or control the locking. For example, the control unit can recognize that the substrate holder has been inserted into the insertion position and, in response to this, use appropriate control signals to cause the substrate holder to be automatically drawn into the receptacle, locked there with the catch and the opening of the chamber with the flap closed and the flap locked. During the growth of the nanowires, the control unit can monitor that the detent and the latch are and remain active. After the growth of the nanowires is complete, the control unit can use appropriate control signals to release the locking of the flap and the flap is opened and that the lock is released and the substrate holder is automatically moved into the removal position.

The substrate is preferably prepared in a clean room. For this purpose, a structuring layer can be applied to the , into which omissions are introduced, for example by a lithographic process. Depending on the type of structuring layer, the nanowires can be grown only in the gaps or only outside of the gaps. In this way, the nanowires can be selectively grown locally on the substrate. If, for example, nanowires are only to be obtained on metallic pads, these pads can first be produced lithographically. If the surface of the substrate outside the pads is not electrically conductive, the pads for the galvanic growth of the nanowires can be connected, for example, by growing a 100 nm layer of gold or copper onto a 20 nm layer of chromium or tungsten-titanium. These layers can be removed by lift-off or selective etching after growth with the nanowires on top that are not required. The pads can, for example, have an edge length of 3 mΐti and a pitch of 3 mΐti. As a further part of the preparation of the substrate before the surface to be grown can be cleaned and activated, for example with an oxygen plasma. For example, the oxygen plasma can be used at 350 mbar, 100 W for one minute. As a further part of the preparation of the substrate, the foil can be applied - to the substrate itself or, if a patterning layer is used, to the patterning layer. The elastic element can also be placed on the foil as part of the preparation of the substrate.

After the substrate has been prepared, it no longer needs to be kept under clean room conditions. After preparation, the substrate can be taken out of the clean room and fed to the device described. The device can be used outside of a clean room. So it doesn't have to be clean room compliant. Nevertheless, it is preferred that the device is designed to be purely space-conforming. If the device is used in a clean room, the nanowires grown with the device can be protected even after the substrate holder has been removed from the chamber. In a further preferred embodiment, the device has a plurality of accommodation spaces for a respective reservoir for an electrolyte.

The accommodation spaces are preferably formed in the housing, in particular outside the chamber. The device also preferably has at least one connection via which a storage container for an electrolyte can be connected in such a way that the corresponding electrolyte can be used for the growth of the nanowires. If several reservoirs are arranged in a corresponding receiving space in the housing, the connection can optionally be connected to one of the reservoirs. If there is more than one connection, several reservoirs can be connected at the same time. In this case, the control unit can be used to select which of the corresponding electrolytes is or are to be used for the growth of the nanowires. The device can have a respective connection for each of the receiving spaces.

In a further preferred embodiment, the device has a plurality of storage containers for a respective electrolyte. The reservoirs are particularly preferably filled with a respective electrolyte. The reservoirs can be filled with the same or different electrolytes. The storage containers preferably have an identification via which the control unit can identify the storage containers.

In a further preferred embodiment, the device comprises an electrolyte conditioner. The electrolyte conditioner is preferably arranged in the housing. The electrolyte conditioner is set up to condition the electrolyte used to grow the nanowires. The electrolyte prepared in this way can be used for a further growth process. The electrolyte can be prepared with the electrolyte conditioner after each growth process or after a certain number of growth processes. The electrolyte processor can also be set up for various preparations of the electrolyte. For example, a first treatment can be carried out after each growth process and a second treatment can be carried out after a specific number of growth processes instead of the first treatment. This is particularly useful if the second treatment is more intensive than the first treatment. The electrolyte conditioner is preferably set up to the electrolyte to clean. Alternatively or additionally, the electrolyte conditioner is set up to add a substance to the electrolyte. This can change the chemical composition of the electrolyte. For this purpose, the electrolyte conditioner can be connected to a corresponding container in which the substance is provided.

In a further preferred embodiment, the device is designed to automatically clean areas that come into contact with the electrolyte during operation.

