EP3815801C0 - Reinigungsverfahren zum reinigen einer oberfläche und vakuumverbindungsverfahren sowie nachrüstsatz für eine oberflächenreinigungsvorrichtung, oberflächenreinigungsvorrichtung und vakuumverbindungsvorrichtung mit oberflächenreinigungsvorrichtung - Google Patents
Reinigungsverfahren zum reinigen einer oberfläche und vakuumverbindungsverfahren sowie nachrüstsatz für eine oberflächenreinigungsvorrichtung, oberflächenreinigungsvorrichtung und vakuumverbindungsvorrichtung mit oberflächenreinigungsvorrichtungInfo
- Publication number
- EP3815801C0 EP3815801C0 EP19206111.7A EP19206111A EP3815801C0 EP 3815801 C0 EP3815801 C0 EP 3815801C0 EP 19206111 A EP19206111 A EP 19206111A EP 3815801 C0 EP3815801 C0 EP 3815801C0
- Authority
- EP
- European Patent Office
- Prior art keywords
- cleaning
- cleaning device
- vacuum connection
- surface cleaning
- well
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19206111.7A EP3815801B1 (de) | 2019-10-30 | 2019-10-30 | Reinigungsverfahren zum reinigen einer oberfläche und vakuumverbindungsverfahren sowie nachrüstsatz für eine oberflächenreinigungsvorrichtung, oberflächenreinigungsvorrichtung und vakuumverbindungsvorrichtung mit oberflächenreinigungsvorrichtung |
| PCT/EP2020/078550 WO2021083644A1 (de) | 2019-10-30 | 2020-10-12 | Reinigungsverfahren zum reinigen einer oberfläche und vakuumverbindungsverfahren sowie nachrüstsatz für eine oberflächenreinigungsvorrichtung, oberflächenreinigungsvorrichtung und vakuumverbindungsvorrichtung mit oberflächenreinigungsvorrichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19206111.7A EP3815801B1 (de) | 2019-10-30 | 2019-10-30 | Reinigungsverfahren zum reinigen einer oberfläche und vakuumverbindungsverfahren sowie nachrüstsatz für eine oberflächenreinigungsvorrichtung, oberflächenreinigungsvorrichtung und vakuumverbindungsvorrichtung mit oberflächenreinigungsvorrichtung |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP3815801A1 EP3815801A1 (de) | 2021-05-05 |
| EP3815801C0 true EP3815801C0 (de) | 2025-06-25 |
| EP3815801B1 EP3815801B1 (de) | 2025-06-25 |
Family
ID=68502796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP19206111.7A Active EP3815801B1 (de) | 2019-10-30 | 2019-10-30 | Reinigungsverfahren zum reinigen einer oberfläche und vakuumverbindungsverfahren sowie nachrüstsatz für eine oberflächenreinigungsvorrichtung, oberflächenreinigungsvorrichtung und vakuumverbindungsvorrichtung mit oberflächenreinigungsvorrichtung |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP3815801B1 (de) |
| WO (1) | WO2021083644A1 (de) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7819981B2 (en) * | 2004-10-26 | 2010-10-26 | Advanced Technology Materials, Inc. | Methods for cleaning ion implanter components |
| DE102004061269A1 (de) * | 2004-12-10 | 2006-06-14 | Siemens Ag | Verfahren zum Reinigen eines Werkstückes mit Halogenionen |
| JP5554252B2 (ja) * | 2011-01-20 | 2014-07-23 | 株式会社東芝 | 半導体製造装置およびそのクリーニング方法 |
| EP3006602B1 (de) * | 2014-10-09 | 2017-04-12 | Airbus DS GmbH | Verfahren zur Reinigung von Turbinenschaufeln |
| JP2017183472A (ja) * | 2016-03-30 | 2017-10-05 | 東芝メモリ株式会社 | チャンバ洗浄装置およびチャンバ洗浄方法 |
-
2019
- 2019-10-30 EP EP19206111.7A patent/EP3815801B1/de active Active
-
2020
- 2020-10-12 WO PCT/EP2020/078550 patent/WO2021083644A1/de not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP3815801A1 (de) | 2021-05-05 |
| EP3815801B1 (de) | 2025-06-25 |
| WO2021083644A1 (de) | 2021-05-06 |
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