EP4288667A1

EP4288667A1 - Pump apparatus and system

Info

Publication number: EP4288667A1
Application number: EP22703962.5A
Authority: EP
Inventors: Brent Haslett; Rajani KOLANI; Lawrence Gerard Marini; Alexander Kaiser; Daniel Reinhard
Original assignee: Edwards Ltd
Current assignee: Edwards Ltd
Priority date: 2021-02-03
Filing date: 2022-02-01
Publication date: 2023-12-13
Also published as: WO2022167782A1; GB2603892A; JP2024505985A; TW202302996A; CN116802401A; US20240117808A1; GB202101448D0; JP7683016B2

Abstract

The present discloses a pump apparatus (3) having a first pump (9) and at least one controller (17). The at least one controller (17) is suitable for generating a first control signal (SOUT1) for controlling the first pump (9). The at least one controller (17) is suitable for generating a second control signal (SOUT2) for controlling operation of a second pump (27). The second pump (27) is external to the pump apparatus (3). One or more pump connection port (39) is provided in the pump apparatus (3) for outputting the second control signal (SOUT2) to the second pump (27). The present disclosure also relates to a vacuum system (1) comprising a pump apparatus (3) of the type described herein.

Description

PUMP APPARATUS AND SYSTEM

TECHNICAL FIELD

The present disclosure relates to a pump apparatus and a system. More particularly, but not exclusively, the present disclosure relates to a vacuum pump apparatus for a vacuum system; and to a vacuum system.

BACKGROUND

Certain vacuum systems, such as mass spectrometry systems, may comprise multiple vacuum chambers. The pressure is reduced in stages through consecutive chambers. Each chamber communicates with adjacent chambers via a restriction and requires individual pumping to provide the required vacuum. The pumping of these systems is conventionally performed using a plurality of pumps, one or more pumps for each chamber. There may be a high vacuum pump, such as a turbopump or a turbomolecular pump, for pumping the highest vacuum chamber, while lower vacuum chamber(s) are pumped by other lower vacuum pumps, such as a scroll or Roots pump. The turbopump or the turbomolecular pump may be a secondary pump and may be backed by a separate pump (referred to herein as a backing pump). The backing pump may, for example, be a scroll pump.

A pump controllers typically focus exclusively on the control and/or monitoring of the pump that houses the controller. Typically, a primary vacuum pump and a secondary vacuum pump are installed, along with one or more vacuum gauges, vacuum valves and other accessories, which are integrated into a vacuum system. The user may then be responsible for the integration of the different components within the vacuum system. The vacuum pumps disposed in vacuum system may have separate controllers. Often, users have to develop their own vacuum system controller and/or to incorporate an additional controller, such as a Turbo Instrument Controller (TIC). The system controller may function as a hub control unit for controlling and monitoring each of the vacuum pumps. The vacuum system may require a complex control system to provide the appropriate control of each of the vacuum pumps.

At least in certain embodiments, the present invention seeks to address or ameliorate at least some of the problems associated with prior art.

SUMMARY OF THE INVENTION

Aspects of the present invention relate to a pump apparatus and a vacuum system as claimed in the appended claims. According to an aspect of the present invention there is provided a pump apparatus comprising: a first pump; at least one controller for generating: a first control signal for controlling the first pump; and a second control signal for controlling a second pump; wherein the second pump is external to the pump apparatus and the pump apparatus comprises one or more pump connection port for outputting the second control signal to the second pump. The pump apparatus may be a self-contained apparatus. The pump apparatus may, for example, comprise a housing in which the first pump and the at least one controller are housed. The one or more pump connection port is configured to provide a hardware interface between the pump apparatus and the second pump. The second pump is disposed externally of the pump apparatus, for example as a separate apparatus. The at least one controller disposed in the pump apparatus may serve as a master controller operable to control the first pump and the second pump. The second pump may optionally comprise a separate controller, for example to process the second control signal and to control operation of the second pump. In this arrangement, the second controller may function as a slave controller.

The second control signal may be output to configure the second pump, for example during set-up of a vacuum system or re-configuration of the vacuum system. Alternatively, or in addition, the second control signal may be output to control the second pump during operation of a vacuum system.

The at least one controller is integrated into the pump apparatus. The at least one controller may act as a hub controller or a system controller, allowing connection to and control of the second pump.

The at least one controller may support the direct connection of one or more of the following: a pressure sensor (such as a vacuum sensor or a vacuum gauge); a vacuum accessory, such as a vacuum valve or a cooling fan; and an interface. The interface may provide improved connectivity, for example to implement a control process and/or a monitoring process. The improved connectivity may enable these processes to be performed locally and/or remotely.

The at least one controller may monitor and/or control each of the first pump and the second pump. At least in certain embodiments, the one or more pump connection port is configured for connection to a complementary connector. Each pump connection port may comprise or consist of a male or female electrical connector. The one or more pump connection port may be integrated into the pump apparatus. The one or more pump connection port may be fastened to the housing.

