EP3931878A1 - Perovskite photoelectronic device with defect passivation - Google Patents
Perovskite photoelectronic device with defect passivationInfo
- Publication number
- EP3931878A1 EP3931878A1 EP20766113.3A EP20766113A EP3931878A1 EP 3931878 A1 EP3931878 A1 EP 3931878A1 EP 20766113 A EP20766113 A EP 20766113A EP 3931878 A1 EP3931878 A1 EP 3931878A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- passivation
- optoelectronic device
- group
- perovskite
- inductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002161 passivation Methods 0.000 title claims abstract description 89
- 230000007547 defect Effects 0.000 title description 17
- 230000005693 optoelectronics Effects 0.000 claims abstract description 44
- 239000000463 material Substances 0.000 claims abstract description 25
- 238000000034 method Methods 0.000 claims abstract description 15
- POJGRKZMYVJCST-UHFFFAOYSA-N ethyl 3,3-diethoxyprop-2-enoate Chemical compound CCOC(=O)C=C(OCC)OCC POJGRKZMYVJCST-UHFFFAOYSA-N 0.000 claims description 36
- 230000001939 inductive effect Effects 0.000 claims description 31
- 239000003795 chemical substances by application Substances 0.000 claims description 29
- -1 -OR(H) Chemical group 0.000 claims description 22
- 150000003457 sulfones Chemical class 0.000 claims description 16
- ATTZFSUZZUNHBP-UHFFFAOYSA-N Piperonyl sulfoxide Chemical compound CCCCCCCCS(=O)C(C)CC1=CC=C2OCOC2=C1 ATTZFSUZZUNHBP-UHFFFAOYSA-N 0.000 claims description 14
- 239000002243 precursor Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 13
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 claims description 13
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 12
- 125000000217 alkyl group Chemical group 0.000 claims description 11
- 125000003396 thiol group Chemical group [H]S* 0.000 claims description 10
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 9
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 9
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 9
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 9
- 125000003118 aryl group Chemical group 0.000 claims description 8
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 229910052717 sulfur Inorganic materials 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 239000012296 anti-solvent Substances 0.000 claims description 6
- 150000007527 lewis bases Chemical group 0.000 claims description 6
- MPQXHAGKBWFSNV-UHFFFAOYSA-N oxidophosphanium Chemical class [PH3]=O MPQXHAGKBWFSNV-UHFFFAOYSA-N 0.000 claims description 6
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims description 6
- 150000001412 amines Chemical class 0.000 claims description 5
- 229910052794 bromium Inorganic materials 0.000 claims description 5
- 229910052801 chlorine Inorganic materials 0.000 claims description 5
- 229910052731 fluorine Inorganic materials 0.000 claims description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 5
- 229910052740 iodine Inorganic materials 0.000 claims description 5
- 125000005499 phosphonyl group Chemical group 0.000 claims description 5
- 150000003141 primary amines Chemical class 0.000 claims description 5
- 150000003335 secondary amines Chemical class 0.000 claims description 5
- 150000001263 acyl chlorides Chemical class 0.000 claims description 4
- 150000001408 amides Chemical class 0.000 claims description 4
- 150000001491 aromatic compounds Chemical class 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 4
- 125000001072 heteroaryl group Chemical group 0.000 claims description 4
- 230000005525 hole transport Effects 0.000 claims description 4
- 125000003107 substituted aryl group Chemical group 0.000 claims description 4
- 238000004381 surface treatment Methods 0.000 claims description 4
- 125000005842 heteroatom Chemical group 0.000 claims description 3
- 150000002430 hydrocarbons Chemical class 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 238000006467 substitution reaction Methods 0.000 claims description 2
- HIXDQWDOVZUNNA-UHFFFAOYSA-N 2-(3,4-dimethoxyphenyl)-5-hydroxy-7-methoxychromen-4-one Chemical compound C=1C(OC)=CC(O)=C(C(C=2)=O)C=1OC=2C1=CC=C(OC)C(OC)=C1 HIXDQWDOVZUNNA-UHFFFAOYSA-N 0.000 claims 4
- 230000006798 recombination Effects 0.000 abstract description 11
- 238000005215 recombination Methods 0.000 abstract description 11
- 230000000694 effects Effects 0.000 abstract description 9
- 241001529297 Coregonus peled Species 0.000 abstract description 8
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 45
- 239000010410 layer Substances 0.000 description 22
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 18
