EP3789808A1 - Coupler for a positioning device and positioning device with a coupler - Google Patents

Abstract

A coupling member (30) is proposed for a positioning device (100) which has a first linear guide (10A) for guiding a first carriage (11A) along a first linear direction (X) and a second linear guide (20) for guiding a second carriage (21 ) along a second linear direction (Y) which is essentially perpendicular to the first linear direction (X). The coupling member (30) is designed to form a coupling between the first carriage (11A) and the second linear guide (20). The coupling member (30) comprises a central part (31); a central part (31); two side parts (32) each arranged at a distance in the second linear direction (Y) from the central part (31) and flanking the central part (31); and a plurality of connecting leaf springs (33) which form a connection between the central part (31) and the two side parts (32), the planes in which the connecting leaf springs (33) are arranged being in a central axis (C) of the central part (31) cut.

Description

This document relates to embodiments of a coupling member for a positioning device, in particular a positioning device in portal design (also known as a so-called gantry system), e.g. an XY table, as well as embodiments of a positioning device with a coupling member.

In an exemplary positioning device, in particular a positioning device in portal design, as in FIG EP 2 066 996 B1 described, a transverse beam is movably mounted between two (or more) parallel linear guides, on which a functional element is movably mounted by means of a further linear guide, so that this functional element is in a plane between the two parallel linear guides (also known as the so-called H-portal) is freely positionable.

The functional element can - depending on the application - be, for example, a gripper of a pick and place machine, a microscope, a laser of a laser processing center or a touch probe of a coordinate measuring machine. Many other uses are known.

In all of these applications, of which there are a few more for positioning devices, the most precise possible positioning of the functional element plays an important role. Therefore, effort is sometimes made to position the functional element as precisely as possible with the help of position measuring devices that are as accurate as possible, which is for example in the EP 2 066 996 B1 is detailed.

However, not only an exact position measurement can be important for an exact positioning, but also the design of the coupling between the linear guides lying perpendicular to one another. Due to the accelerations in the mutually perpendicular directions, depending on the stiffness of the relevant components, the functional element or the linear guide supporting it can pivot, for example about the Y-axis during acceleration (including braking) along the X. -Axis, but also around the vertical Z-axis, for example in the case of not exactly synchronous movement of the two (or more) parallel linear guides supporting the crossbeam in the X-direction.

Permitting a limited pivoting of the crossbeam carrying the functional element about the vertical Z-axis is sometimes desirable, since under certain circumstances an exactly synchronous operation of the two (or more) parallel linear guides carrying the crossbeam is not guaranteed at all times, e.g. precisely because of a desired slight pivoting of the functional element, as in the EP 2 066 996 B1 is set out in Paragraph 0040.

In contrast, the other pivoting movements are usually undesirable because they make precise positioning of the functional element more difficult.

The object of the present invention is to propose a coupling member for a positioning device, in particular a positioning device in portal design (also known as a so-called gantry system), e.g. an XY table, which has improved rigidity properties with regard to desired and undesired pivoting.

Another object of the present invention is to propose a corresponding positioning device.

Proceeding from this, the subjects of the independent claims are proposed. Features of some exemplary embodiments are specified in the subclaims. The features of the subclaims can be combined with one another to form further embodiments, unless expressly stated otherwise.

According to a first aspect, a coupling member for a positioning device is proposed which comprises a first linear guide for guiding a first carriage along a first linear direction and a second linear guide for guiding a second carriage along a second linear direction essentially perpendicular to the first linear direction. The coupling member is designed to form a coupling between the first carriage and the second linear guide. The coupling member comprises a central part; two side parts, each arranged at a distance in the second linear direction from the central part and flanking the central part; and a plurality of connecting leaf springs which form a connection between the central part and the two side parts, the planes in which the connecting leaf springs are arranged intersecting in a central axis of the central part.

According to a second aspect, a positioning device comprises a first linear guide for guiding a first carriage along a first linear direction; a second linear guide for guiding a second carriage along a second linear direction essentially perpendicular to the first linear direction; and a coupling member configured to form a coupling between the first carriage and the second linear guide. The coupling member comprises a central part; two side parts, each arranged at a distance in the second linear direction from the central part and flanking the central part; and a plurality of connecting leaf springs which form a connection between the central part and the two side parts, the planes in which the connecting leaf springs are arranged intersecting in a central axis of the central part.

Reference will now be made to both of the aforementioned aspects.

Due to the design of the coupling member, a high degree of rigidity is achieved, in particular with regard to a - usually undesired - pivoting about the second linear direction. In contrast, a - usually desired - pivoting about a third linear direction, which is perpendicular to both the first linear direction and the second linear direction (for example, a vertical direction), is possible to a certain extent, which will be explained in more detail elsewhere .

The positioning device, in which the coupling member can be used, is designed, for example, as a positioning device in a portal design (also known as a so-called gantry system). For example, the positioning device is a so-called XY table or a so-called H portal.