In use, an electrical connector may be provided between the pump apparatus and the second pump. The electrical connector may, for example, comprise a cable or a wire. The cable or wire may have a connector for cooperating with the one or more pump connection port to establish a communication channel. The communication channel may provide one-way communication, for example to provide communication from the pump apparatus to the second pump. Alternatively, the communication channel may provide two-way communication, for example to provide communication to and from the second pump.

The one or more pump connection port may be configured to output the second control signal to the second pump. The one or more pump connection port may be configured to receive one or more operating signal from the second pump. The one or more pump connection port may enable communication between the at least one controller and a controller associated with the second pump. For example, the second pump may have a second pump controller. The at last one controller may receive at least one operating parameter from the second pump controller. The at least one operating parameter may comprise one or more of the following: an operating speed of the second pump; an inlet pressure of the second pump; an outlet pressure of the second pump; an operational load of the second pump; fault data; and diagnostic information. The transmission of the one or more operating signal to the first controller may facilitate monitoring of the second pump.

The pump apparatus may be a vacuum pump apparatus. The first pump may be a vacuum pump; and/or the second pump may be a vacuum pump. The first pump may be primary vacuum pump and the second pump may be a secondary vacuum pump. Alternatively, the first pump may be secondary vacuum pump and the second pump may be a primary vacuum pump.

At least in certain embodiments, the at least one controller is integrated into the pump apparatus and is configured to control and monitor the first pump; and to control and monitor the second pump. The second pump may be a discrete unit which is connected directly to the first pump within a vacuum system. The at least one controller may also be connected to one or more vacuum sensors/actuators provided within the vacuum system. At least in certain embodiments, the at least one controller may facilitate system level integration and may reduce or obviate the need for additional system level controllers.

The at least one controller may comprise at least one electronic processor and a memory device. The at least one electronic processor may have at least one electrical input for receiving an input signal; and at least one electrical output for outputting the first control signal to the first pump and/or the control signal to the second pump.

The at least one controller may be configured to receive an operating signal indicating one or more operating parameter of the second pump. The at least one controller may be configured to control operation of the first pump and/or the second pump in dependence on the operating signal.

The at least one controller may be configured to receive a pressure request signal indicating a target operating pressure for a process chamber. The operating pressure request signal may be input directly by a user. Alternatively, the operating pressure request signal may be generated by a user selection, for example selecting one of a plurality of operating processes to be performed. The operating pressure request signal may indicate a target operating pressure. The target operating pressure may be predefined. For example, a target operating pressure may be predefined for a given operating process.

The at least one controller may be configured to control operation of the first pump and the second pump in dependence on the pressure request signal.

The pump apparatus may comprise an at least one input device configured to generate the pressure request signal in dependence on a user input. The user input may identify one of a plurality of operating processes. The at least one controller may be configured to generate the pressure request signal in dependence on the identified one of the plurality of operating processes. The operating processes may be predefined.

The pump apparatus may comprise an inlet pressure sensor for measuring an inlet pressure of the first pump; and/or an outlet pressure sensor for measuring an outlet pressure of the first pump.

The at least one controller may be configured to control operation of the second pump in dependence on the measured inlet pressure of the first pump and/or the measured outlet pressure of the first pump. The at least one controller may comprise an input for receiving an operating pressure signal indicating an operating pressure in a (working) process chamber. The at least one controller may be configured to control operation of the first pump and/or the second pump in dependence on the operating pressure signal. The operating pressure may, for example, be measured by a vacuum sensor or a vacuum gauge associated with the process chamber.

The at least one controller may be configured to receive an operating signal indicating one or more operating parameter of the first pump. The at least one controller may be configured to output the one or more operating parameter, for example to enable remote monitoring of the first pump. The at least one controller may be configured to control operation of the first pump and/or the second pump in dependence on the operating signal.

The at least one controller may be configured to receive an operating signal indicating one or more operating parameter of the second pump. The at least one controller may be configured to output the one or more operating parameter, for example to enable remote monitoring of the second pump. The at least one controller may be configured to control operation of the first pump and/or the second pump in dependence on the operating signal from the second pump.

At least in certain embodiments, the at least one controller is configured selectively to control operation of the first pump and/or the second pump. For example, the at least one controller may be configured to control a first switch and a second switch for energizing and deenergizing the first pump and the second pump respectively. The first switch and the second switch may each comprise an electromechanical switch, such as a relay. The second switch may be provided in the second pump. The second control signal may be output to control operation of the second switch.

The pump apparatus may comprise a first power supply for supplying electric power to the first pump. The first power supply may be configured also to supply electric power to the second pump. The first pump may comprise a power outlet for supplying power to the second pump. The power outlet may comprise an electrical connector, such as an electrical socket. The electrical connector and the pump connection port may be combined; or may be separate from each other.

Alternatively, or in addition, the pump apparatus may comprise a second power supply for supplying electric power to the second pump. The at least one controller may be configured to control operation of the first power supply and/or the second power supply. The pump apparatus may comprise a power outlet for supplying electric power to the second pump from the second power supply.