- 239000000243 solution Substances 0.000 description 13
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 12
- 239000001257 hydrogen Substances 0.000 description 11
- 229910052739 hydrogen Inorganic materials 0.000 description 11
- 239000000203 mixture Substances 0.000 description 11
- 238000005259 measurement Methods 0.000 description 10
- QHJPGANWSLEMTI-UHFFFAOYSA-N aminomethylideneazanium;iodide Chemical compound I.NC=N QHJPGANWSLEMTI-UHFFFAOYSA-N 0.000 description 9
- RQQRAHKHDFPBMC-UHFFFAOYSA-L lead(ii) iodide Chemical compound I[Pb]I RQQRAHKHDFPBMC-UHFFFAOYSA-L 0.000 description 9
- 125000004430 oxygen atom Chemical group O* 0.000 description 9
- 239000011787 zinc oxide Substances 0.000 description 9
- 238000001161 time-correlated single photon counting Methods 0.000 description 8
- 125000003277 amino group Chemical group 0.000 description 7
- 230000001419 dependent effect Effects 0.000 description 7
- 229910001507 metal halide Inorganic materials 0.000 description 7
- 150000005309 metal halides Chemical class 0.000 description 7
- 238000001228 spectrum Methods 0.000 description 7
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 6
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 description 6
- 238000003949 trap density measurement Methods 0.000 description 6
- 150000001768 cations Chemical class 0.000 description 5
- 238000012512 characterization method Methods 0.000 description 5
- 238000005401 electroluminescence Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 5
- 230000001404 mediated effect Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- 239000000523 sample Substances 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 5
- 238000002042 time-of-flight secondary ion mass spectrometry Methods 0.000 description 5
- JJMDCOVWQOJGCB-UHFFFAOYSA-N 5-aminopentanoic acid Chemical compound [NH3+]CCCCC([O-])=O JJMDCOVWQOJGCB-UHFFFAOYSA-N 0.000 description 4
- IAZDPXIOMUYVGZ-WFGJKAKNSA-N Dimethyl sulfoxide Chemical compound [2H]C([2H])([2H])S(=O)C([2H])([2H])[2H] IAZDPXIOMUYVGZ-WFGJKAKNSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 4
- DMBHHRLKUKUOEG-UHFFFAOYSA-N diphenylamine Chemical compound C=1C=CC=CC=1NC1=CC=CC=C1 DMBHHRLKUKUOEG-UHFFFAOYSA-N 0.000 description 4
- 238000001194 electroluminescence spectrum Methods 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002159 nanocrystal Substances 0.000 description 4
- 239000002096 quantum dot Substances 0.000 description 4
- 238000004611 spectroscopical analysis Methods 0.000 description 4
- 238000005481 NMR spectroscopy Methods 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 125000000524 functional group Chemical group 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 125000004433 nitrogen atom Chemical group N* 0.000 description 3
- 150000002892 organic cations Chemical class 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 2
- JCEZOHLWDIONSP-UHFFFAOYSA-N 3-[2-[2-(3-aminopropoxy)ethoxy]ethoxy]propan-1-amine Chemical compound NCCCOCCOCCOCCCN JCEZOHLWDIONSP-UHFFFAOYSA-N 0.000 description 2
- YOOSAIJKYCBPFW-UHFFFAOYSA-N 3-[4-(3-aminopropoxy)butoxy]propan-1-amine Chemical compound NCCCOCCCCOCCCN YOOSAIJKYCBPFW-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- PNKUSGQVOMIXLU-UHFFFAOYSA-N Formamidine Chemical compound NC=N PNKUSGQVOMIXLU-UHFFFAOYSA-N 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 229920002873 Polyethylenimine Polymers 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 150000001413 amino acids Chemical class 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 150000001793 charged compounds Chemical class 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 229940035422 diphenylamine Drugs 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 2
- 238000005424 photoluminescence Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- ZMBHCYHQLYEYDV-UHFFFAOYSA-N trioctylphosphine oxide Chemical compound CCCCCCCCP(=O)(CCCCCCCC)CCCCCCCC ZMBHCYHQLYEYDV-UHFFFAOYSA-N 0.000 description 2
- YKPQUSLRUFLVDA-UHFFFAOYSA-N $l^{2}-azanylmethane Chemical compound [NH]C YKPQUSLRUFLVDA-UHFFFAOYSA-N 0.000 description 1
- SLXKOJJOQWFEFD-UHFFFAOYSA-N 6-aminohexanoic acid Chemical compound NCCCCCC(O)=O SLXKOJJOQWFEFD-UHFFFAOYSA-N 0.000 description 1
- XDOLZJYETYVRKV-UHFFFAOYSA-N 7-Aminoheptanoic acid Chemical compound NCCCCCCC(O)=O XDOLZJYETYVRKV-UHFFFAOYSA-N 0.000 description 1
- 229910002483 Cu Ka Inorganic materials 0.000 description 1
- BAVYZALUXZFZLV-UHFFFAOYSA-O Methylammonium ion Chemical compound [NH3+]C BAVYZALUXZFZLV-UHFFFAOYSA-O 0.000 description 1
- 229910015711 MoOx Inorganic materials 0.000 description 1
