EP3887901A1 - Method for manufacturing an electrochromic glazing - Google Patents
Method for manufacturing an electrochromic glazingInfo
- Publication number
- EP3887901A1 EP3887901A1 EP19868187.6A EP19868187A EP3887901A1 EP 3887901 A1 EP3887901 A1 EP 3887901A1 EP 19868187 A EP19868187 A EP 19868187A EP 3887901 A1 EP3887901 A1 EP 3887901A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- layer
- transparent conductive
- heat treatment
- conductive layer
- glass panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000011521 glass Substances 0.000 claims abstract description 50
- 238000010438 heat treatment Methods 0.000 claims abstract description 49
- 239000000463 material Substances 0.000 claims abstract description 38
- 239000003792 electrolyte Substances 0.000 claims abstract description 31
- 238000000151 deposition Methods 0.000 claims abstract description 16
- 230000005855 radiation Effects 0.000 claims description 24
- 230000008021 deposition Effects 0.000 claims description 5
- 238000007669 thermal treatment Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 147
- 239000000758 substrate Substances 0.000 description 18
- 238000011282 treatment Methods 0.000 description 11
- 230000033001 locomotion Effects 0.000 description 9
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 239000000835 fiber Substances 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910001887 tin oxide Inorganic materials 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 5
- 239000010416 ion conductor Substances 0.000 description 5
- 239000013307 optical fiber Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000000265 homogenisation Methods 0.000 description 4
- 229910003437 indium oxide Inorganic materials 0.000 description 4
- 229910052500 inorganic mineral Inorganic materials 0.000 description 4
- 239000011707 mineral Substances 0.000 description 4
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 4
- 239000000615 nonconductor Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910001930 tungsten oxide Inorganic materials 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000000295 emission spectrum Methods 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000004040 coloring Methods 0.000 description 2
- 229920001940 conductive polymer Polymers 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- HTXDPTMKBJXEOW-UHFFFAOYSA-N dioxoiridium Chemical compound O=[Ir]=O HTXDPTMKBJXEOW-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 229910000457 iridium oxide Inorganic materials 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910000480 nickel oxide Inorganic materials 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 2
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000002322 conducting polymer Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000005329 float glass Substances 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910003480 inorganic solid Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- DCYOBGZUOMKFPA-UHFFFAOYSA-N iron(2+);iron(3+);octadecacyanide Chemical compound [Fe+2].[Fe+2].[Fe+2].[Fe+3].[Fe+3].[Fe+3].[Fe+3].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-] DCYOBGZUOMKFPA-UHFFFAOYSA-N 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000013532 laser treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004579 marble Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229960003351 prussian blue Drugs 0.000 description 1
- 239000013225 prussian blue Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/42—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating of an organic material and at least one non-metal coating
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
- G02F1/155—Electrodes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/90—Other aspects of coatings
- C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
- C03C2217/948—Layers comprising indium tin oxide [ITO]
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
- G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
- G02F1/1524—Transition metal compounds
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
- G02F1/155—Electrodes
- G02F2001/1555—Counter electrode
Definitions
- the present invention relates to the field of electrochromic glazing and to its manufacturing process.
- Electrochromic devices and in particular electrochromic glazing comprise in known manner an electrochromic stack comprising a succession of five layers essential for the operation of the device, that is to say the reversible color change following the application of an electrical supply. appropriate. These five functional layers are:
- -A layer of an electrochromic material capable of reversibly and simultaneously inserting ions, the oxidation states of which correspond to the inserted and de-inserted states are of a distinct color when they are subjected to an appropriate electrical supply; one of these states having a higher light transmission than the other,
- either of the transparent electrically conductive layers which may be in contact with the transparent substrate.
- the method of manufacturing by magnetron sputtering of such a mineral electrochromic system with at least five layers comprises one or more stages of heat treatment (annealing) during or after the steps of depositing the layers by magnetron sputtering.