In particular, the device can be set up to clean the chamber, in particular an inside of the chamber. In addition, the device can be set up to clean electrolyte lines. The cleaning preferably takes place automatically, for example by spraying the inside of the chamber with a cleaning fluid and/or by passing a cleaning fluid through the electrolyte lines. The cleaning fluid can be water. After a growth process, the device can be cleaned for a subsequent growth process, in particular if the growth processes are carried out with different electrolytes.

In a further preferred embodiment, the chamber has a compressed air supply.

Compressed air can be introduced into the chamber via the compressed air supply, for example in order to remove a liquid from the substrate after the growth process has ended. For this purpose, the compressed air inside the chamber can be directed onto the substrate through a nozzle and/or through an automatically moved compressed air hose. Alternatively or additionally, the compressed air can also be used to clean the chamber.

In another preferred embodiment of the device, an interior of the chamber is formed of an electrolyte-resistant material, preferably plastic.

In a further preferred embodiment of the device, the control unit is set up to determine at least one parameter assigned to the reservoir.

The storage container can have an identification. In this case, the control unit can use the at least one parameter assigned to the reservoir determine by the control unit retrieving the at least one parameter from a database after the reservoir has been identified. Alternatively, the device can include one or more sensors, with which at least one parameter can be determined and transmitted to the control unit.

The parameters associated with the reservoir are in particular: an age of the electrolyte in the reservoir, a chemical composition of the electrolyte in the reservoir, a fill level of the electrolyte in the reservoir, a temperature of the electrolyte in the reservoir.

In a further preferred embodiment of the device, the control unit is set up to determine a flow and/or a pressure of the electrolyte. The "and" case is preferred.

By measuring the flow and/or the pressure of the electrolyte, it can be determined how much electrolyte is available for the growth of the nanowires. The flow and/or the pressure of the electrolyte are preferably measured in an electrolyte line, via which the electrolyte can be conducted from the reservoir into the chamber. Preferably, the flow and/or the pressure of the electrolyte are regulated to a predetermined target value with the control unit.

In a further preferred embodiment, the device also has a pump for pumping the electrolyte from the reservoir into the chamber, the pump being held in a damped manner on a support which is held in a damped manner in the housing.

The pump is preferably connected via the port to the reservoir. The electrolyte can be conducted from the reservoir into the chamber via an electrolyte line. The electrolyte line can project into the chamber in such a way that the electrolyte can be introduced into a depression in the substrate holder within the chamber. Once the substrate has been placed in the depression, the substrate can thus be brought into contact with the electrolyte.

The pump can cause vibrations. These can impair the growth process of the nanowires. Therefore the pump is kept damped. In the present embodiment, the pump is doubly damped to the extent that the Pump is held damped on a carrier which is damped held in the housing th.

In a further preferred embodiment of the device, a filter for the electrolyte is also arranged in the housing.

The filter is preferably a particle filter or an activated carbon filter. Two filters for the electrolyte are particularly preferably arranged in the housing. One of the filters can be a particle filter and the other filter can be an activated carbon filter. The HEPA filter can be used after each growth process, while the activated carbon filter is used instead of the HEPA filter after a certain number of growth processes.

The filter or filters are preferably part of the electrolyte conditioner. The HEPA filter can be used for the first treatment, while the activated carbon filter is used for the second treatment.

In a preferred embodiment of the device, a gripper for removing an elastic element resting on the substrate is arranged in the chamber.

With the gripper, the elastic element can be automatically removed from the film. As a result, the entire method can be carried out automatically, which means that errors can be avoided. The gripper can be designed as a needle gripper, for example.

In this embodiment, the nanowires can be grown in two growth periods. Thus, in a first growth period, the elastic element can lie against the film. The film can be held on the substrate by the elastic element. The elastic element can then be lifted off the film with the gripper. In a second growth process, the nanowires can be grown without the elastic element. This is possible because the foil is already held to the substrate by the nanowires. Without the elastic element, the electrolyte can be better distributed, so that the nanowires can grow more evenly.

In a further preferred embodiment, the device also comprises a (in particular electrically driven) mangle for squeezing out the electrolyte from the elastic element when the elastic element has been removed from the film with the gripper.