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical compound C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 description 1
- 241000656145 Thyrsites atun Species 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 229910001413 alkali metal ion Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229960002684 aminocaproic acid Drugs 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 150000001450 anions Chemical group 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 150000001519 atomic cations Chemical class 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000000103 photoluminescence spectrum Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000000425 proton nuclear magnetic resonance spectrum Methods 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 238000006862 quantum yield reaction Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
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- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- WRTMQOHKMFDUKX-UHFFFAOYSA-N triiodide Chemical compound I[I-]I WRTMQOHKMFDUKX-UHFFFAOYSA-N 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
- RNWHGQJWIACOKP-UHFFFAOYSA-N zinc;oxygen(2-) Chemical class [O-2].[Zn+2] RNWHGQJWIACOKP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/10—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising heterojunctions between organic semiconductors and inorganic semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/167—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table further characterised by the doping material
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G23/00—Compounds of titanium
- C01G23/04—Oxides; Hydroxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/028—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table
- H01L31/0288—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table characterised by the doping material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/50—Organic perovskites; Hybrid organic-inorganic perovskites [HOIP], e.g. CH3NH3PbI3
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/50—Photovoltaic [PV] devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Definitions
- the present invention relates to a metal halide perovskite photoelectronic device and organic passivating agents.
- the invention relates to a metal halide perovskite
- Metal-halide perovskites have received growing attention over the last decade as promising functional material for optoelectronic devices such as solid-state light emitting devices and photovoltaic devices.
- Metal-halide perovskites are low-cost solution-processable materials with excellent intrinsic properties such as broad tunability of bandgap, defect tolerance, high photoluminescence quantum efficiency and high emission color purity.
- PeLEDs In order to achieve high-efficiency perovskite based light emitting diodes, PeLEDs, extensive efforts have been carried out to enhance radiative recombination rates by confining the electrons and holes. These confinement efforts include the use of ultra-thin emissive layers, the fabrication of nano-scaled polycrystalline features, the design of low-dimensional or multiple quantum well structures and the synthesis of perovskite quantum dots. As a result, the EQE values of PeLEDs have improved from less than 1% to ⁇ 14%.
- TOPO trioctylphosphine oxide
- the object of the present invention is to provide a method and devices that overcome the drawbacks of prior art techniques.
- an optoelectronic device based on a perovskite material comprising a passivation agent comprising at least one passivation molecule.
- the passivation molecule is a hydrocarbon compound comprising at least one passivation group, PG, at least one inductive group, IG, and an alkyl chain arranged as an structural unit according to the general formula:
- the passivation molecule may comprise at least two passivation groups and two inductive groups wherein each passivation group has a corresponding inductive group at a distance corresponding to a value of n between 1 and 4.
- the passivation molecule comprises at least two passivation groups and one inductive groups associated with the two passivation groups wherein each passivation group has the inductive group at a distance corresponding to a value of n between 1 and 4.
- n is between 1 and 3.
- the passivation molecule is an aromatic compound which is substituted at least by one PG and at least by one inductive group, IG, arranged as a structural unit according to the general formula:
- Ar is a substituted aryl group comprising C5 to C50.