- Some materials, in particular the metal oxides forming the two outermost transparent conductive layers of the stack, are deposited by magnetron sputtering. To have sufficient crystallinity and conductivity, these conductive layers can be deposited hot, or be deposited cold and undergo, after this cold deposit, a heat treatment. The performance and optical properties of the final product strongly depend on these heat treatment steps.
- Another known method consists of providing two glass panels and depositing, on each of them, a transparent conductive layer (TC).
- TC transparent conductive layer
- the electrochromic layer (EC) and the counter-electrode layer (CE) are each deposited on a transparent conductive layer.
- the layer of an electronically insulating and ionically conductive electrolyte is arranged on the electrochromic layer (EC) or on the counter-electrode layer (CE). The whole is then assembled to form the glazing.
- This assembly step further comprises the realization of the connection means for bringing the current to the transparent conductive layers.
- the transparent conductive layers are deposited cold, the roughness of the layers is low, which has an advantage, but their electrical conductivity is also low so that the performance is lower.
- the layers are subjected to a heat treatment of the annealed type, this is characterized by a slow rise in temperature and by a high treatment time, usually about one hour in an oven at 400 ° C. , the electrical conductivity of the layers increases so as to improve the performance of the glazing.
- this treatment involves an increase in the size of the crystals and therefore also in the roughness. This increase in the size of the crystals is also observed if the transparent conductive layers are deposited hot (deposition at a temperature above 150 ° C.).
- each transparent conductive layer TCO
- the roughness of the transparent conductive layers is different.
- electrode (CE) on the other side exert pressure / stress on the electrolyte layer, electronic insulator and ionic conductor at the risk of deforming it.
- this roughness is uneven, there may exist an uneven thickness locally, that is to say that locally the layer of an ion conducting electrolyte is more compressed, thin, thus rendering the performance of the electrochromic glazing uneven and inhomogeneous.
- the present invention therefore proposes to resolve these drawbacks by providing a method for producing an electrochromic glazing in which the electrolyte layer has local variations of smaller thickness.
- the invention relates to a method for manufacturing an electrochromic glazing, said glazing comprising an electrochromic stack comprising: a first transparent conductive layer,
- electrochromic electrode -a layer of a mineral electrochromic material with cathodic coloring, called electrochromic electrode
- said method comprising the following steps:
- - assemble the two glass panels to form a laminated glazing, Characterized in that it further comprises at least one heat treatment step consisting in thermally treating at least one glass panel provided with at least one transparent conductive layer by a rapid heat treatment device before assembling the panels of glass.
- said heat treatment step is used to treat the transparent conductive layer of each glass panel.
- a heat treatment step is also used to treat the layer of an electrochromic material and / or the counter-electrode layer.
- said step of heat treatment of said at least one transparent conductive layer is carried out after the deposition of the first transparent conductive layer on the first glass panel and / or of the second transparent conductive layer on the second glass panel.
- said heat treatment step is carried out to simultaneously treat the layer of an electrochromic material and the first transparent conductive layer and / or to simultaneously treat the counter-electrode layer and the second transparent conductive layer.
- the heat treatment device is placed opposite the layer to be treated and is arranged to bring the layer to be treated to a temperature at least equal to 300 ° C.
- the heat treatment device is arranged to heat treat the layer to be treated for a short time, preferably less than 100 milliseconds.
- the heat treatment device is a laser device emitting radiation having a wavelength between 300 and 2000 nm.
- the heat treatment device comprises at least one intense pulsed light lamp emitting radiation having an emission spectrum preferably comprising several lines, in particular at wavelengths ranging from 160 to 1000 nm, each pulse of light preferably having a duration in a range from 0.05 to 20 milliseconds.
- - fig. 1 is a schematic representation of the electrochromic glazing according to the invention.