The first pump may comprise a primary pump for a vacuum system. The primary pump may comprise a backing pump. The primary pump may be a scroll pump, for example. The second pump may be a secondary pump for the vacuum system. The secondary pump may comprise a turbopump or a turbomolecular pump, for example. In a variant, the arrangement of the first and second pumps may be reversed. The first pump may comprise a secondary pump; and the second pump may comprise a primary pump.

The at least one controller may be configured to control the first pump and the second pump during a start-up procedure. The start-up procedure may comprise one of the following process: concurrent activation; consecutive activation; sequential activation; and scheduled activation. Alternatively, the at least one controller may be configured to implement a dynamic start-up procedure in dependence on a measured pressure. The pressure may be measured at an inlet and/or an outlet of one or both of the first pump and the second pump. Alternatively, or in addition, the pressure may be measured in the process chamber. Alternatively, or in addition, the at least one controller may be configured to determine a first power consumption by the first pump. The first power consumption may be measured or may be modelled. The at least one controller may activate the second pump when the first power consumption decreases.

The at least one controller may be configured to control the first pump and the second pump during a shut-down procedure. The shut-down procedure may comprise one of the following process: concurrent de-activation; consecutive de-activation; sequential de-activation; and scheduled de-activation. Alternatively, the at least one controller may be configured to implement a dynamic shut-down procedure in dependence on a measured pressure. The pressure may be measured at an inlet and/or an outlet of one or both of the first pump and the second pump. Alternatively, or in addition, the pressure may be measured in the process chamber. Alternatively, or in addition, the at least one controller may be configured to implement a dynamic shut-down procedure in dependence on a first operating speed of the first pump; and/or a second operating speed of a second pump. For example, the shut-down of the first and second pumps may be initiated in a staggered sequence (i.e. one after the other). The at least one controller may control one of the first and second pumps to reduce an operating speed of that pump, for example to a predetermined level (such as 30%, 50% or 70% of the operating speed). The at least one controller may then control the other one of the first and second pumps to reduce an operating speed of that pump. The shut-down of the first and second pumps may proceed concurrently thereafter.

Two or more of the pump apparatus having like configurations may be connected to each other. The second pump may be disposed in a second one of the pump apparatus having a like configuration. The at least one controller may be configurable to output the second control signal to control the second pump disposed in a second one of the pump apparatus having a like configuration. Conversely, the at least one controller may be configurable to control the first pump in dependence on one or more control signal received from another pump apparatus having a like configuration.

The at least one controller may be suitable for controlling one or more additional pumps disposed external to the pump apparatus. The at least one controller may, for example, control at least a third pump. The at least one controller may be configured to output a third control signal for controlling operation of a third pump. The third pump may be disposed external to the pump apparatus.

The at least one controller may be configured to connect to a network, such as the internet. The pump apparatus may comprise a wireless communication module, for example to establish a wireless connection to a networking device, such as a hub or router. Alternatively, or in addition, the pump apparatus may comprise a network port for establishing a wired connection to a networking device, such as a hub or router. An Internet Protocol (IP) address may be allocated to the control unit. The at least one controller may be configured to output operating parameters of the first pump and/or the second pump. The operating parameters may be accessed from a remote terminal, for example via an internet browser application. This arrangement may facilitate remote control, configuration, and monitoring of the first pump and/or the second pump.

According to a further aspect of the present invention there is provided a vacuum system comprising: a pump apparatus as described herein, the pump apparatus comprising a first pump and at least one controller; and a second pump disposed externally of the pump apparatus; the at least one controller being disposed in the pump apparatus and being configured to control operation of the first pump and the second pump. The at least one controller disposed in the pump apparatus may serve as a master controller operable to control the first pump and the second pump. The second pump may optionally comprise a separate controller which may serve as a slave controller. The vacuum system may comprise more than one of the pump apparatus described herein. For example, two or more pump apparatus may be provided. The controller(s) of each of the plurality of pump apparatuses may be connected to each other, for example in a network arrangement.

In use, an electrical connection may be provided between the pump apparatus and the second pump. The electrical connection may, for example, comprise a cable or a wire. The cable or wire may have a connector for cooperating with the one or more pump connection port to establish a communication channel. The communication channel may provide one-way communication, for example to provide communication from the pump apparatus to the second pump. Alternatively, the communication channel may provide two-way communication, for example to provide communication to and from the second pump.

The one or more pump connection port may be configured to output the second control signal to the second pump; and optionally also to receive one or more operating signal from the second pump. The one or more pump connection port may enable communication between the at least one controller and a controller associated with the second pump. For example, the second pump may have a second pump controller. The at last one controller may receive at least one operating parameter from the second pump controller. The at least one operating parameter may comprise one or more of the following: an operating speed of the second pump; an inlet pressure of the second pump; an outlet pressure of the second pump; an operational load of the second pump; fault data; and diagnostic information.