- the passivation molecule is an aromatic compound which is substituted at least by one PG and at least by one inductive group, IG, arranged as a structural unit according to the general formula:
- Ar is a substituted aryl group comprising C5 to C50.
- the passivation agent comprises one of or a combination of molecules with following general structural formula:
- n is from 1 to 5,000,000.
- the inductive group is selected from O, S, F, Cl, Br, I and N.
- passivation agent comprises one of or a combination of EDEA, ODEA, TTDDA and DDDA.
- the optoelectronic device is a photovoltaic device, a laser device, a photo detector, an X-ray detector or a light emitting diode.
- the method of producing the optoelectronic device according to the invention comprises the steps of
- one advantage of the present invention is that it allows to prepare perovskite LEDs with exceptional high EQE up to 21.6%, which is comparable to the best solution processed LEDs with organic and quantum dot
- a further advantage is that the perovskite LEDs with efficient passivation results in slow current-efficiency roll off, which maintain a high EQE of 20.1% and a Wall-plug efficiency of 11.0% at a high current density of 200 mA cm-2, making them more attractive than the most efficient organic and quantum-dot LEDs at high excitations.
- the inventors have recognized that the efficient passivation invented here can improve the operational lifetime of perovskite optoelectronic devices, e.g. LEDs.
- Fig.1 is a schematic illustration of the inductive effect utilized in embodiments of the invention.
- Fig.2 are structures of candidate passivation agents investigated
- Fig.3 is a graph showing dependence of average peak EQE values from candidate passivation agents treated PeLEDs on DE ad ;
- Fig.4 is a schematic illustration of a PeLED according to the invention.
- Fig.5 is a schematic illustration of a photovoltaic device according to the invention.
- Fig.6a-h the PeLED architecture, performance and perovskite film characteristics: (a) the molecular structures of HMDA and EDEA, (b) a high-angle annular dark field (HAADF) cross-sectional image of an EDEA-treated device (left, scale bar 500 nm) and a zoom-in image (right, scale bar 100 nm) with an architecture of indium tin oxide
- Fig.7a-c top-view SEM images of the perovskite films according to the invention,( a) the control perovskite films prepared with and w/o anti-solvent (AS) treatment. b, c, EDEA- (b) and HMDA (c) -treated perovskite films with various PA contents from 10% to 30%; the scale bars for the images are 200 nm;
- Fig.8a-e (a) temperature dependence of capacitance-frequency plots for control, HMDA- treated and EDEA-treated devices (from 320 ⁇ 240 K). (b), (c) trap density deduced from the room temperature C-f plots for the control (b) and the HMDA-treated (c) samples, (d) fluence-dependent PLQYs. (e) time-correlated single photon counting (TCSPC) probed PL lifetime.
- TCSPC time-correlated single photon counting
- Fig.9a-f The dependence of EL performance on passivation effects determined by the hydrogen bonds, (a) the molecular structures of selected PAs (ODEA, TTDDA, DDDA), the letters shown in the chemical structures aim to highlight the different length of carbon chain between N and O atoms, (b) dependence of average peak EQE values from various PAs treated PeLEDs on DEad, each value is an average of 60 devices, (c), histograms of peak EQEs for control and ODEA-treated devices, device characteristics for the best performing ODEA- treated device, (d) J-V-R characteristics, (e) EQE and Wall-plug efficiency as a function of the current density, (f) steady-state EQE for the control and ODEA-treated devices at
- Fig.10 Representative device characteristics based on qusi-2D PEA 2 FA 2 Pb 3 I 10 perovskite films with and without EDEA surface treatment (0.1 vol% in chlorobenzene), (a) EL spectra at 2.5 V. (b), J-V-R. c, J-EQE, with the concentration of Pb2+ being 0.11 M;
- Fig.11 Representative device characteristics based on HMDA (a-c) and EDEA (d-f) passivated FAPbI 3 films.
- Fig.12 Representative device characteristics based on ODEA (a-c), TTDDA (d-f) and DDDA (g-i) passivated FAPbI3 films with various PA feed ratios.
- Fig.13 Histograms of peak EQEs from 60 devices with optimized PA feed ratio.
- HMDA 20%.
- DDDA 25%.
- EDEA 25%.