- an electrochromic glazing In Figure 1 is shown an electrochromic glazing 1. Such an electrochromic glazing comprises two glass panels 2 made integral by means of a frame or frame. Between these two glass panels, a complete electrochromic stack 3 is arranged. This stack includes:
- -A layer of EC electrochromic material capable of reversibly and simultaneously inserting ions, the oxidation states of which correspond to the inserted and de-inserted states are of a distinct color when they are subjected to an appropriate electrical supply ; one of these states having a higher light transmission than the other,
- the five layers (TC01 / EC / CI / CE / TC02) listed above are the only functional layers essential for the proper functioning of electrochromic glazing.
- the electrochromic stack 3 can comprise other useful layers, which are however not essential for obtaining an electrochromic behavior. It can for example comprise, between the glass substrate and the adjacent TCO layer, a barrier layer, known to prevent for example the migration of sodium ions.
- the stack can also include one or more anti-reflection or color adaptation layers comprising for example an alternation of transparent layers with high index and low refractive index. All the mineral layers of the stack are preferably deposited by sputtering, reactive or not, assisted by magnetic field, generally in the same installation under vacuum.
- the materials capable of serving as transparent conductive oxides for the two transparent conductive layers TCO are known.
- indium oxide, mixed tin and indium oxide, tin oxide, doped tin oxide, zinc oxide, doped zinc oxide, ruthenium oxide, doped ruthenium oxide and zinc oxide doped with aluminum and / or gallium Preferably, mixed tin and indium oxide (ITO) or zinc oxide doped with aluminum and / or gallium will be used.
- the thickness of each of the TCO layers is preferably between 10 and 1000 nm, preferably between 50 and 800 nm.
- ITO mixed tin and indium oxide
- it may also be a layer of tin oxide doped with fluorine or antimony, or a multilayer.
- Each layer of transparent conductive oxide is deposited on one of the glass panels.
- the two layers of transparent conductive oxide must be connected to respective current supply connectors.
- These connectors for example bus bar and wires, are respectively brought into contact with the transparent conductive oxide layer TC01 and the transparent conductive oxide layer TC02 to supply the appropriate electrical supply.
- the EC electrochromic material is preferably based on tungsten oxide (cathodic electrochromic material) or iridium oxide (anodic electrochromic material). These materials can insert cations, in particular protons or lithium ions.
- the CE counter-electrode is preferably made up of a neutral layer in coloring or, at least, transparent or little colored when the electrochromic layer is in the colored state.
- the counter electrode is preferably based on an oxide of an element chosen from tungsten, nickel, iridium, chromium, iron, cobalt, rhodium, or based on a mixed oxide d '' at least two of these, including mixed nickel and tungsten oxide. If the electrochromic material is tungsten oxide, therefore a cathodic electrochromic material, the colored state of which corresponds to the most reduced state, an anodic electrochromic material based on nickel oxide or iridium can for example be used for the counter electrode.
- electrochromic material can in particular be a layer of mixed oxide of vanadium and tungsten or mixed oxide of nickel and tungsten.
- electrochromic material is iridium oxide
- a cathodic electrochromic material for example based on tungsten oxide, can play the role of counter-electrode.
- an optically neutral material in the oxidation states concerned, such as for example cerium oxide or organic materials such as electronic conductive polymers (polyaniline) or Prussian blue.
- the thickness of the counter electrode is generally between 50 nm and 600 nm, in particular between 150 nm and 250 nm.
- the electrolyte C1 is in the form of a polymer or a gel, in particular a proton-conducting polymer, for example such as those described in European patents EP 0 253 713 and EP 0 670 346, or a lithium ion conduction polymer, for example such as those described in patents EP 0 382 623, EP 0 518 754 or EP 0 532 408. These are then called mixed electrochromic systems.
- the electrolyte C1 consists of a mineral layer forming an ionic conductor which is electrically isolated. These electrochromic systems are then designated as “all solid”. Reference may in particular be made to European patents EP 0 867 752 and EP 0 831 360.
- the thickness of the electrolyte layer can be between 1 nm and 1 mm. Preferably, the thickness will be between 1 and 300 nm and even more preferably between 1 and 50 nm.
