EP4293232C0 - TURBOMOLECULAR PUMP - Google Patents

TURBOMOLECULAR PUMP

Info

Publication number
EP4293232C0
EP4293232C0 EP23204203.6A EP23204203A EP4293232C0 EP 4293232 C0 EP4293232 C0 EP 4293232C0 EP 23204203 A EP23204203 A EP 23204203A EP 4293232 C0 EP4293232 C0 EP 4293232C0
Authority
EP
European Patent Office
Prior art keywords
turbomolecular pump
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP23204203.6A
Other languages
German (de)
French (fr)
Other versions
EP4293232B1 (en
EP4293232A1 (en
Inventor
Michael Schill
Jan Hofmann
Niklas Wirth
Peter Vorwerk
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP23204203.6A priority Critical patent/EP4293232B1/en
Publication of EP4293232A1 publication Critical patent/EP4293232A1/en
Priority to JP2024175940A priority patent/JP7890366B2/en
Application granted granted Critical
Publication of EP4293232B1 publication Critical patent/EP4293232B1/en
Publication of EP4293232C0 publication Critical patent/EP4293232C0/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/51—Inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/52—Outlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP23204203.6A 2023-10-17 2023-10-17 Turbomolecular pump Active EP4293232B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP23204203.6A EP4293232B1 (en) 2023-10-17 2023-10-17 Turbomolecular pump
JP2024175940A JP7890366B2 (en) 2023-10-17 2024-10-07 Turbomolecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP23204203.6A EP4293232B1 (en) 2023-10-17 2023-10-17 Turbomolecular pump

Publications (3)

Publication Number Publication Date
EP4293232A1 EP4293232A1 (en) 2023-12-20
EP4293232B1 EP4293232B1 (en) 2026-05-06
EP4293232C0 true EP4293232C0 (en) 2026-05-06

Family

ID=88417108

Family Applications (1)

Application Number Title Priority Date Filing Date
EP23204203.6A Active EP4293232B1 (en) 2023-10-17 2023-10-17 Turbomolecular pump

Country Status (2)

Country Link
EP (1) EP4293232B1 (en)
JP (1) JP7890366B2 (en)

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8808870U1 (en) * 1988-07-09 1988-12-01 Grundfos International A/S, Bjerringbro Pump unit
DE9417422U1 (en) * 1994-10-31 1995-02-09 Leybold AG, 50968 Köln Friction vacuum pump with housing
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
DE19821634A1 (en) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Friction vacuum pump with staged rotor and stator
DE60101898T2 (en) * 2001-03-15 2004-11-18 Varian S.P.A., Leini Turbine pump with a stator stage integrated with a spacer ring
DE102007027352A1 (en) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Mass Spectrometer arrangement
JP5306741B2 (en) 2008-08-28 2013-10-02 バキュームプロダクツ株式会社 Parallel intake pump and vacuum apparatus using the same
DE102010032346A1 (en) * 2010-07-27 2012-02-02 Oerlikon Leybold Vacuum Gmbh Turbo molecular pump for use in turbo molecular pump system, has rotor and stator arranged in pump casing, intake port carried by pump casing and axially arranged to rotor axis, and exhaust opening axially arranged to rotor axis
DE202013009655U1 (en) * 2013-10-31 2015-02-02 Oerlikon Leybold Vacuum Gmbh vacuum pump
DE102013114290A1 (en) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh vacuum pump
EP3032106B1 (en) * 2014-12-08 2020-02-12 Pfeiffer Vacuum Gmbh Vacuum pump
EP3296571B1 (en) * 2017-07-21 2021-11-03 Pfeiffer Vacuum Gmbh Vacuum pump
JP7596936B2 (en) 2021-06-02 2024-12-10 株式会社島津製作所 Vacuum Pumps and Leak Detectors
EP4108932B1 (en) 2022-09-29 2024-11-06 Pfeiffer Vacuum Technology AG Recipient and system with recipient and high vacuum pump

Also Published As

Publication number Publication date
JP7890366B2 (en) 2026-07-14
JP2025069081A (en) 2025-04-30
EP4293232B1 (en) 2026-05-06
EP4293232A1 (en) 2023-12-20

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