The mangle can have two rollers between which the elastic element is moved. In this case, pressure can be exerted on the elastic element with the rollers, so that the elastic element releases electrolyte which is located in the elastic element. This allows a significant part of the electrolyte to be removed from the elastic element and reused.

In a further preferred embodiment of the device, a movable shelf can be arranged in the chamber in such a way that the elastic element can be laid down with the gripper on the movable shelf.

The elastic element can be gripped with the gripper and lifted off the upper surface of the substrate. The movable tray can then be pushed between the surface of the substrate and the elastic element. The elastic element can be deposited on the movable tray and released by the gripper. The elastic element can then be transported away with the movable tray. The elastic element can then be removed from the movable shelf. This can be done automatically, for example by moving the movable shelf in such a way that the elastic element can no longer follow the movement of the movable element from a point of separation. The separation point can result, for example, from the fact that the movable shelf is guided into a shelf receptacle that does not offer any space for the elastic element. In this case, the elastic element remains caught on the edge of the shelf receptacle. The elastic element can be placed in a compartment from which the elastic element can be removed manually.

The movable shelf can be moved automatically, for example by a motor. The movable tray is preferably formed of a flexible material such as plastic. The mobile shelf can be stowed away to save space when not in use. For example, the moveable tray can be guided over a deflection roller so that the moveable tray can be stowed rotated 90° relative to the surface of the substrate when not required. In a further preferred embodiment, the device also comprises a cleaning device for cleaning the movable tray.

The cleaning device is preferably set up to spray a cleaning fluid onto the movable tray. This can be done, for example, after the elastic element has been carried away with and removed from the movable shelf. The cleaning device is preferably arranged in such a way that the movable tray is guided past the cleaning device after the elastic element has been removed from the movable tray.

In a further preferred embodiment, the device further comprises a voltage source which is connected to an electrode and the substrate in order to apply an electrical voltage for the growth of the nanowires.

The voltage source serves to provide the electrical current required for the galvanic growth. For this purpose, the voltage source is connected to the sub strate, in particular to the surface of the substrate to be grown over.

The voltage source is preferably set up to generate a pulsed voltage, in particular with a pulse frequency in the range from 0.1 to 10 ms. Experiments have shown that the quality of the nanowires can be improved with a pulsed voltage.

In a further preferred embodiment, the arrangement also includes a reference electrode which is connected to the surface of the substrate.

The growth of the nanowires can be monitored with the reference electrode. For this purpose, the reference electrode can be used to measure the voltage that is present between the electrode and the reference electrode. The arrangement can include one or more reference electrodes.

The electrode is preferably connected to the voltage source via a first cable. The surface of the substrate to be grown is preferably connected to the voltage source via a second cable. The reference electrode is preferably connected to a voltmeter via a third cable. The surface of the substrate is preferably connected to the strain gauge with a fourth cable, in particular independent of the second cable. The second cable and the fourth cable are preferably each connected directly to the surface of the substrate. The surface of the substrate can have a respective have ges contact pads, via which the second cable and the fourth cable are connected to the surface of the substrate, for example by means of a respective conductive tape. The reference electrode is therefore not only connected to the surface of the substrate in that the reference electrode is connected to a branch of the second cable. It has been found that, in contrast, direct connection of the reference electrode to the surface of the substrate yields more accurate results.

The substrate and the reference electrode are preferably held together by the substrate holder when the nanowires are grown on the substrate.

The first cable, the second cable, the third cable and the fourth cable can each be divided into several sections which are connected to one another, for example via plug connections. The second cable, the third cable and/or the fourth cable can each be divided into sections such that a respective transition between two adjacent sections of the corresponding cable is arranged on an edge of the substrate holder designed as a drawer. The drawer can have a corresponding connector for each of these three cables. Thus, the surface of the substrate and the reference electrode can be contacted when the drawer is pushed into the receptacle by forming the three plug-in connections. The voltage measuring device and the voltage source are preferably arranged inside the housing and outside the chamber.

As a further aspect of the invention, a method is described for the galvanic growth of a multiplicity of nanowires on a substrate with a device which has a substrate holder and a housing with a chamber, a control unit and a reservoir for an electrolyte, and wherein the method comprises: a) placing the substrate in the substrate holder, b) inserting the substrate holder into the chamber, c) galvanic growth of the nanowires from the electrolyte onto the substrate.