- An electrochromic glazing unit comprising an electrochromic stack is produced according to a manufacturing process, said stack comprising:
- a layer of an EC electrochromic material capable of reversibly and simultaneously inserting ions, the oxidation states of which correspond to the inserted and uninserted states are of a distinct color when subjected to an appropriate power supply; one of these states having a higher light transmission than the other,
- a CE counter-electrode layer capable of reversibly inserting ions of the same charge as that which the electrochromic material can insert
- a first step in the manufacturing process consists in providing two substrates or glass panels 2.
- the glass panels 2 used are typically float glass, possibly cut, polished and washed.
- a second step consists in depositing, on each glass panel 2, at least one layer of a transparent conductive oxide TC01 / TC02.
- a first glass panel 2 is then obtained on which a first layer of a transparent conductive oxide TC01 is deposited and a second glass panel 2 on which is deposited a second layer of a transparent conductive oxide TC02. It will be understood that the term deposit does not mean that the layer is deposited directly on the glass panel but that it can be deposited on an already existing layer.
- the layer of an electrochromic material EC is deposited on the first glass panel 2 and the layer called the CE counter electrode is deposited on the second glass panel. 2
- a fourth step consists in depositing at least the layer of ion-conducting electrolyte Cl.
- This layer of ion-conducting electrolyte Cl is deposited on the layer of an electrochromic material EC or on the layer called the CE counter-electrode.
- This layer of ion-conducting electrolyte C1 can be deposited in different ways.
- this layer can be deposited by sputtering, reactive or not, assisted by magnetic field, generally in the same vacuum installation.
- this layer of ion-conducting electrolyte can be deposited in the form of a gel.
- a gel process consists in depositing the layer of ion-conducting electrolyte Cl in liquid form on the desired surface.
- a heat treatment is then carried out in order to obtain the desired layer of electrolyte C1 ionic conductor.
- a heat treatment step is carried out.
- This heat treatment is carried out at least on one of the transparent electroconductive layers TC01, TC02, preferably on the transparent conductive oxide layer of each glass panel 2.
- This heat treatment step is carried out between the second step and the third step in the manufacturing process of electrochromic glazing.
- the heat treatment acts only on the transparent electroconductive layers TC01, TC02.
- each panel can be treated by a different heat treatment device or by the same treatment device.
- a so-called additional heat treatment is also applied to the layer of an electrochromic material EC and / or to the layer called the CE counter-electrode.
- a heat treatment stage also takes place between the third stage and the fourth stage of the process for manufacturing the electrochromic glazing. It is therefore understood that a heat treatment takes place between the second step and the third step for the treatment of at least one transparent electroconductive layer TC01, TC02 of a glass panel and that another heat treatment takes place between the third step and the fourth step for the treatment of the layer of an EC electrochromic material and / or of the layer called the CE counter-electrode.
- only one heat treatment step is provided.
- This heat treatment step is carried out between the third step and the fourth step of the process for manufacturing the electrochromic glazing and is arranged to heat treat the layer of an electrochromic material EC and the first transparent electroconductive layer TC01 or the counter electrode layer CE and the second transparent electroconductive layer TC02. It is therefore understood that the layers TC01 / EC - TC02 / CE of the same glass panel 2 are heat treated simultaneously. It could also be provided that the two glass panels 2 are treated at the same time.
- This heat treatment is carried out by a rapid heat treatment device, the latter being able to use different technologies.
- the term rapid heat treatment is understood to mean a heat treatment for which, locally, the layer to be treated undergoes an abrupt / abrupt rise in temperature followed by an abrupt / abrupt reduction in temperature.
- laser sources are used and are typically laser diodes or fiber lasers, in particular fiber, diode or even disc lasers.
- Laser diodes make it possible to economically achieve high power densities compared to the electrical power supply, for a small footprint.
- the size of fiber lasers is even smaller, and the linear power obtained can be even higher.
- fiber lasers is understood to mean lasers in which the place of generation of the laser light is spatially offset from its place of delivery, the laser light being delivered by means of at least one optical fiber.