According to a further aspect of the present invention there is provided a vacuum system comprising: a pump apparatus comprising a first pump and at least one controller; and a second pump disposed externally of the pump apparatus; the at least one controller disposed in the pump apparatus being configured to control operation of the first pump and the second pump. The at least one controller may be configured to output one or more control signal to control operation of the second pump.

The at least one controller may be configured to receive one or more operating signal from the second pump. The operating signal may indicate one or more operating parameter of the second pump.

The pump apparatus may comprise an interface for communicating with the second pump. The interface may be configured to implement one-way communication or two-way communication. The pump apparatus may comprise one or more pump connection port for outputting the one or more control signal to control operation of the second pump. The pump connection port may comprise one or more communication line. The pump connection port may be suitable for receiving the one or more operating signal from the second pump.

According to a further aspect of the present invention there is provided a controller for controlling a first pump and a second pump, the controller being configured to receive a first pressure signal indicating an operating pressure of a first pump and a second pressure signal indicating an operating pressure of a second pump; the controller being configured to generate: a first control signal for controlling the first pump; and a second control signal for controlling the second pump; wherein the first and second control signals are generated in dependence on the first and second pressure signals.

The controller may comprise at least one electronic processor and a memory device. The at least one electronic processor may have at least one electrical input for receiving the first pressure signal and the second pressure signal. The at least one electronic processor may have at least one electrical output for outputting the first control signal to the first pump and the second control signal to the second pump.

The at least one electrical input may be configured to receive the first pressure signal from a first pressure sensor for measuring an inlet pressure or an outlet pressure of the first pump.

The at least one electrical input may be configured to receive the second pressure signal from a second pressure sensor for measuring an inlet pressure or an outlet pressure of the second pump. The at least one controller may be configured to receive an operating pressure signal indicating an operating pressure in a process chamber. The first and second control signals may be generated in dependence on the operating pressure signal.

The at least one controller may be configured to control operation of the first pump and the second pump in dependence on a pressure request signal.

According to a further aspect of the present invention there is provided a pump apparatus comprising a controller as described herein. The first pump may be disposed in the pump apparatus. The pump apparatus may comprise one or more pump connection port for electrical connection to the second pump which is external of the pump apparatus.

Any control unit or controller described herein may suitably comprise a computational device having one or more electronic processors. The system may comprise a single control unit or electronic controller or alternatively different functions of the controller may be embodied in, or hosted in, different control units or controllers. As used herein the term “controller” or “control unit” will be understood to include both a single control unit or controller and a plurality of control units or controllers collectively operating to provide any stated control functionality. To configure a controller or control unit, a suitable set of instructions may be provided which, when executed, cause said control unit or computational device to implement the control techniques specified herein. The set of instructions may suitably be embedded in said one or more electronic processors. Alternatively, the set of instructions may be provided as software saved on one or more memory associated with said controller to be executed on said computational device. The control unit or controller may be implemented in software run on one or more processors. One or more other control unit or controller may be implemented in software run on one or more processors, optionally the same one or more processors as the first controller. Other suitable arrangements may also be used.

Within the scope of this application it is expressly intended that the various aspects, embodiments, examples and alternatives set out in the preceding paragraphs, in the claims and/or in the following description and drawings, and in particular the individual features thereof, may be taken independently or in any combination. That is, all embodiments and/or features of any embodiment can be combined in any way and/or combination, unless such features are incompatible. The applicant reserves the right to change any originally filed claim or file any new claim accordingly, including the right to amend any originally filed claim to depend from and/or incorporate any feature of any other claim although not originally claimed in that manner. BRIEF DESCRIPTION OF THE DRAWINGS

One or more embodiments of the present invention will now be described, by way of example only, with reference to the accompanying figures, in which:

Figure 1 shows a vacuum system comprising a pump apparatus in accordance with an embodiment of the present invention;

Figure 2 shows a schematic representation of the pump apparatus shown in Figure 1 ;

Figure 3 shows a block diagram illustrating operation of the vacuum system in accordance with an embodiment of the present invention.

DETAILED DESCRIPTION

A vacuum system 1 comprising a pump apparatus 3 in accordance with an embodiment of the present invention will now be described with reference to the accompanying figures. The vacuum system 1 in the present embodiment is a vacuum system. In particular, the vacuum system 1 is operable to generate a high vacuum in a process chamber 5 for performing an industrial process.

The pump apparatus 3 comprises a first housing 7, a first pump 9, a first control unit 11 , a first power supply 13 and a second power supply 15. The pump apparatus 3 is a standalone pump unit. The first housing 7 forms an enclosure for the pump apparatus 3. The first pump 9, the first control unit 11 and the first and second power supplies 13, 15 are disposed in the first housing 7. The first housing 7 may be dismantled, for example to perform servicing of the first pump 9. However, during normal operation, the first housing 7 encloses the first pump 9 and the first control unit 11. The first control unit 11 comprises at least one first controller 17 and, as described herein, may function as a master control unit. The or each controller has at least one first electronic processor 19 and a memory device 21. A set of computational instructions is stored on the memory device 21. When executed, the instructions cause the first electronic processor 19 to perform the method(s) described herein. The first electronic processor 19 comprises at least one input 23 and at least one output 25. As described herein, the first electronic processor 19 is configured to control operation of the first pump 9 disposed in the pump apparatus 3; and a second pump 27 which is external to the pump apparatus 3.

