EP4070623A1 - Dispositif de vaporisation pour un inhalateur électronique et procédé de fabrication d'un dispositif de vaporisation - Google Patents

Dispositif de vaporisation pour un inhalateur électronique et procédé de fabrication d'un dispositif de vaporisation

Info

Publication number
EP4070623A1
EP4070623A1 EP20811301.9A EP20811301A EP4070623A1 EP 4070623 A1 EP4070623 A1 EP 4070623A1 EP 20811301 A EP20811301 A EP 20811301A EP 4070623 A1 EP4070623 A1 EP 4070623A1
Authority
EP
European Patent Office
Prior art keywords
substrate
heating element
evaporation device
silicon
advantageously
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20811301.9A
Other languages
German (de)
English (en)
Inventor
Frank GOLDSCHMIDTBÖING
Uwe Pelz
Muhannad Ghanam
Armin Jamali
Eiko Bäumker
Mohammadreza SABERI
Peter Woias
Thomas Bilger
Jan Jaklin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koerber Technologies GmbH
Original Assignee
Hauni Maschinenbau GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hauni Maschinenbau GmbH filed Critical Hauni Maschinenbau GmbH
Publication of EP4070623A1 publication Critical patent/EP4070623A1/fr
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
    • A—HUMAN NECESSITIES
    • A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
    • A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
    • A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
    • A24F40/40—Constructional details, e.g. connection of cartridges and battery parts
    • A24F40/46—Shape or structure of electric heating means
    • A—HUMAN NECESSITIES
    • A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
    • A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
    • A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
    • A24F40/10—Devices using liquid inhalable precursors
    • A—HUMAN NECESSITIES
    • A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
    • A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
    • A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
    • A24F40/40—Constructional details, e.g. connection of cartridges and battery parts
    • A24F40/44—Wicks
    • A—HUMAN NECESSITIES
    • A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
    • A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
    • A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
    • A24F40/50—Control or monitoring
    • A24F40/51—Arrangement of sensors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/021—Heaters specially adapted for heating liquids

