EP3799966A3 - Acoustic transducer and method for generating/receiving an acoustic wave - Google Patents

Acoustic transducer and method for generating/receiving an acoustic wave Download PDF

Info

Publication number
EP3799966A3
EP3799966A3 EP20199561.0A EP20199561A EP3799966A3 EP 3799966 A3 EP3799966 A3 EP 3799966A3 EP 20199561 A EP20199561 A EP 20199561A EP 3799966 A3 EP3799966 A3 EP 3799966A3
Authority
EP
European Patent Office
Prior art keywords
acoustic
generating
receiving
acoustic wave
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20199561.0A
Other languages
German (de)
French (fr)
Other versions
EP3799966A2 (en
EP3799966B1 (en
Inventor
Omar Ben Dali
Axel Jäger
Mario Kupnik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technische Universitaet Darmstadt
Original Assignee
Technische Universitaet Darmstadt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universitaet Darmstadt filed Critical Technische Universitaet Darmstadt
Publication of EP3799966A2 publication Critical patent/EP3799966A2/en
Publication of EP3799966A3 publication Critical patent/EP3799966A3/en
Application granted granted Critical
Publication of EP3799966B1 publication Critical patent/EP3799966B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0223—Driving circuits for generating signals continuous in time
    • B06B1/0238—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave
    • B06B1/0246—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/0666—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface used as a diaphragm
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/28—Sound-focusing or directing, e.g. scanning using reflection, e.g. parabolic reflectors
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/50—Application to a particular transducer type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

Ein akustischer Wandler zum Erzeugen oder Empfangen einer akustischen Welle (50) umfasst: eine erste Membrane (110) mit einem ersten piezoelektrischen Wandler (210); und eine zweite Membrane (120) mit einem zweiten piezoelektrischen Wandler (220). Die erste Membrane (110) und die zweite Membrane (120) sind schwingbar und durch einen Hohlraum (115) voneinander getrennt, um die akustische Welle (50) durch Anregungen des ersten piezoelektrischen Wandlers (210) und/oder des zweiten piezoelektrischen Wandlers (220) zu erzeugen oder zu empfangen.An acoustic transducer for generating or receiving an acoustic wave (50) comprises: a first diaphragm (110) having a first piezoelectric transducer (210); and a second diaphragm (120) with a second piezoelectric transducer (220). The first diaphragm (110) and the second diaphragm (120) are oscillatable and separated from one another by a cavity (115) in order to generate the acoustic wave (50) by excitations of the first piezoelectric transducer (210) and / or the second piezoelectric transducer (220 ) to generate or receive.

EP20199561.0A 2019-10-04 2020-10-01 Acoustic transducer and method for generating/receiving an acoustic wave Active EP3799966B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102019126795.1A DE102019126795A1 (en) 2019-10-04 2019-10-04 Acoustic transducer and method for generating / receiving an acoustic wave

Publications (3)

Publication Number Publication Date
EP3799966A2 EP3799966A2 (en) 2021-04-07
EP3799966A3 true EP3799966A3 (en) 2021-06-30
EP3799966B1 EP3799966B1 (en) 2024-04-03

Family

ID=72717731

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20199561.0A Active EP3799966B1 (en) 2019-10-04 2020-10-01 Acoustic transducer and method for generating/receiving an acoustic wave

Country Status (2)

Country Link
EP (1) EP3799966B1 (en)
DE (1) DE102019126795A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080267431A1 (en) * 2005-02-24 2008-10-30 Epcos Ag Mems Microphone
US20100272310A1 (en) * 2009-04-28 2010-10-28 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Microcap acoustic transducer device
US20180242087A1 (en) * 2015-10-22 2018-08-23 Fujifilm Corporation Electroacoustic transducer

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010042875A1 (en) * 2010-10-25 2012-04-26 Siemens Aktiengesellschaft Method for regulating a bias voltage for a capacitive micromechanical ultrasonic transducer
DE102017223869B4 (en) * 2017-12-29 2021-09-02 Infineon Technologies Ag MEMS component and mobile device with the MEMS component

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080267431A1 (en) * 2005-02-24 2008-10-30 Epcos Ag Mems Microphone
US20100272310A1 (en) * 2009-04-28 2010-10-28 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Microcap acoustic transducer device
US20180242087A1 (en) * 2015-10-22 2018-08-23 Fujifilm Corporation Electroacoustic transducer

Also Published As

Publication number Publication date
DE102019126795A1 (en) 2021-04-08
EP3799966A2 (en) 2021-04-07
EP3799966B1 (en) 2024-04-03

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