- TTDDA 20%
- the average peak EQE value for each case is 10.7 ⁇ 0.67% (HMDA), 11.8 ⁇ 0.43% (DDDA), 16.5 ⁇ 0.67% (EDEA) and 16.4 ⁇ 0.61% (TTDDA), respectively, all these devices were prepared with the same batch of ZnO nano-crystals.
- the present invention relates to optoelectronic devices based on a perovskite material comprising organic passivation agents for reducing unwanted recombination effects and to a method of producing such.
- Perovskites are a class of compounds that adopts the ABX3 three-dimensional structure first described for CaTiO +VI
- a and B are cations of various valence and ionic radii and X is an anion.
- the A component is usually a monovalent organic cation, typically
- B component is often a divalent metal cation (usually Pb 2 + , Sn 2 + or a mixture) and X component is a halide anion (typically Cl-, I-, Br- or a mixture thereof).
- X component is a halide anion (typically Cl-, I-, Br- or a mixture thereof). Examples include, but are not limited to MAPbX 3 , FAPbX 3 , CsPbX 3 , MASnX3, FASnX3 and CsSnX3. Or combinations like
- the B component is often a divalent metal cation, usually Pb2+. It may also selected at least one from Sn2+, Ge2+, Eu2+, Cu2+, Tb2+, Fe2+,Co2+, Zn2+, Mn2+ or their mixture with Pb2+, like Sn2+/Pb2+.
- a more general description of a metal halide perovskite is: A’2(ABX3)n-1BX4.
- the present invention relates to both 3D and quasi-2D perovskites.
- the perovskite may also match the structure formula of A +
- A is a monovalent organic cation or alkali metal ion, including Li+, Na+, K+, Rb+, Cs+.
- B 2 3+ is a trivalent metal ion, which may be selected from Bi3+, In3+, Fe3+, Sb3+.
- X component is a halide anion (typically Cl-, I-, Br- or a mixture thereof).
- perovskite material is usually performed in solution from which bulk, layered or micro/nano-structured perovskites can be obtained.
- PeLEDs perovskite light emitting diodes
- the invention is applicable, which is obvious for the skilled person, for all optoelectronic devices wherein a perovskite material is utilized, including, but not limited to photovoltaic devices such as solar cells, laser gain media in optical pump laser or laser diodes, photo detector and optical communication devices, X-ray detectors, luminescent down conversion or up conversion materials in any photoelectric application, like sensors, luminescent solar concentrators and phosphors material.
- photovoltaic devices such as solar cells, laser gain media in optical pump laser or laser diodes, photo detector and optical communication devices, X-ray detectors, luminescent down conversion or up conversion materials in any photoelectric application, like sensors, luminescent solar concentrators and phosphors material.
- the PAs utilized according to the present invention are designed to decrease the hydrogen bonding ability.
- PAs with oxygen atoms within the PAs are used to polarize the passivating amino groups through the inductive effect, reducing their electron-donating ability and hence relevant hydrogen bonding ability.
- the trap-mediated non-radiative recombination is reduced and the
- the perovskite based optoelectronic device comprises a perovskite material comprising at least one or a combination of passivating agents (PAs),
- PA or PAs
- the PA is a hydrocarbon compound comprising at least one passivation group (PG) at least one inductive group (IG) and an alkyl chain.
- the PA molecules can be small molecule, polymer, oligomer, conjugated or non-conjugated.
- R alkyl or aromatic fused rings.
- passivating function groups are aromatic fused rings containing heteroatoms (O, N, S, B), such as pyridine, pyrrole, imidazole, furan, thiophene, and thiazole.
- Suitable inductive groups are known in the art and include, but are not limited to:
- strong electronegative atoms e.g. O, S, F, Cl, Br, I, N
- the inductive group (IG) affects the passivation group (PG) and thereby the hydrogen bonds between the amino groups and the FA+ of the perovskite material. Without being bound to theory, this is schematically illustrated in Fig.1, wherein the IG is O and the PG is an amino group, -NH 2 .
- the IG according to the invention and also the distance, as measured in the number of carbons, n, in the carbon chain is selected so that the electron withdrawing inductive effect of the IG, here the O atom, affect the PG so that the PGs electrons are polarized towards the IG, which hence reduce the electron-donating ability of the amino groups and the relevant hydrogen bonding ability.