Definitions

  • Vaporizing device for an electronic inhaler and method of making a vaporizing device
  • the present invention relates to a vaporizer device for an electronic inhaler, having a vaporizer having a heat-conducting substrate, a plurality of continuous channels extending through the substrate from an inlet side to an outlet side of the substrate, and an electrical resistance heating element .
  • the invention also relates to a method for producing such an evaporation device.
  • Electronic cigarettes typically use a resistive heater to heat a liquid soaked wick material. Liquid evaporates both on the inner surface of the wick material and directly on the surface of the heater, although relevant calculations show that a large part of the vapor is generated in the wick material.
  • the heating wire can have zones of very different temperatures due to locally varying connection to the wick material and locally and temporally variable wetting with liquid.
  • the effect of so-called hot spots ie the self-reinforcing local overheating, poses a problem, especially because the pollutant formation increases sharply with temperature.
  • the volume heater according to WO 2018/083007 A1 uses a significantly more massive plate made of silicon instead of a grid. Holes are structured in this plate to allow steam to escape.
  • the thick plate ensures that temperature differences are evened out extremely quickly so that hot spots cannot arise.
  • the contact surface is extremely flat and only interrupted by small holes, so that the thermal contact is significantly better than with a grid-like arrangement.
  • the disadvantage of these advantages of the volume heater is essentially a cost problem.
  • the resistance of the heater must be set extremely precisely and reproducibly. Since the entire silicon chip acts as a heating resistor, the specific resistance of the wafer material must be set using an exact concentration of dopant. This is a technological challenge requirement, which leads to high material costs.
  • the linear temperature coefficient of the wafer material is relatively low. However, the increase in resistance is evaluated in order to measure the heater temperature. The measurement sensitivity is therefore low. A material with a higher resistance coefficient would therefore be advantageous in order to achieve a higher measurement sensitivity.
  • the object of the invention is to develop a heater that is cheaper to manufacture than the volume hei zer described above, without losing its advantages.
  • the resistance heating element is arranged on one side of the substrate, consists of a material of higher electrical conductivity than the material of the substrate and has passage openings communicating with the channels of the substrate.
  • the Verdampfungsvor device according to the invention is characterized by a functional separation of heating element and substrate.
  • the substrate has the function of a heat distribution body or a heat distribution plate. The advantage of this functional division is that the material and dimensions of the heating element and the substrate can each be selected and adapted specifically for the corresponding function (resistance heating or heat distribution).
  • the resistance heating element is preferably arranged on the outlet side of the substrate. An arrangement on the inlet side is also possible. In this case, the resistance heating element can be electrically connected, for example by soldering or sintering.
  • the temperature coefficient of the heating element is preferably greater than the temperature coefficient of the substrate. This advantage is particularly noticeable in a measuring circuit for determining the temperature of the heating element by measuring the resistance of the heating element, because the measuring sensitivity of the measuring circuit is significantly increased. With the feature discussed, the measurement sensitivity of a temperature measuring circuit that may be present is increased.
  • a material with suitable conductivity, suitable temperature coefficient and suitable corrosion resistance is advantageously provided for the heating element.
  • Gold, nickel and / or platinum are particularly suitable.
  • the substrate is advantageously made of silicon or contains silicon in particular as the main component.
  • Silicon as a substrate material has the advantage that it can be processed using microsystem technology methods and, in particular, the channels can be introduced into the substrate using proven technology, which favors the mass production of the evaporation device.
  • the thickness of the substrate is preferably greater than the thickness of the heating element, which contributes to reducing costs overall. This is because the heating element, which as a rule consists of a more expensive material than the substrate, can have a comparatively small thickness without the heating function being impaired as a result.
  • the thickness of the heating element is advantageously less than 1 ⁇ m.
  • the thickness of the heating element is advantageously at least a factor of 10 less than the thickness of the substrate.
  • the heating element can, for example, have a meandering structure in one embodiment, or it can be designed over the entire surface in another embodiment.
  • the electrical resistance can also be adjusted via the layer thickness of the heating element.
  • a wick element is preferably arranged on a side of the substrate facing away from the heating element. This leads to a particularly preferred functional division into three parts: heating (heating element) - heat distribution (substrate) - capillary liquid delivery (wick element) of the evaporator device.
  • the wick material can advantageously consist of glass fiber fleece, porous ceramic, metal foam, egg nem open-porous material or another suitable, capillary-promoting material.
  • An electrical insulation layer can preferably be arranged on a surface of the substrate facing the heating element in order to improve the functional separation of the insulation layer, in particular from a conductive substrate.
  • the insulation layer is preferably formed by passivation of the substrate, so that complex application of the insulation layer to the substrate can be dispensed with.
  • a particularly metallic adhesive layer can preferably be provided between the heating element and the substrate or the insulation layer in order to improve the adhesion of the heating element to the substrate.
  • An insulation for example made of silicon oxide, silicon carbide and / or silicon nitride, is preferably provided on a surface of the fleece element in order to produce a metal-free surface.
  • the object is also achieved by a method for Fierstel ment of an evaporation device according to the invention, wherein the Fleizelement is applied according to the invention by vapor deposition, sputtering or screen printing on the substrate.
  • the channels of the substrate can advantageously be produced by means of proven microsystem technology, in particular lithography and dry etching.
  • the invention is not limited to clean room production of the Fleizelements be.
  • Fig. 1 is a schematic view of an electronic Inhala sector
  • FIG. 2 shows a cross-sectional view of a layer structure of an evaporation device according to the invention.
  • FIG. 3 shows a plan view of the outlet side with a fleece element of a vaporization device according to the invention.
  • the inhaler 10 here an electronic cigarette product, comprises a housing 11 in which an air duct 30 is provided between at least one air inlet opening 31 and an air outlet opening 24 at a mouth end 32 of the cigarette product 10.
  • the Mun end 32 of the cigarette product 10 denotes the end which the consumer pulls for inhalation and thereby the cigarette product 10 is subjected to a negative pressure and an air flow 34 in the air duct 30 is generated.
  • the inhaler 10 advantageously consists of a base part 16 and a consumption unit 17, which comprises an evaporation device 20 and a liquid reservoir 18 and is in particular designed in the form of an exchangeable cartridge.
  • the air sucked in through the inlet opening 31 is guided in the air duct 30 to, through, or along the evaporation device 20.
  • the evaporation device 20 is connected or can be connected to the liquid reservoir 18 in which at least one liquid 50 is stored.
  • the evaporation device 20 evaporates the liquid 50 that is supplied to it from the liquid reservoir 18, and adds the evaporated liquid as an aerosol / vapor at an outlet side 65 into the air flow 34.
  • An advantageous volume of the liq stechniks notess 18 is in the range between 0.1 ml and 5 ml, preferably between 0.5 ml and 3 ml, more preferably between 0.7 ml and 2 ml or 1.5 ml.
  • the electronic cigarette 10 also includes an electrical energy store 14 and an electronic control device 15.
  • the energy store 14 is usually arranged in the base part 16 and can in particular be an electrochemical one-way battery or a rechargeable electrochemical battery, for example a lithium Ion battery.
  • the energy store 14 is arranged in a part of the inhaler 10 facing away from the mouth end 32.
  • the consumption unit 17 is advantageously arranged between the energy store 14 and the end of the mouth 32.
  • the electronic control device 15 comprises at least one digital data processing processing device, in particular a microprocessor and / or microcontroller, in the base part 16 (as shown in FIG. 1) and / or in the consumption unit 17.
  • a sensor for example a pressure sensor or a pressure or flow switch, is advantageously arranged in the housing 11, the control device 15 being able to determine on the basis of a sensor signal output by the sensor that a consumer is pulling at the mouth end 32 of the cigarette product 10 in order to inhale.
  • the control device 15 controls the evaporation device 20 in order to add liquid 50 from the liquid reservoir 18 as an aerosol / vapor into the air flow 34.
  • the liquid 50 to be dosed stored in the liquid reservoir 18 is, for example, a mixture comprising one or more of the following components: 1,2-propylene glycol, glycerine, water, at least one flavor, optionally an active substance, for example nicotine.