The first control unit 11 is connected to input means for receiving one or more user inputs. The input means comprises one or more input device 29. The input device 29 is configured to output a user request signal SIN1 to the at least one input 23 of the first electronic processor 19. The first control unit 11 is configured to control operation of the pump apparatus 3 in dependence on a user input. The input device 29 in the present embodiment comprises a touch screen 31 for displaying a graphical user interface. The touch screen 31 may, for example, be integrated into a front panel of the first housing 7. The touch screen 31 detects user inputs and outputs the user request signal SIN1 . The touch screen 31 may, for example, comprise a capacitive screen or a resistive screen. Alternatively, or in addition, the input device 29 may comprise one or more buttons or switches. In the present embodiment, the input device 29 is integrated into the pump apparatus 3. In particular, the input device 29 is mounted to the first housing 7 and connected to the first control unit 11 via a wired (physical) connection. In a variant, the input device 29 could be connected to the first control unit 11 over a wireless connection, for example comprising a radio frequency (RF) communication. Any suitable communication protocol may be used to establish communication between the first control unit 11 and the input device 29.

The first pump 9 is a primary pump and is configured to evacuate a low-vacuum chamber. The first pump 9 may, for example, comprise a scroll pump. The vacuum system 1 comprises a second pump 27 which is separate from the pump apparatus 3. The second pump 27 is a secondary pump and is configured to evacuate a high-vacuum chamber. The second pump 27 may, for example, comprise a turbomolecular pump. The first pump 9 is configured to operate as a backing pump for the second pump 27. The second pump 27 is separate from the pump apparatus 3, i.e. is independent of the pump apparatus 3. The second pump 27 in the present embodiment comprises a second housing 32 which is separate from the first housing 7. The second pump 27 comprises a second control unit 33. The second control unit 33 may comprise one or more electronic processor (not shown) and a memory device. The second control unit 33 is configured to control the second pump 27 in dependence on control signals received from the first control unit 11. The second control unit 33 may be considered as functioning as a slave control unit under the direct control of the first control unit 11 . The first pump 9 and the second pump 27 are configured to operate together within the vacuum system 1 to establish the desired working pressure in the process chamber 5.

The first control unit 11 is integrated into the pump apparatus 3 and is configured to control operation of the first pump 9 and the second pump 27. The first control unit 11 in the pumping apparatus 3 is configured to implement a first pump controller 35 for controlling the first pump 9; and a second pump controller 37 for controlling the second pump 27. The first pump controller 35 outputs a first control signal SOIIT 1 to control operation of the first pump 9; and the second pump controller 37 outputs a second control signal SOLIT2 to control operation of the second pump 27. A first one of the outputs 25 provided on the first electronic processor 19 is configured to output the first control signal SOLIT1 to control the first pump 9. The first pump 9 may be selectively activated in dependence on the first control signal SOIIT 1 . The operating speed of the first pump 9 may be controlled in dependence on the first control signal SOIIT 1 . The first control signal SOIIT 1 may, for example, set a target operating speed for the first pump 9. A second one of the outputs 25 provided on the first electronic processor 19 is configured to output the second control signal SOLIT2 to control the second pump 27. The second pump 27 may be selectively activated in dependence on the second control signal SOLIT2. The operating speed of the second pump 27 may be controlled in dependence on the second control signal SOLIT2. The second control signal SOLIT2 may, for example, set a target operating speed for the second pump 27.

The pump apparatus 3 comprises a first pump connection port 39 for connection to the second pump 27. The first control unit 11 is configured to output the second control signal SOLIT2 to the second pump 27 via the first pump connection port 39. The pump connection port 39 provides a hardware interface between the pump apparatus 3 and the second pump 27. A communication protocol is implemented to control communication between the pump apparatus 3 and the second pump 27. The first pump connection port 39 may, for example, comprise a serial port or a parallel port. The first pump connection port 39 is mounted to the housing 7 of the pump apparatus 3, for example on a back panel (not shown). A connecting lead C1 is provided to establish an electrical connection between the pump connection port 39 and the second pump 27. The connecting lead C1 may, for example, comprise or consist of a cable or a wire having one or more communication channel. The connecting lead C1 has a first connector for connection to the pump connection port 39. The connecting lead C1 may have a second connector for connection to the second pump 27.