- the laser light is generated in a resonant cavity in which is located the emitting medium which is in the form of a disc, for example a thin disc (of about 0.1 mm thick) in Yb: YAG.
- the light thus generated is coupled in at least one optical fiber directed towards the place of treatment.
- Fiber or disc lasers are preferably optically pumped using laser diodes.
- the radiation from the laser sources is preferably continuous.
- the wavelength of the laser radiation is in a range from 500 to 2000 nm, preferably from 700 to 1100 nm, in particular from 800 to 1000 nm.
- Power laser diodes emitting at one or more wavelengths chosen from 808 nm, 880 nm, 915 nm, 940 nm or 980 nm have proved to be particularly suitable.
- the wavelength is for example 1030 nm (emission wavelength for a Yb: YAG laser).
- the wavelength is typically 1070 nm.
- the shaping and redirection optics preferably include lenses and mirrors, and are used as means for positioning, homogenizing and focusing the radiation.
- the positioning means aim, where appropriate, to arrange the radiation emitted by the laser sources along a line. They include preferably mirrors.
- the purpose of the homogenization means is to superimpose the spatial profiles of the laser sources in order to obtain homogeneous linear power along the line.
- the homogenization means preferably comprise lenses allowing the separation of the incident beams into secondary beams and the recombination of said secondary beams into a homogeneous line.
- the means for focusing the radiation make it possible to focus the radiation on the layer or layers of transparent conductive oxide to be treated, in the form of a line of desired length and width.
- the focusing means preferably comprise a focusing mirror or a converging lens.
- the shaping optics are preferably grouped in the form of an optical head positioned at the outlet of the optical fiber or of each optical fiber.
- the optics for shaping said optical heads preferably comprise lenses, mirrors and prisms and are used as means for transforming, homogenizing and focusing the radiation.
- the transformation means comprise mirrors and / or prisms and serve to transform the circular beam, obtained at the output of the optical fiber, into a non-circular, anisotropic beam, in the form of a line.
- the transformation means increase the quality of the beam along one of its axes (fast axis, or axis of width I of the laser line) and decrease the quality of the beam along the other (slow axis, or axis of the length L of the laser line).
- the homogenization means superimpose the spatial profiles of the laser sources in order to obtain homogeneous linear power along the line.
- the homogenization means preferably comprise lenses allowing the separation of the incident beams into secondary beams and the recombination of said secondary beams into a homogeneous line.
- the means for focusing the radiation make it possible to focus the radiation at the working plane, that is to say in the plane of the layer to be treated, in the form of a line of desired length and width.
- the focusing means preferably comprise a focusing mirror or a converging lens.
- the length of the line is advantageously equal to the width of the substrate. This length is typically at least 1 m, in particular at least 2 m and in particular at least 3 m. It is also possible to use several lines, disjointed or not, but arranged so as to treat the entire width of the substrate. In this case, the length of each laser line is preferably at least 10 cm or 20 cm, in particular within a range from 30 to 100 cm, in particular from 30 to 75 cm, or even from 30 to 60 cm.
- the term "length" of the line means the largest dimension of the line, measured at the surface of the transparent conductive oxide layer, and "width" the dimension in a second direction perpendicular to the first.
- the width (w) of the line corresponds to the distance, in this second direction, between the axis of the beam where the radiation intensity is maximum and the point where the radiation intensity is equal to 1 / e 2 times the maximum intensity. If the longitudinal axis of the laser line is named x, we can define a width distribution along this axis, called w (x).
- the average width of the or each laser line is preferably at least 35 micrometers, in particular lying in a range from 40 to 100 micrometers or from 40 to 70 micrometers.
- "average” means the arithmetic average. Over the entire length of the line, the width distribution is narrow in order to limit as far as possible any heterogeneity of treatment.
- the difference between the largest width and the smallest width is preferably at most 10% of the value of the average width. This figure is preferably at most 5% and even 3%.