  • the evaporation device 20 comprises at least one evaporator 60 with at least one resistance fleece element 21 (see FIG. 2) and a wick element 12 for supplying liquid 50 from the liquid reservoir 18 to the evaporator 60 conductive fleece element 21 to a heating of the same and therefore to an evaporation of liquid which is in contact with the fleece element 21.
  • Steam / aerosol generated in this way escapes to the outlet side 65 from the evaporator 60 and is mixed into the air flow 34, see FIG. 1.
  • the evaporation temperature is preferably dependent on the liquid to be evaporated in the range between 100 ° C and 450 ° C, more preferably between 150 ° C and 350 ° C, even more preferably between 190 ° C and 290 ° C.
  • the consumption unit 17 and / or the base part 16 advantageously comprises a non-volatile data memory 35 for storing information or parameters relating to the consumption unit 17.
  • the data memory 35 can be part of the electronic control device 15.
  • Data relating to copy protection and protection against forgery, an ID for uniquely identifying the consumption unit 17, serial number, Fierstelldate and / or expiry date, and / or number of puffs (number of inhalation puffs by the consumer) or the time of use are stored.
  • the data memory is advantageously electrically connected or connectable to the control device 15.
  • the evaporator 60 comprises an electrically conductive, in particular me-metallic resistance heating element 21 and a thermally conductive substrate 25, which advantageously form a layer system.
  • the substrate 25 is advantageously a solid body and has a plurality of channels 26 which extend continuously from an inlet side 61 of the substrate 25 to an outlet side 64 of the substrate 25 in order to allow liquid to be transported from the inlet side 61 to the outlet side 64 enable.
  • Optional layers 22, 23 (these will be explained later) of the evaporator 60 between the substrate 25 and the heating element 21 expediently have corresponding through openings.
  • the substrate 25 is advantageously made of a material of high thermal conductivity.
  • the substrate 25 is particularly advantageously made of silicon, or silicon forms the main component of the substrate 25.
  • Silicon as a substrate material has the advantage that it can be processed with methods of microsystem technology and, in particular, the channels 26 can be introduced into the substrate 25.
  • monocrystalline silicon significantly cheaper polycrystalline silicon can also be used. It is possible to use doped, preferably lightly doped, or undoped silicon.
  • the substrate 25 is preferably made on the basis of MEMS technology, in particular from silicon, and is therefore advantageously a micro-electro-mechanical system.
  • the substrate 25 can advantageously be produced from sections of a wafer.
  • the thickness of the substrate 25, and thus the length of the channels 26, advantageously corresponds to the thickness of conventional wafers and is preferably at most 1000 ⁇ m, more preferably at most 750 ⁇ m, even more preferably at most 500 ⁇ m.
  • the thickness of the substrate 25, and thus the length of the channels 26, is preferably at least 100 ⁇ m, more preferably at least 200 ⁇ m and even more preferably at least 300 ⁇ m.
  • the resistance heating element 21 is advantageously arranged in the form of a heating layer on the outlet side 64 of the substrate 25 and covers the substrate 25 on the outlet side 64 completely or at least in the area of the outlet openings of the channels 26.
  • the resistance heating element 21 is metallic and advantageously consists made of a material of high electrical conductivity, high temperature temperature coefficients and / or high corrosion resistance.
  • the material preferably includes gold, nickel and / or platinum including their alloys. Gold, nickel or platinum is advantageously the main component of the material of the resistance heating element 21.
  • the resistance heating element 21 is made of gold.
  • the resistance heating element 21 has passage openings 27 which communicate with the channels 26 of the substrate 25, i.e. are connected in a liquid-conducting manner, so that liquid can flow from the inlet side 61 to the outlet side 65 of the evaporator 60.
  • the resistance heating element 21 has a typical thickness in the range between 50 nm and 500 nm and is advantageously applied to the substrate 25 by vapor deposition, sputtering or metallic screen printing.
  • a heating element 21 in the form of a coating of the substrate 25 with approx. 300 nm platinum would, for example, be suitable for achieving a resistance of approx. 1 W with a heater area of 3 mm ⁇ 2 mm.
  • the thickness of the resistance heating element 21 is advantageously less than the thickness of the substrate 25 by at least a factor of 10, more advantageously by at least a factor of 100.
  • the heating element 21 can be designed over the entire surface (except for the through openings 27).
  • the electrical conductivity of the resistance heating element 21 is higher, advantageously by at least a factor 10, further advantageously by at least a factor 100, even more advantageously by at least a factor 1000, than the electrical conductivity of the sub- strats 25.
  • the specific electrical conductivity (at 0 ° C.) of gold (heating element 21) is 48.8 MS / m and of silicon (substrate 25) is less than 0.01 MS / m.
  • the electrical resistance of the substrate 25 is at least one factor 10 (or 100 or 1000) higher than the electrical resistance of the resistance heating element 21.
  • the resistance heating element 21 In order to achieve a metal-free surface of the resistance heating element 21, it can be passivated with a silicon dioxide layer, for example.
  • a wick element 12 is advantageously arranged, which can feed liquid from the liquid reservoir 18 to the evaporator 60 by means of capillary force and, if necessary, can track the evaporation.
  • the wick element 12 is connected to the inlet side 61 of the evaporator 60 or of the substrate 25 in a contacting manner and advantageously completely covers the inlet side 61 of the evaporator 60 or of the substrate 25 or at least in the area of the inlet openings of the channels 26.
  • Glass fiber fleece is particularly advantageously used as the wick material, but porous ceramic, metal foam or the like can also be used as the material for the wick element 25.
  • a heating voltage Uh is applied to the resistance heating element 21.
  • electrical contacts 28 are provided on the heating element 21, which are connected to the heating voltage source Uh via electrical lines 29, see FIG. 3. Due to the high electrical conductivity of the resistance heating element 21, the heating voltage Uh leads to rapid and effective heating of the resistance heating element 21, with the required electrical tric heating energy from the energy store 14 originates.
  • the heating heat due to the planar contact between the heating element 21 and the substrate 25 is quickly transferred into the substrate 25. Due to the good thermal conductivity of the substrate 25, the heating heat can be quickly distributed in the substrate. As a result, the entire evaporator 60 including the substrate 25 can evaporate liquid, so that the evaporator 60 has an excellent, reproducible efficiency and a very high vapor rate.
  • the evaporation device 20 is characterized by a functional separation (here in three parts) with heating element 21, substrate 25 and advantageously wick element 12.
  • the substrate 25 has the function of a heat distribution body or a heat distribution plate.
  • the advantage of this functional division is that the material and dimensions of the components 21, 25 can be selected and adapted specifically for the corresponding function (resistance heating or heat distribution).
  • the evaporation device 20 can advantageously have a measuring circuit 19 for determining the temperature of the heating element 21 by measuring the resistance of the heating element 21.
  • the temperature coefficient of the heating element 21 is advantageously greater, in particular by at least a factor of two, more advantageously by at least a factor of three, than that of the substrate 25. This leads to a significant increase in the measurement sensitivity of the measuring circuit 19.
  • the temperature coefficient is (at 0 ° C) of gold (heating element 21) 0.0037 / K, that of silicon can have very different factors depending on the temperature range and doping and in some embodiments can be around 0.001 / K.
  • the heating element 21 can be connected to the substrate via a metallic adhesive layer 22, for example made of Ti or a Ti alloy. If sufficient adhesion of the heating element 21 can be achieved without an adhesive layer 22, this can be dispensed with.
  • an electrical insulation layer 23 can be provided between the substrate 25 and the heating element 21 (possibly the adhesive layer 22).
  • the insulation layer 23 can advantageously be a passivation layer on the substrate 25.
  • an electrical insulation layer 23 can be dispensed with.
  • the conductivity of the silicon compared to that of the heating element 21 is negligible, so that no electrical insulation layer 23 is required.
  • the mean diameter of the channels 26 of the substrate 25 is preferably in the range between 5 ⁇ m and 200 ⁇ m, more preferably in the range between 30 ⁇ m and 150 ⁇ m, even further preferably in the range between 50 ⁇ m and 100 ⁇ m. Due to these dimensions, a capillary effect is advantageously generated, so that liquid penetrating into a channel 26 on the inlet side 61 rises through the channel 26 until the channel 26 is filled with liquid.
  • the number of channels 26 is preferably in the range between four and 1000.
  • the channels 26 are advantageous in shape arranged in an array.
  • the array can be designed in the form of a matrix with s columns and z rows, where s advantageously in the range between 2 and 50 and further advantageously in the range between 3 and 30 and / or z advantageously in the range between 2 and 50 and further advantageously in the range is between 3 and 30.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Resistance Heating (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