- n is selected to be between 1 and 4.
- the selection of n is based on the resulting peak external quantum efficiency, peak EQE.
- a number of PA candidates with varying distance n and varying number of PG groups were tested: HMDA, EDEA, ODEA, TTDDA and DDDA, which respective structure is illustrated in Fig.2.
- the experimental details will be discussed below.
- Fig.3 is a graph illustrating the peak EQE for the PA candidates. All the PA candidates with IGs (n ⁇ 4) are better than the one without IGs (HMDA).
- a significant performance enhancement is found for the PAs wherein n becomes smaller, which can demonstrated by comparing ODEA/TTDDA, or EDEA/DDDA.
- Increasing the number of IGs also affects the peak EQE as demonstrated by comparing EDEA/ODEA and DDDA/TTDDA.
- the information summarized in Fig.3, is in detail presented in Figs.11- 13.
- the conjugated effect afforded by the introduction of an aryl group is utilized in at least one passivation molecule of the PA.
- the passivation molecule is an aromatic compound which is substituted at least by one PG and at least by one inductive group, IG, arranged as a structural unit according to the general formula:
- Ar is a substituted aryl group comprising C5 to C50.
- the passivation group is a heteroaryl molecule with at least one substitution by IG, arranged as a structural unit according to the general formula:
- HAr is a heteroaryl group comprising from C5 to C50, and at least one hetero atom selected from N, O, S.
- the passivation the passivation agent comprises one of or a combination of molecules with following general structural formula: wherein n is from 1 to 5,000,000.
- a photovoltaic device is provided based on the above described optoelectronic device comprising a perovskite material passivated with the passivation agent.
- Example of photovoltaic device include, but is not limited to a solar cell.
- a laser device or a laser application is provided based on the above described optoelectronic device comprising a perovskite material passivated with the passivation agent.
- Laser applications includes but are not limited to laser gain media in optical pump laser or laser diodes.
- a photo detector or an optical communication device is provided based on the above described optoelectronic device comprising a perovskite material passivated with the passivation agent.
- devices comprising luminescent down conversion materials or up conversion materials in any photoelectric application or an optical communication device is provided based on the above described optoelectronic device comprising a perovskite material passivated with the passivation agent.
- the structure of a PeLED according to the invention is schematically illustrated in Fig.4.
- the Pe Led 40 comprises a substrate 41, a transparent conducting material layer 42, an electron transport/injection layer 43, for example a ZnO/PEIE layer, a perovskite layer comprising the passivation agent 44, a hole transport layer (TFB) 45, and an electrode layer (back electrode) 46.
- the structure of photovoltaic device for example a solar cell, according to the invention is schematically illustrated in Fig.5.
- the photovoltaic device 50 comprises a substrate 51, a transparent conducting material layer 52, an electron transport layer, for example a compact TiO 2 or a compact TiO 2 /mesoporous TiO2 double layer 53, a perovskite layer comprising the passivation agent 54, and a hole transport layer, for example Spiro-OMeTad 55, and an electrode layer (back electrode) 56.
- the method of preparing a perovskite based optoelectronic device according to the invention comprises the steps of:
- Perovskite film surface treatment e.g. spin on the top of perovskite films or immerse perovskite films into a solution with passivation agents.
- Amino groups have been frequently employed to passivate perovskite semiconductors due to their coordination bonding to unsaturated PbI 6 -octahedral.
- EDEA ethylenedioxy)diethylamine
- HMDA hexamethylenediamine
- HAADF-STEM high-angle annular dark field cross-sectional scanning transmission electron microscope
- SEM scanning electron microscope
- the molecules used as potential PAs could also be used as templating molecules to synthesize low dimensional perovskites.
- these PAs affect the three-dimensional (3D) crystal structure of FAPbI 3 .
- X-ray diffraction (XRD) measurements indicate no additional diffraction peaks other than those from 3D FAPbI3 in the treated perovskite films (Fig.6h).
- TCSPC time-correlated single photon counting
- the inductive effect can be increased by introducing one additional O atom (as in 2,2 ⁇ -[oxybis(ethylenoxy)]diethylamine (ODEA)), and reduced by increasing the length of alkyl chain between the N and O atoms (as in 4,9-dioxa-1,12-dodecanediamine (DDDA) and 4,7,10-trioxa-1,13-tridecanediamine (TTDDA))32.