The special advantages and features of the device can be applied and transferred to the method and vice versa. The device is preferably set up for operation according to the method. The method is preferably carried out using the device described. In step c) the substrate is preferably heated. A temperature of the substrate is preferably between 15°C and 100°C in step(s).

In a further preferred embodiment of the method, an elastic element is placed on the substrate before step a), step c) being carried out for a first growth period, and the method further comprising: d) removing the elastic element with a gripper, and e ) for a second growth period, continuing to galvanically grow the plurality of nanowires from the electrolyte.

The invention is explained in more detail below with reference to the figures. The figures show a particularly preferred embodiment to which the invention is not limited. The figures and the proportions shown therein are only schematic. Show it:

1: a device according to the invention for the galvanic growth of a large number of nanowires on a substrate,

Fig. 2: a schematic representation of a part of the device from Fig. 1,

Fig. 3: an interconnection of a reference electrode for the device

1 and 2,

Fig. 4a and 4b: other elements of the arrangement of Fig. 1 and 2 in two different states which.

Fig. 1 shows a device 1 for the galvanic growth of a multiplicity of nanowires 2 (shown in Fig. 2) on a surface 27 of a substrate 3. The device 1 comprises a substrate holder 4 designed as a drawer and a receptacle 5 designed in a chamber 18 for the substrate holder 4. The receptacle 5 has guide rails 25, via which the substrate holder 4 can be inserted into the receptacle 5 and pulled out of the receptacle 5. The substrate holder 4 can be locked in the receptacle 5 with a locking device 26 .

In the situation shown in FIG. 1, the substrate holder 4 is accommodated by the receptacle 5 . The device 1 is set up to grow the multiplicity of nanowires 2 on the substrate 3 when the substrate holder 4 with the substrate 3 is accommodated in the receptacle 5 as shown. The substrate holder 4 has electronics 6 which are set up to influence the growth of the nanowires 1 . The substrate holder 4 has an interface 7 designed as a plug connection, via which the electronics 6 are connected to a control unit 8 of the device 1 when the substrate holder 4 is accommodated in the receptacle 5 as shown.

The control unit 8 is also connected to a touchscreen as a display and operating device 23 . The control unit 8 is set up in particular to determine a flow and/or a pressure of the electrolyte.

The device 1 can be used to carry out the following method for galvanically growing a multiplicity of nanowires 2 on the substrate 3: a) placing the substrate 3 in the substrate holder 4, b) inserting the substrate holder 4 into the chamber 18, c) galvanically growing the Nanowires 2 on the substrate 3.

A film 28 (which cannot be seen in detail in FIG. 1) with continuous pores 29 (which can be seen in FIG. 2) rests on the substrate 3 . A sponge rests on the foil 28 as an elastic element 19 , via which an electrolyte can be released onto the foil 28 . An electrode 12 rests on the elastic element 19 . The nanowires 2 can be grown by applying an electrical voltage between the surface 27 of the substrate 3 and the electrode 12 . The elec rode 12 is held by a stamp 20 and can be moved by means of a drive 21 via this.

The electronics 6 of the substrate holder 4 influence the growth of the nanowires 2 according to step c). The electronics 6 of the substrate holder 4 includes a digitization unit 9, which is connected to the control unit 8 for digital communication. Furthermore, the electronics 6 of the substrate holder 4 includes a sensor system 10, which is formed by two sensors in the embodiment shown. In addition, the electronics 6 of the substrate holder 4 includes a memory 24. Growth parameters, for example, which are taken into account during the growth of the nanowires 2, can be stored in this memory. In addition, the electronics 6 of the substrate holder 4 are set up to regulate an electrical voltage or an electrical current for the growth of the nanowires 2 . The electronics 6 is also connected to a heater 14, with which the substrate 3 can be heated.