In the present embodiment, the first control unit 11 provides two-way communication with the second pump 27. The first control unit 11 may output one or more signals to the second pump 27; and may receive one or more signals from the second pump 27. The second pump 27 is connected to the first pump connection port 39 and, in use, receives the second control signal SOLIT2 generated by the first electronic processor 19. The second pump 27 is controlled in dependence on the second control signal SOLIT2. The second pump 27 may optionally transmit an operating signal to the first electronic processor 19, for example comprising one or more operating parameters of the second pump 27. The operating parameter(s) of the second pump 27 may comprise one or more of the following: an operating speed, a power consumption and an operating load. The operating signal may be communicated to the first control unit 11 via the first pump connection port 39. As outlined above, the first power supply 13 and the second power supply 15 are provided in the pump apparatus 3. The control unit 11 is configured to control operation of the first pump 9 and the second pump 27. In particular, the control unit 11 may selectively activate and deactivate the first pump 9 and/or the second pump 27. The pump apparatus 3 comprises a power output port 41 for supplying electrical power to the second pump 27. The power output port 41 may comprise a suitable electrical power connector. The power output port 41 is mounted to the housing 7 of the pump apparatus 3, for example on a back panel (not shown). In a variant, the second power supply 15 may be omitted from the pump apparatus 3. The first power supply 13 may be configured to supply electrical power to the first pump 9 and the second pump 27. The first power supply 13 may have a power specification suitable for powering the first pump 9 and the second pump 27. In a further variant, the second power supply 15 may be a standalone unit which is separate from the pump apparatus 3 and the second pump 27.

The at least one input 23 of the first electronic processor 19 is configured to receive one or more input signal SIN2-n. The one or more input signal SIN2-n comprise a sensor input signal SIN2-n. In the present embodiment, the first electronic processor 19 is configured to receive first and second sensor input signals SIN2-1 , SIN2-2 from first and second pressure sensors 43, 45 respectively. The first and second pressure sensors 43, 45 are in the form of first and second vacuum gauges. The first and second pressure sensors 43, 45 output analogue signals indicative of the vacuum generated by the first and second pumps 9, 27. Alternatively, the first and second pressure sensors 43, 45 may be digital gauges for communicating pressure signals over a communication interface, such as RS485. The first pressure sensor 43 in the present embodiment is provided in the pump apparatus 3 and is configured to measure an inlet pressure of the first pump 9. In a variant, the pressure sensor 43 may be an external sensor, for example provided to measure an inlet pressure of the second pump 27. The first pressure sensor 43 outputs the first sensor input signal SIN2-1 to the first electronic processor 19. The second pressure sensor 45 is configured to measure an inlet pressure of the second pump 27. In a variant, the second pressure sensor 45 may be configured to measure a chamber pressure of the second pump 27. The second pressure sensor 45 outputs the second sensor input signal SIN2-2 to the first electronic processor 19 (via the first pump connection port 39). The pump apparatus 3 comprises a sensor communication port 47 for wired connection to the second pressure sensor 45. The sensor communication port 47 is mounted to the housing 7 of the pump apparatus 3, for example on a back panel (not shown).

The pump apparatus 3 comprises a network port 49 for communication over a network, for example a local area network (LAN) or a wide area network (WAN). The network port 49 in the present embodiment enables communication between the pump apparatus 3 and a base station BS1. The network port 49 may also allow communication between a plurality of the pump apparatus 3 described herein. The first control unit 11 may, for example, output one or more operating signal SOUT3-n to the base station BS1. A first operating signal SOUT3-1 may indicate one or more operating parameter of the first pump 9; and/or a second operating signal SOUT3-2 may indicate one or more operating parameter of the second pump 27. The one or more operating parameter (in respect of the first pump 9 and/or the second pump 27) may comprise one or more of the following: power consumption; operating speed; inlet pressure; outlet pressure; operating temperature. The one or more operating parameter may also be output to the touch screen 31 , for example to enable an operator to monitor operation of the first pump 9 and/or the second pump 27. In certain embodiments, the first control unit 11 may receive control instructions from the base station BS1. The first control unit 11 may control the first pump 9 and/or the second pump 27 in dependence on the control instructions received from the base station BS1. Alternatively, or in addition, the pump apparatus 3 may comprise a wireless transceiver for transmitting and receiving communications.

The first control unit 11 is configured to control operation of the first pump 9 and the second pump 27. In use, a target operating pressure is set for the process chamber 5. The first control unit 11 controls the first pump 9 and the second pump 27 to achieve the target operating pressure. The first control unit 11 may control the first pump 9 and the second pump 27 during a start-up procedure. For example, the first pump 9 and the second pump 27 may be activated in a predetermined sequence or at predetermined intervals. The first control unit 11 may activate the first pump 9 and subsequently activate the second pump 27 when a suitable vacuum pressure has been achieved at the inlet of the first pump 9 or the inlet of the second pump 27. The target operating pressure of the process chamber 5 may be specified by the user. Alternatively, the target operating pressure may be derived from a predetermined operating process, for example defining the operating parameters for the process chamber 5.

