EP4045578A4 - Plasma ion processing of substrates - Google Patents
Plasma ion processing of substrates Download PDFInfo
- Publication number
- EP4045578A4 EP4045578A4 EP20876576.8A EP20876576A EP4045578A4 EP 4045578 A4 EP4045578 A4 EP 4045578A4 EP 20876576 A EP20876576 A EP 20876576A EP 4045578 A4 EP4045578 A4 EP 4045578A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- substrates
- plasma ion
- ion processing
- processing
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title 1
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AU2019903902A AU2019903902A0 (en) | 2019-10-16 | Plasma ion processing of substrates | |
PCT/AU2020/051117 WO2021072502A1 (en) | 2019-10-16 | 2020-10-16 | Plasma ion processing of substrates |
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EP4045578A4 true EP4045578A4 (en) | 2023-10-11 |
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US5792517A (en) * | 1996-04-25 | 1998-08-11 | Japan Vilene Company | Process for treating the outer-inner surfaces of a porous non-conductor |
CA2295729A1 (en) * | 1997-07-14 | 1999-01-28 | John Lynch | Plasma treater systems and treatment methods |
AU2599501A (en) * | 1999-12-29 | 2001-07-09 | Advanced Cardiovascular Systems Inc. | Device and active component for inhibiting formation of thrombus-inflammatory cell matrix |
WO2002004083A2 (en) * | 2000-07-07 | 2002-01-17 | Colorado State University Research Foundation | Surface modified membranes and methods for producing the same |
US7456025B2 (en) * | 2001-08-28 | 2008-11-25 | Porex Corporation | Sintered polymer membrane for analyte detection device |
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WO2009015420A1 (en) * | 2007-07-27 | 2009-02-05 | The University Of Sydney | Biological functionalisation of substrates |
Non-Patent Citations (1)
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TRAN CLARA T: "Quantifying plasma immersion ion implantation of insulating surfaces in a dielectric barrier discharge: how to control the dose | Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences", 25 July 2018 (2018-07-25), XP093078906, Retrieved from the Internet <URL:https://royalsocietypublishing.org/doi/full/10.1098/rspa.2018.0263> [retrieved on 20230905] * |
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EP4045578A1 (en) | 2022-08-24 |
US20220359163A1 (en) | 2022-11-10 |
WO2021072502A1 (en) | 2021-04-22 |
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