- the laser modules are preferably mounted on a rigid structure, called a "bridge", based on metallic elements, typically made of aluminum.
- the structure preferably does not include a marble slab.
- the bridge is preferably positioned parallel to the conveying means conveying the substrate so that the focal plane of the laser line remains parallel to the surface of the substrate to be treated.
- the bridge comprises at least four feet, the height of which can be individually adjusted to ensure parallel positioning in all circumstances. The adjustment can be ensured by motors located at each foot, either manually or automatically, in conjunction with a distance sensor.
- the height of the bridge can be adjusted (manually or automatically) to take into account the thickness of the substrate to be treated, and thus ensure that the plane of the substrate coincides with the focal plane of the laser line.
- the linear power of the laser line is preferably at least 50 W / cm, advantageously 100 W / cm, in particular 200 W / cm, even 300 W / cm and even 400 W / cm. It is even advantageously at least 600 W / cm, in particular 800 W / cm, or even 1000 W / cm.
- the linear power is measured at the point where the or each laser line is focused on the transparent conductive oxide layer. It can be measured by placing a power detector along the line, for example a calorimetric power meter, such as in particular the Beam Finder S / N 2000716 power meter from the company Cohérent Inc.
- the power is advantageously distributed in a manner homogeneous over the entire length of the or each line. Preferably, the difference between the highest power and the lowest power is less than 10% of the average power.
- the radiation comes from at least one intense pulsed light lamp (IPL, Intense Pulsed Light) hereinafter called flash lamp.
- IPL Intense Pulsed Light
- Such flash lamps are generally in the form of sealed glass or quartz tubes filled with a rare gas, provided with electrodes at their ends. Under the effect of a short-lived electric pulse, obtained by discharging a capacitor, the gas ionizes and produces a particularly intense incoherent light.
- the emission spectrum generally comprises at least two emission lines, it is preferably a continuous spectrum having a maximum emission in the near ultraviolet.
- the lamp is preferably a xenon lamp. It can also be an argon, helium or krypton lamp.
- the emission spectrum preferably comprises several lines, in particular at wavelengths ranging from 160 to 1000 nm.
- the duration of each light pulse is preferably in a range from 0.05 to 20 milliseconds, in particular from 0.1 to 5 milliseconds.
- the repetition rate is preferably within a range from 0.1 to 5 Hz, in particular from 0.2 to 2 Hz.
- the radiation can come from several lamps arranged side by side, for example 5 to 20 lamps, or even 8 to 15 lamps, so as to simultaneously treat a larger area. In this case, all the lamps can emit flashes simultaneously.
- the or each lamp is preferably arranged transversely to the longest sides of the substrate.
- the or each lamp preferably has a length of at least 1 m, in particular 2 m and even 3 m, so that large substrates can be treated.
- the capacitor is typically charged at a voltage of 500 V to 500 kV.
- the current density is preferably at least 4000 A / cm 2 .
- the total energy density emitted by flash lamps, related to the surface of the transparent conductive oxide layer, is preferably between 1 and 100 J / cm 2 , in particular between 1 and 30 J / cm 2 , or even between 5 and 20 J / cm 2 .
- the high powers and energy densities make it possible to heat the layer to be treated very quickly at high temperatures.
- each point of the layer to be treated is preferably brought to a temperature of at least 300 ° C., in particular 350 ° C., or even 400 ° C. , and even 500 ° C or 600 ° C.
- the maximum temperature is normally reached at the moment when the point of the layer to be treated in question passes under the radiation device, for example under the laser line or under the flash lamp.
- the points on the surface of the layer located under the radiation device for example under the laser line
- in its immediate surroundings for example within one millimeter
- the temperature of the electrochromic stack is normally at most 50 ° C., and even 40 ° C or 30 ° C.
- Each point of the layer to be treated undergoes heat treatment (or is brought to the maximum temperature) for a period advantageously comprised in a range ranging from 0.05 to 10 ms, in particular from 0.1 to 5 ms, or from 0, 1 to 2 ms.