The first control unit 11 may be configured to implement a start-up procedure, for example to stagger or sequence activation of the first pump 9 and the second pump 27. The first and second control signals SOIIT 1 , SOLIT2 may, for example, activate the first and second pumps 9, 27 concurrently, consecutively, in a predetermined sequence or at a predetermined interval. Alternatively, the start-up procedure may be controlled dynamically in dependence on a measured operating pressure of the first pump 9 and/or the second pump 27. The first control unit 11 may be configured to implement a shut-down procedure, for example to control deactivation of the first pump 9 and the second pump 27. The first and second control signals SOIIT 1 , S0LIT2 may, for example, de-activate the first and second pumps 9, 27 concurrently, consecutively, in a predetermined sequence or at a predetermined interval.

As described herein, the vacuum system 1 comprises a first pump 9 disposed internally within the pump apparatus 3; and a second pump 27 disposed externally of the pump apparatus 3. The operation of the vacuum system 1 will now be described with reference to a first block diagram 100. The pump apparatus 3 is activated (BLOCK 105). A user input is detected by the input device 29 (BLOCK 110). The input device 29 outputs a user request signal SIN1 to the first control unit 11 (BLOCK 115). The first control unit 11 determines target operating parameters for the first pump 9 and the second pump 27 (BLOCK 120). The first control unit 11 implements a start-up procedure (BLOCK 125). The first control unit 11 generates a first control signal SOUT 1 which is transmitted to the first pump 9 disposed internally within the pump apparatus 3 (BLOCK 130). The first pump 9 is activated in dependence on the first control signal SOUT 1 . The first control unit 11 generates a second control signal SOUT2 which is output to the second pump 27 disposed externally of the pump apparatus 3 (BLOCK 135). The second pump 27 is activated in dependence on the second control signal SOUT2. The first control unit 11 may optionally receive a first sensor input signal SIN2-1 indicating an operating pressure associated with the first pump 9, for example an inlet pressure or an outlet pressure of the first pump 9 (BLOCK 140). The first control unit 11 may optionally receive a second sensor input signal SIN2-2 indicating an operating pressure associated with the second pump 27, for example an inlet pressure or an outlet pressure of the second pump 27 (BLOCK 145). Optionally, the first control unit 11 may dynamically control operation of the first pump 9 in dependence on the first sensor input signal SIN2-1 (BLOCK 150). Optionally, the first control unit 11 may dynamically control operation of the second pump 27 in dependence on the second sensor input signal SIN2-2 (BLOCK 155). The first control unit 11 controls the first pump 9 and the second pump 27 to achieve target operating pressure in the process chamber 5 (BLOCK 160). The first control unit 11 continues to control operation of the first pump 9 and the second pump 27 to maintain the target operating pressure (BLOCK 165). The first control unit 11 implements a shut-down procedure (BLOCK 170). The first control unit 11 may optionally output a shut-down signal to the second pump 27. The pump apparatus 3 is deactivated to finish the process.

The pump apparatus 3 has been described herein as comprising an input device 29 to provide a human machine interface. The key components of the vacuum system 1 , such as the first pump 7 and the second pump 9, can be configured, controlled, and monitored using the input device 29. It will be understood that the pump apparatus 3 may comprise more than one input device 29. At least in certain embodiments, the pump apparatus 3 may support one or more interfaces which may be disposed locally (optionally integrated into the pump apparatus 3); or disposed remotely, for example connected over a network. The first control unit 11 can be configured to enable access over the internet, for example to enable remote (cloud-based) functions, including one or more of configuring, controlling and monitoring the pump apparatus 3. The other input devices 29 may provide one or more of the functions provided by the input device 29, for example to enable the pump system 1 to be monitored and/or controlled.

The pump apparatus 3 may optionally comprise a wireless communication module, such as Bluetooth (RTM). The wireless communication module may, for example, enable an external computational device (not shown) to communicate with the first control unit 11 over a wireless connection. The computational device may, for example, comprise one or more of the following: a cellular telephone, a tablet computer, a personal computer, or a laptop computer. A compatible application may be pre-installed on the computational device. Alternatively, or in addition, communication may be implemented via a web-browser, for example to establish communication with a web server associated with the first control unit 11. The computational device may communicate with the first control unit 11 using appropriate software, for example to communicate with the first pump 9 and/or the second pump 27 via protocols such as Modbus/TCP or MQTT.

The pump apparatus 3 may optionally comprise a network port to establish a wired connection to one or more other computational devices. For example, the network port may comprise an Ethernet port. The external computational device may be connected to the pump apparatus 3 to communicate with the first control unit 11 using a protocol such as Modbus/TCP; MQTT or OPCLIA or a proprietary protocol. The first control unit 11 may be configured to be connected to an external Fieldbus connected device. The Fieldbus device may communicate with the first control unit 11 via protocols such as EtherCAT, Ethernet/IP and Profinet. Other protocols are also contemplated. The first control unit 11 may optionally be configured to connect to an external RS232/485 connected device for communication with the first control unit 11 . The communication may be established using any suitable protocol, such as Modbus/RTU or a proprietary protocol. The pump apparatus 3 may optionally comprise a Universal Serial Bus (USB) port for connection to an external USB connected device.