- ODEA 2,2 ⁇ -[oxybis(ethylenoxy)]diethylamine
- DDDA 4,9-dioxa-1,12-dodecanediamine
- TTDDA 4,7,10-trioxa-1,13-tridecanediamine
- Fig.9b shows the average peak EQE values for all the passivated systems as a function of DE ad . It clearly shows that the EL performance is strongly dependent on the DE ad, and hence the hydrogen bonding ability of amino groups.
- ODEA which shows a DEad value of -0.42 eV, delivers the highest average peak EQE of 19.0 ⁇ 0.8% (Fig.9b and 9c).
- Our device exhibits a low efficiency roll-off, maintaining a high EQE of 20.1 % and a wall-plug efficiency of 11.0% at a high current density of 200 mA cm-2, which makes them much more efficient than OLEDs and QLEDs at high excitations.
- the improved lifetime may result from the reduced Joule heating due to the high efficiency, or the suppression of ion migration due to the low defect density.
- the passivation agents including hexamethylenediamine (HMDA), 2,2 ⁇ - (ethylenedioxy)diethylamine (EDEA), 4,9-dioxa-1,12-dodecanediamine (DDDA), 2,2 ⁇ - [oxybis(ethylenoxy)]diethylamine (ODEA), 4,7,10-trioxa-1,13-tridecanediamine (TTDDA), ethylene glycol diethyl ether (EGDE) were purchased from Sigma-Aldrich.
- Formamidinium iodide (FAI) was purchased from Dyesol.
- PbI2 (beads, 99.999%) was purchased from Alfa Aesar.
- ITO indium tin oxide
- TL-1 a mixture of water, ammonia (25%), and hydrogen peroxide (28%) (5:1:1 by volume)
- the clean substrates were then treated by UV-ozone for 10 min.
- the ZnO nanocrystal solutions were spin-casted onto the substrates at 4,000 rpm for 30 s in air. Then the substrates were moved into a N2-filled glovebox.
- PEIE polyethylenimine ethoxylated
- the perovskite films were deposited from the precursors with various PA contents and Pb2+ concentrations at a spin- coating speed of 3,000 rpm, followed by annealing at 100°C for 10 min.
- the spin-casting rate is 5,000 rpm.
- 150 mL chlorobenzene (CB) was dropped after 5 seconds spinning.
- the TFB layer was deposited from its CB solution (12 mg mL-1) at 3,000 rpm.
- the MoOx/Au electrode was deposited by a thermal evaporation system through a shadow mask under a base pressure of ⁇ 1 ⁇ 10-7 torr.
- the device area was 7.25 mm-2 as defined by the overlapping area of the ITO films and top electrodes.
- PeLEDs characterization All PeLED device characterizations were carried out at room temperature in a nitrogen-filled glovebox. A Keithley 2400 source meter and a fibre integration sphere (FOIS-1) coupled with a QE Pro spectrometer (Ocean Optics) was used for the measurements. The PeLED devices are tested on top of the integration sphere and only forward light emission can be collected, consistent with the standard OLED characterization method. The absolute radiance was calibrated by a standard Vis-NIR light source (HL-3P- INT-CAL plus, Ocean Optics).
- F-4600, HITACHI fluorescent spectrophotometer
- X-ray photoelectron spectroscopy (XPS) tests were carried out using a Scienta ESCA 200 spectrometer in ultrahigh vacuum ( ⁇ 1x10-10 mbar) with a monochromatic Al (K alpha) X-ray source providing photons with 1486.6 eV.
- the XPS experimental condition was set so that the full width at half maximum of the clean Au 4f 7/2 line (at the binding energy of 84.00 eV) was 0.65 eV. All spectra were measured at a photoelectron take off angle of 0° (normal emission).
- Time-of-flight secondary ion mass spectrometry (TOF-SIMS) tests were performed on a ToF- SIMS.5 instrument from IONTOF, Germany, operated in the spectral mode using a 25 keV Bi +
- Attenuated total reflectance-Fourier Transform Infrared (ATR-FT-IR).