- this duration is fixed both by the width of the laser line and by the speed of relative movement between the substrate and the laser line.
- this duration corresponds to the duration of the flash.
- the speed of the relative movement of movement between the substrate and the or each source of radiation is advantageously at least 2 m / min or 4 m / min, in particular 5 m / min and even 6 m / min or 7 m / min, or even 8 m / min and even 9 m / min or 10 m / min.
- the speed of the relative movement of movement between the substrate and the source radiation is at least 12 m / min or 15 m / min, in particular 20 m / min and even 25 or 30 m / min.
- the speed of the relative movement of movement between the substrate and the or each source of radiation varies during treatment by at most 10 % relative, in particular 2% and even 1% compared to its nominal value.
- the or each radiation source (in particular laser line or flash lamp) is fixed, and the substrate is in motion, so that the relative displacement speeds will correspond to the speed of movement of the substrate.
- This rapid heat treatment cleverly makes it possible to activate said transparent electroconductive layers, that is to say to increase the conductivity while limiting crystallization.
- This limitation in crystallization is manifested by a limitation in the size of the crystals formed during this annealing step since the latter does not vary. For example, for ten 10cm 2 samples comprising an ITO layer, half of these samples are not heat treated and half are heat treated. It is noted that the average value of the size of the crystals is 33.3 nm without heat treatment and 34.7 nm with laser treatment.
- an assembly step called the lamination step, is performed to assemble the two glass panels.
- this ability to increase the electrical conduction of the transparent electroconductive layers without increasing the size of the crystals and therefore the roughness makes it possible to improve the performance of the electrochromic glazing.
- a constraint appears at the level of the electrolyte layer C1.
- This constraint is the result of the roughness of the transparent conductive layers TC01, TC02 on said electrolyte layer, this locally deformed / compressing electrolyte layer so that said electrolyte layer C1 locally has a variation in sound thickness.
- This local variation in the thickness of the electrolyte layer C1 over its entire surface results in an electrochromic reaction of the electrochromic glazing which is not homogeneous and therefore a drop in performance.
- a lower roughness therefore makes it possible to less compensate for the variation in thickness and therefore to have a thinner layer of ion-conducting electrolyte and electrical insulator.
- the speed of passage of the electrochromic glazing from clear mode to opaque mode and vice versa is therefore better.
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- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
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- General Chemical & Material Sciences (AREA)
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- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Abstract
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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FR1872014A FR3088850B1 (en) | 2018-11-28 | 2018-11-28 | PROCESS FOR MANUFACTURING AN ELECTROCHROME WINDOW |
PCT/FR2019/052821 WO2020109725A1 (en) | 2018-11-28 | 2019-11-27 | Method for manufacturing an electrochromic glazing |
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EP3887901A1 true EP3887901A1 (en) | 2021-10-06 |