It will be appreciated that various modifications may be made to the embodiment(s) described herein without departing from the scope of the appended claims. BLOCK DIAGRAM 100

Reference Numerals

Claims

CLAIMS:

1. A pump apparatus (3) comprising: a first pump (9); at least one controller (17) for generating: a first control signal (SOLIT1) for controlling the first pump (9); and a second control signal (SOLIT2) for controlling a second pump (27); wherein the second pump (27) is external to the pump apparatus (3) and the pump apparatus (3) comprises one or more pump connection port (39) for outputting the second control signal (SOLIT2) to the second pump (27).

2. A pump apparatus (3) as claimed in claim 1 , wherein the at least one controller (17) comprises at least one electronic processor (19) and a memory device (21), the at least one electronic processor (19) having: at least one electrical input (23) for receiving an input signal (SIN1 , SIN2); and at least one electrical output (25) for outputting the first control signal (SOLIT1) to the first pump (9) and/or the second control signal (SOLIT2) to the second pump (27).

3. A pump apparatus (3) as claimed in claim 1 or claim 2, wherein the at least one controller (17) is configured to receive an operating signal (SIN2-n) indicating one or more operating parameter of the second pump (27).

4. A pump apparatus (3) as claimed in claim 3, wherein the at least one controller (17) is configured to control operation of the first pump (9) and/or the second pump (27) in dependence on the operating signal (SIN2-n).

5. A pump apparatus (3) as claimed in any one of the preceding claims, wherein the at least one controller (17) is configured to receive a pressure request signal (SI N 1 ) indicating a target operating pressure for a process chamber (5).

6. A pump apparatus (3) as claimed in claim 5 comprising at least one input device (29) configured to generate the pressure request signal (SIN1) in dependence on a user input, wherein the user input identifies one of a plurality of operating processes, the at least one controller (17) being configured to generate the pressure request signal (SI N 1 ) in dependence on the identified one of the plurality of operating processes.

7. A pump apparatus (3) as claimed in any one of the preceding claims, comprising a first pressure sensor (43) for measuring an inlet pressure or an outlet pressure of the first pump (9).

8. A pump apparatus (3) as claimed in claim 7, wherein the at least one controller (17) is configured to control operation of the second pump (27) in dependence on the measured inlet pressure or outlet pressure of the first pump (9).

9. A pump apparatus (3) as claimed in any one of the preceding claims, wherein the at least one controller (17) comprises an input for receiving an operating pressure signal indicating an operating pressure in a process chamber (5); the at least one controller (17) being configured to control operation of the first pump (9) and/or the second pump (27) in dependence on the operating pressure signal.

10. A pump apparatus (3) as claimed in any one of the preceding claims comprising: a first power supply (13) for supplying electric power to the first pump (9); and a second power supply (15) for supplying electric power to the second pump (27).

11. A pump apparatus (3) as claimed in any one of the preceding claims comprising a power outlet (41) for supplying electric power to the second pump (27).

12. A pump apparatus (3) as claimed in any one of the preceding claims, wherein the first pump (9) comprises a primary pump for a vacuum system.

13. A vacuum system (1) comprising: a pump apparatus (3) as claimed in any one of the preceding claims, the pump apparatus (3) comprising a first pump (9) and at least one controller (17); and a second pump (27) disposed externally of the pump apparatus (3); the at least one controller (17) being disposed in the pump apparatus (3) and being configured to control operation of the first pump (9) and the second pump (27).

14. A vacuum system as claimed in claim 13, wherein the second pump (27) is a secondary pump for a vacuum system.

15. A controller (17) for controlling a first pump (9) and a second pump (27), the controller (17) being configured to receive a first pressure signal indicating an operating pressure of a first pump (9) and a second pressure signal indicating an operating pressure of a second pump (27); the controller being configured to generate: a first control signal (SOLIT1) for controlling the first pump (9); and a second control signal (SOLIT2) for controlling the second pump (27); wherein the first and second control signals (SOLIT1 , SOLIT2) are generated in dependence on the first and second pressure signals (SIN1 , SIN2).

16. A controller (17) as claimed in claim 15 comprising at least one electronic processor (19) and a memory device (21), the at least one electronic processor (19) having: at least one electrical input (23) for receiving the first pressure signal (SI N 1) and the second pressure signal (SIN2); and at least one electrical pump connection port (39) for outputting the first control signal (SOLIT1) to the first pump (9) and the second control signal (SOLIT2) to the second pump (27).

17. A pump apparatus (3) comprising a controller (17) as claimed in claim 15 or claim 16.

18. A pump apparatus (3) as claimed in claim 17, wherein the first pump (9) is disposed in the pump apparatus (3); and the pump apparatus (3) comprises one or more pump connection port for electrical connection to the second pump (27) which is external of the pump apparatus (3).