- the ATR-FT-IR spectra were recorded from a PIKE MIRacle ATR accessory with a diamond prim in a Vertex 70 Spectrometer (Bruker) using a DLaTGS detector at room temperature. The measuring system was continuously kept in N 2 atmosphere. The spectra were acquired at 2 cm-1 resolution and 30 scans between 4000 and 800 cm-1. The presented spectra were baselined- corrected by subtracting a linear baseline over the spectral ranges.
- STEM Aberration-corrected scanning transmission electron microscope
- An FEI dual- beam FIB Helios workstation equipped with an in-situ micromanipulator and Pt gas injection system was used to prepare thin samples for STEM imaging. The final milling was performed at 3 kV.
- STEM investigations were conducted using JEOL ARM200F TEM equipped with a spherical aberration corrector at the condenser plane. A semi-convergence angle of 32 mrad was used.
- High-angle annual dark field (HAADF) and annual bright field (ABF) STEM were recorded with semi-angles in the range 68-280 mrad and 7-18 mrad, respectively.
- HAADF high-angle annual dark field
- ABSF annual bright field
- Fluence-dependent PLQY and time-correlated single photon counting (TCSPC) measurements were measured by a typical three-step technique with a combination of 445 nm continuous-wave (CW) laser, spectrometer, and an integrating sphere5.
- the TCSPC measurements were performed on an Edinburgh Instruments spectrometer (FLS980) with a 638 nm pulsed laser (less than 100 ps, 0.1 MHz).
- the total instrument response function (IRF) was less than 130 ps, and temporal resolution was less than 20 ps. All the perovskite films were deposited on ITO/ZnO:PEIE substrates with identical spin-casting condition for the optimized devices, and encapsulated by UV curable resin and glass slides.
- TA Transient absorption
- the perovskite film samples were mounted in a chamber under dynamic vacuum ( ⁇ 10-5 mbar).
- TA spectroscopy was conducted in transmission geometry.
- An amplified Ti:sapphire laser (Quantronix Integra-C) generated ⁇ 130 fs pulses centred at 800 nm, at a repetition rate of 1 kHz.
- a broadband white light probe was generated by focusing the pulses into a thin CaF 2 plate, and pump light at 400 nm was obtained via second harmonic generation in a BBO crystal.
- a grating spectrometer was used to disperse the probe light on to a fast CCD array, enabling broadband shot-to-shot detection.
- Trap density measurements by thermal admittance spectroscopy TAS.
- TAS thermal admittance spectroscopy
- a sinusoidal voltage with a peek-to-peak value of 30 mV generated from a Tektronix AFG 3000 function generator was applied to the device.
- the current signal of the devices was amplified with a SR570 low noise current preamplifier (Stanford Research Systems) and then analysed using a SR830 lock-in amplifier (Stanford Research Systems), where the amplitude and phase of the current can be measured. Based on the amplitude and phase of the current signal, the capacitance of the device was calculated using the parallel equivalent circuit model.
- the capacitance spectra of the device were measured by scanning the frequency of the sinusoidal voltage from 0.01 to 100 kHz in a logarithmic step.
- the temperature of the device was controlled using a DE202AE closed cycle cryocooler (Advanced Research Systems).
- the capacitance-voltage curve was obtained by measuring the capacitance when the applied DC bias voltage scanning from -0.5 to l.0 V.
- the trap density (N T ) distribution in energy (E w ) was calculated with the following relations:
- V bi is the built-in potential
- W is the depletion width
- V bi and W are derived from capacitance-voltage measurement
- C is the capacitance measured at angular frequency of w and temperature of T
- k is the Boltzmann constant
- n 0 is the attempt-to-escape frequency, which can be obtained by fitting the relation of characteristic frequency with different T based on Equation (3).
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Ipc: H01L 31/0288 20060101ALI20221021BHEP Ipc: C01G 23/04 20060101ALI20221021BHEP Ipc: H01L 51/46 20060101ALI20221021BHEP Ipc: H01L 51/50 20060101ALI20221021BHEP Ipc: H01L 51/42 20060101AFI20221021BHEP |
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A4 | Supplementary search report drawn up and despatched |
Effective date: 20230130 |
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RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: LINXOLE AB |
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RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: LINXOLE AB |