The device 1 has a housing 34 within which the chamber 18 is formed. An interior 45 of chamber 18 is formed of an electrolyte resistant material. The receptacle 5 for the substrate holder 4 is in the chamber 18 formed so that the substrate holder 4 can be accommodated by the chamber 18 . The chamber 18 has an opening 17 through which the substrate holder 4 can be inserted into the chamber 18 and moved out of the chamber 18 . The Publ voltage 17 can be closed with a flap 16. The flap 16 can be locked with a lock 22 . The device 1 is set up to grow the multitude of nanowires 2 from the electrolyte onto the substrate 3 when the substrate holder 4 with the substrate 3 is inserted into the chamber 18 .

In the housing 34 there are also three reservoirs 35 for a respective electrolyte. One of the reservoirs 35 is connected to an electrolyte line 37 via a connection 36 and a pump 41 . The electrolyte can be introduced into the substrate holder 4 via the electrolyte line 37 and used for the growth of the nanowires 2 . The pump 41 is designed to pump the electrolytic electrolyte from the reservoir 35 into the chamber 18 . The pump 41 is held damped by means of a damper 43 on a carrier 42 which is held damped in the housing 34 by means of a further damper 43 . The connection 36 has a sensor (not shown) with which the storage container 35 can be identified via the control unit 8 and at least one parameter assigned to the storage container 35 can be determined. A filter 44 for the electrolyte and an electrolyte conditioner 46 are also arranged in the housing 34 . In the embodiment shown, the filter 44 and the electrolyte conditioner 46 are integrated into the electrolyte line 37 . Details of the electrolyte conditioner 46 are not shown for the sake of clarity. For example, the electrolyte conditioner 46 can be connected via a line to a container, via which the electrolyte conditioner 46 is supplied with substances that can be used for the electrolyte condition.

FIG. 2 shows part of the device 1 from FIG. 1 in a schematic representation. The substrate 3 is shown with the surface 27 of the substrate 3 on which the nanowires 2 are to be grown. A film 28 is placed on the surface 27 of the substrate 3 and has a multiplicity of continuous pores 29 in which the nanowires 2 can be grown from an electrolyte. The surface 27 of the substrate 3 has a structuring layer 31 with omissions 32 . The nanowires 2 can be grown in the gaps 32 only. The growth of the nanowires 2 can thus take place locally selectively. Furthermore, the elastic element 19 , which is permeable to the electrolyte, is placed on the film 28 . The electrolyte can are brought into contact with the film 28 via the elastic element 19 . In addition, FIG. 2 shows a voltage source 30 (not shown in FIG. 1 for the sake of clarity), which is connected to an electrode 12 and the surface 27 of the substrate 3 in order to apply an electrical voltage for the growth of the nanowires 2 . The voltage source 30 is also connected to the control unit 8 . The electrode 12 can be pressed with a stamp 20 against the elastic element 19 who the.

3 shows further elements of the device 1 from FIGS. 1 and 2. For the sake of clarity, not all elements from FIGS. 1 and 2 are shown in FIG. 3, and vice versa. Thus, in addition to the voltage source 30, the electrode 12 and the substrate 3 with the surface 27, a reference electrode 11 is also shown in FIG. The reference electrode 11 is connected to the surface 27 of the substrate 3 via a voltmeter 33 . The voltage source 30 and the reference electrode 11 are connected to the surface 27 of the substrate 3 independently of one another.

4a and 4b show further elements of the device 1 from FIGS. 1 and 2. For the sake of clarity, not all elements from FIGS. 1 and 2 are shown in FIG. 4a and 4b, and vice versa. It can be seen in FIGS. 4a and 4b in particular that the device 1 has a gripper 38 for removing the elastic element 19 from the film 28. FIG. 4a shows the state in which the elastic element 19 rests on the film 28 on the surface 27 of the substrate 3. FIG. The elastic element 19 can be gripped with the gripper 38 and lifted off the surface 27 of the substrate 3 . This is shown in Figure 4b. The device 1 includes a drive 39 for the automated actuation of the gripper 38. The device 1 also includes a movable support 15 for the elastic element 19. In FIG stowed because the moveable tray 15 is not needed in the condition shown. In FIG. 4b, the movable shelf 15 is pushed between the surface 27 of the substrate 3 and the elastic element 19. FIG. In this way, the elastic element 19 can be placed on the movable tray 15 . Subsequently, the elastic element 19 can be transported away with the movable tray 15 by the movable tray 15 being moved back into its state shown in FIG. 4a. The elastic element 19 can be detached from the movable shelf 15, for example, in that the elastic element 19 does not follow the movement of the movable shelf 15 downwards. Once the elastic member 19 has detached from the movable tray 15. the movable tray 15 can be cleaned with a cleaning device 40. For this purpose, the movable tray 15 can be sprayed with a cleaning fluid by the cleaning device 40 . The device 1 also has an electrically driven mangle 13 for squeezing the electrolyte out of the elastic element 19 when the elastic element 19 has been removed from the foil 28 with the gripper 38 . The mangle 13 has two rollers between which the elastic element 19 can be moved under the action of force.