L'invention concerne un dispositif de vaporisation (20) pour un inhalateur électronique (10), comprenant un vaporisateur (60) qui comporte un substrat conducteur de chaleur (25), avec une pluralité de canaux traversants (26) s'étendant à travers le substrat (25) depuis un côté d'entrée (61) jusqu'à un côté de sortie (64) du substrat (25), et un élément de chauffage à résistance électrique (21). L'élément de chauffage à résistance (21) est disposé sur un côté (61, 64) du substrat (25), est réalisé en un matériau de conductivité électrique supérieure à celle du matériau du substrat (25), et présente des ouvertures traversantes (27) communiquant avec les canaux (26) du substrat (25).
EP20811301.9A 2019-12-03 2020-11-20 Dispositif de vaporisation pour un inhalateur électronique et procédé de fabrication d'un dispositif de vaporisation Pending EP4070623A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019132766.0A DE102019132766A1 (de) 2019-12-03 2019-12-03 Verdampfungsvorrichtung für einen elektronischen Inhalator, und Verfahren zur Herstellung einer Verdampfungsvorrichtung
PCT/EP2020/082894 WO2021110438A1 (fr) 2019-12-03 2020-11-20 Dispositif de vaporisation pour un inhalateur électronique et procédé de fabrication d'un dispositif de vaporisation