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EP19868187.6A Pending EP3887901A1 (en) | 2018-11-28 | 2019-11-27 | Method for manufacturing an electrochromic glazing |
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US (1) | US20220009825A1 (en) |
EP (1) | EP3887901A1 (en) |
JP (1) | JP2022509782A (en) |
CN (1) | CN113039483A (en) |
FR (1) | FR3088850B1 (en) |
WO (1) | WO2020109725A1 (en) |
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CN113791510A (en) * | 2021-08-06 | 2021-12-14 | 河北光兴半导体技术有限公司 | Preparation system for electrochromic glass |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
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FR2601150B1 (en) | 1986-07-04 | 1991-05-31 | Saint Gobain Vitrage | VARIABLE TRANSMISSION GLAZING OF THE ELECTROCHROME TYPE |
FR2642890B1 (en) | 1989-02-09 | 1991-04-12 | Saint Gobain Vitrage | COLLOIDAL MATERIAL CONDUCTING ALKALINE CATIONS AND APPLICATIONS AS ELECTROLYTES |
FR2649691B1 (en) * | 1989-07-11 | 1992-10-30 | Saint Gobain Vitrage Int | ELECTROCHROME GLAZING |
FR2677800B1 (en) | 1991-06-14 | 1993-08-20 | Saint Gobain Vitrage Int | SOLID ION CONDUCTIVE MATERIAL FROM A POLYMER AND AN ALKALINE CATION SALT, APPLICATION AS AN ELECTROLYTE. |
EP0532408A1 (en) | 1991-09-13 | 1993-03-17 | Saint-Gobain Vitrage International | Proton-conducting polymer and its use as electrolyte in electrochemical devices |
FR2716457B1 (en) | 1994-02-23 | 1996-05-24 | Saint Gobain Vitrage Int | Protonic conductive electrolyte material. |
FR2746934B1 (en) | 1996-03-27 | 1998-05-07 | Saint Gobain Vitrage | ELECTROCHEMICAL DEVICE |
FR2753545B1 (en) | 1996-09-18 | 1998-10-16 | Saint Gobain Vitrage | ELECTROCHEMICAL DEVICE |
FR2904123B1 (en) * | 2006-07-21 | 2008-09-12 | Saint Gobain | ELECTROCHEMICAL / ELECTROCOMMANDABLE DEVICE OF THE WINDOW TYPE AND HAVING VARIABLE OPTICAL AND / OR ENERGY PROPERTIES. |
US8080141B2 (en) * | 2008-11-18 | 2011-12-20 | Guardian Industries Corp. | ITO-coated article and/or method of making the same via heat treating |
FR2948356B1 (en) * | 2009-07-22 | 2011-08-19 | Saint Gobain | ELECTROCHROME DEVICE |
FR2963342B1 (en) * | 2010-07-27 | 2012-08-03 | Saint Gobain | METHOD FOR OBTAINING A MATERIAL COMPRISING A SUBSTRATE WITH A COATING |
JP6279578B2 (en) * | 2012-08-09 | 2018-02-14 | セイジ・エレクトロクロミクス,インコーポレイテッド | Ternary nickel oxide materials for electrochromic devices |
US8524526B1 (en) * | 2012-08-14 | 2013-09-03 | Guardian Industries Corp. | Organic light emitting diode with transparent electrode and method of making same |
DK2946246T3 (en) * | 2013-01-21 | 2019-07-01 | Kinestral Tech Inc | MULTIPLE ELECTROCHROOM FITTING WITH LITHIUM NICKEL-OXID BASED ANODE |
US10061177B2 (en) * | 2014-07-23 | 2018-08-28 | Kinestral Technologies, Inc. | Process for preparing multi-layer electrochromic stacks |
WO2016077005A1 (en) * | 2014-11-14 | 2016-05-19 | Heliotrope Technologies, Inc. | Post-temperable nanocrystal electrochromic devices |
FR3031197B1 (en) * | 2014-12-31 | 2017-06-16 | Saint Gobain | METHOD FOR RAPID THERMAL TREATMENT OF A COMPLETE SOLID ELECTROCHROME STACK |
-
2018
- 2018-11-28 FR FR1872014A patent/FR3088850B1/en active Active
-
2019
- 2019-11-27 JP JP2021527067A patent/JP2022509782A/en active Pending
- 2019-11-27 EP EP19868187.6A patent/EP3887901A1/en active Pending
- 2019-11-27 WO PCT/FR2019/052821 patent/WO2020109725A1/en unknown
- 2019-11-27 CN CN201980078173.6A patent/CN113039483A/en active Pending
- 2019-11-27 US US17/297,819 patent/US20220009825A1/en active Pending
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FR3088850A1 (en) | 2020-05-29 |
US20220009825A1 (en) | 2022-01-13 |
WO2020109725A1 (en) | 2020-06-04 |
CN113039483A (en) | 2021-06-25 |
FR3088850B1 (en) | 2020-12-11 |
JP2022509782A (en) | 2022-01-24 |
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