The method described for Fig. 1 can be carried out with the gripper 38 to the extent that an elastic element 19 is placed on the substrate 3 before step a), that step c) is carried out for a first growth period, and that the The method further comprises: d) removing the elastic element 19 with the gripper 38, and e) for a second growth period, continuing to galvanically grow the plurality of nanowires 2 from the electrolyte.

Reference List

1 device

2 nanowires

3 substrate

4 substrate holders

5 recording

6 electronics

7 interface

8 control unit

9 digitizing unit

10 sensors

11 reference electrode

12 electrode

13 lack

14 heating

15 moveable tray

16 flap

17 opening

18 chamber

19 elastic element

20 stamps

21 drive

22 latch

23 Display and Operating Means

24 memory

25 guide rail

26 detent

27 surface

28 slide

29 pore

30 voltage source

31 patterning layer

32 omission 33 tension meter

34 housing

35 storage bins

36 Connection 37 Electrolyte line

38 grippers

39 drive

40 cleaning device

41 Pump 42 Carrier

43 dampers

44 filters

45 inside

46 electrolyte conditioner

Claims

patent claims

1. Device (1) for the galvanic growth of a plurality of nanowires (2) on a substrate (3), comprising a substrate holder (4) and a housing (34) in which a chamber (18), a control unit (8) and a storage container (35) for an electrolyte are arranged, wherein the device (1) is set up to grow the plurality of nanowires (2) from the electrolyte onto the substrate (3) when the substrate holder (4) with the substrate (3) is inserted into the chamber (18).

2. Device (1) according to claim 1, wherein an inner side (45) of the chamber (18) is formed of an electrolyte-resistant material.

3. Device (1) according to one of the preceding claims, wherein the control unit (8) is set up to determine at least one of the reservoir (35) assigned parameter.

4. Device (1) according to one of the preceding claims, wherein the control unit (8) is set up to determine a flow and/or a pressure of the electrolyte.

5. Device (1) according to any one of the preceding claims, further comprising a pump (41) for pumping the electrolyte from the reservoir (35) into the chamber (18), the pump (41) being cushioned on a support (42). is held dampened in the housing (34).

6. Device (1) according to any one of the preceding claims, wherein in the housin se (34) further a filter (44) is arranged for the electrolyte.

7. Device (1) according to one of the preceding claims, wherein a gripper (38) for removing an elastic element (19) resting on the substrate (3) is arranged in the chamber (18).

8. Device (1) according to claim 7, wherein a movable tray (15) can be arranged in the chamber (18) in such a way that the elastic element (19) with the gripper (38) can be placed on the movable tray (15).

9. Method for the galvanic growth of a multiplicity of nanowires (2) on a substrate (3) with a device (1) which has a substrate holder (4) and a housing (34) with a chamber (18), a control unit (8 ) and a storage container (35) for an electrolyte, and wherein the method comprises: a) placing the substrate (3) in the substrate holder (4), b) inserting the substrate holder (4) into the chamber (18), c ) galvanic growth of the nanowires (2) from the electrolyte onto the sub strate (3).

10. The method of claim 9, wherein before step a) an elastic element (19) is placed on the substrate (3), wherein step c) is carried out for a first growth period, and wherein the method further comprises: d) removing the elastic element (19) with a gripper (38), and e) for a second growth period, continuing the galvanic wax sens the plurality of nanowires (2) from the electrolyte.