Publications (1)

Publication Number Publication Date
EP4070623A1 true EP4070623A1 (fr) 2022-10-12

Family

ID=73543273

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20811301.9A Pending EP4070623A1 (fr) 2019-12-03 2020-11-20 Dispositif de vaporisation pour un inhalateur électronique et procédé de fabrication d'un dispositif de vaporisation

Country Status (5)

Country Link
US (1) US20230021048A1 (fr)
EP (1) EP4070623A1 (fr)
CN (1) CN114731739A (fr)
DE (1) DE102019132766A1 (fr)
WO (1) WO2021110438A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4369961A1 (fr) 2021-07-14 2024-05-22 JT International SA Dispositif générant un aérosol et procédé de génération d'un aérosol
GB202206234D0 (en) * 2022-04-28 2022-06-15 Nicoventures Trading Ltd Heater assembly and method
GB202217022D0 (en) * 2022-11-15 2022-12-28 Nicoventures Trading Ltd Heater assembly and method
GB202217024D0 (en) * 2022-11-15 2022-12-28 Nicoventures Trading Ltd Heater assembly and method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5205902A (en) * 1989-08-18 1993-04-27 Galileo Electro-Optics Corporation Method of manufacturing microchannel electron multipliers
US5665262A (en) * 1991-03-11 1997-09-09 Philip Morris Incorporated Tubular heater for use in an electrical smoking article
US6582987B2 (en) * 2000-12-30 2003-06-24 Electronics And Telecommunications Research Institute Method of fabricating microchannel array structure embedded in silicon substrate
US20170106113A1 (en) * 2014-11-18 2017-04-20 Numerical Design, Inc. Microfluidic-based apparatus and method for vaporization of liquids
DE102016120803A1 (de) 2016-11-01 2018-05-03 Hauni Maschinenbau Gmbh Verdampfereinheit für einen Inhalator und Verfahren zum Steuern einer Verdampfereinheit
DE102018105220A1 (de) * 2018-03-07 2019-09-12 Hauni Maschinenbau Gmbh Verfahren zur Fertigung eines elektrisch betreibbaren Heizkörpers für einen Inhalator

Also Published As

Publication number Publication date
WO2021110438A1 (fr) 2021-06-10
CN114731739A (zh) 2022-07-08
US20230021048A1 (en) 2023-01-19
DE102019132766A1 (de) 2021-06-10

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