The first linear guide guides the second linear guide along the first linear direction, usually by means of an appropriately designed electric drive. As will be explained in more detail with reference to the exemplary embodiments in the drawings, the positioning device can also comprise a plurality of first linear guides.

The second linear guide guides the second carriage along the second linear direction essentially perpendicular to the first linear direction. The second linear guide is designed, for example, as a transverse bar which is arranged above the first linear guide (s) and engages the first carriage, for example in such a way that it bridges the first linear guide (s). This is how the aforementioned H portal is created. To guide the second carriage, the second linear guide usually comprises a correspondingly designed electric drive.

In one embodiment, a functional element is arranged on the second carriage, for example in the form of an assembly device, a microscope, a laser, etc.

Positioning devices of the aforementioned type are used in a wide range of applications, and the possibilities for designing the functional element are correspondingly diverse.

The aspects described here are not restricted to any particular application. The functional element can also be equipped with a further electric drive, which can guide a functional unit (for example a placement head, a gripper or the like) along a further direction, for example the third linear direction.

The coupling member is designed to form the coupling between the first carriage (which is guided by the first linear guide) and the second linear guide. The second linear guide can be moved along the first linear direction with the aid of the first carriage, and the coupling required for this between the second linear guide and the first carriage is formed in particular by means of the coupling member.

According to one embodiment, the coupling member is attached to the second linear guide. Furthermore, the coupling member is, for example, fastened directly to the first carriage - that is to say without an additional receiving member or intermediate coupling element or the like.

According to one embodiment of the positioning device, both the central part and the two side parts of the coupling member are attached to the second linear guide, only the central part, but not the two side parts, being attached to the first carriage.

For example, the first total extension of the coupling member in the first linear direction is at least 1.5 times as long as the second total extension in the second linear direction. The first total extension can even be at least twice as long as the second total extension.

The two side parts, which flank the central part on both longitudinal sides, and the central part, for example, have the same first overall extent in the first linear direction. The two side parts flank the central part, but without completely surrounding it. For example, the central part and the two side parts together form the end faces of the coupling member that are perpendicular to the first linear direction.

Due to the plurality of connecting leaf springs that form the connection between the side parts and the central part (and, according to one embodiment, also form the distance between the central part and the two side parts), pivoting about the central axis running parallel to the third linear direction (as the axis of rotation) to allows to some extent. The extent to which pivoting about this axis is possible can be determined by appropriate dimensioning and arrangement of the connecting leaf springs, e.g. their angular position, length, thickness and / or material.

According to one embodiment, each of the connecting leaf springs is arranged in a plane parallel to the third linear direction. In other words, each normal of the connecting leaf springs is perpendicular to the third linear direction.

According to one embodiment, the connecting leaf springs are arranged in a star shape relative to one another in such a way that the planes in which the connecting leaf springs are arranged intersect in the central axis of the central part. This is achieved, for example, in that each of the planes in which the connecting leaf springs are arranged lies at an absolute angle, based on the second linear direction, of greater than / equal to 0 ° and less than 90 °, so that in particular none of the connecting leaf springs is parallel in a plane is arranged to the first linear direction, an arrangement in a plane parallel to the second linear direction (corresponding to 90 ° to the first linear direction) is possible. At the same time, for example, a symmetrical arrangement of the connecting leaf springs is provided, such that the angles of the connecting leaf springs which connect one of the side parts to the central part correspond to the angles of the connecting leaf springs which connect the other of the side parts to the central part.

According to one embodiment, the connecting leaf springs are arranged at a respective minimum distance from one another, for example of at least a few degrees in relation to the central axis.

According to one embodiment, the connecting leaf springs are each designed as a single leaf spring.

According to one embodiment, the connecting leaf springs are also designed for a pivoting of the two side parts about the central axis of the central part (as a rotation axis lying parallel to the third linear direction). For this purpose, the planes in which the vertical leaf springs are arranged intersect, as stated, in the central axis of the central part. The extent to which pivoting should be permitted can be determined by appropriate arrangement and dimensioning of the connecting leaf springs.

The plurality of connecting leaf springs is, for example, six, of which three each form the connection to one of the side parts. Each side part is therefore connected to the central part via three connecting leaf springs, for example. A connecting leaf spring, which is arranged centrally in relation to the first overall extension, lies e.g. in a plane whose normal is parallel to the first linear direction. The two other connecting leaf springs are provided, for example, at end sections and are arranged there at an angle of 25 ° to 80 ° or 45 ° to 60 ° in terms of amount, based on the second linear direction. At the same time, for example, a symmetrical arrangement of the connecting leaf springs is provided, such that the angles of the connecting leaf springs which connect one of the side parts to the central part correspond to the angles of the connecting leaf springs which connect the other of the side parts to the central part.

In order to achieve advantageous stiffness properties, according to one embodiment, the connecting leaf springs are provided on the end sections of the coupling member, and are arranged there at a greater distance from the central axis than each of at least two of the connecting leaf springs which are arranged centrally, based on a total extension in the first linear direction of the coupling member .

When a distance from the center of the central part is mentioned in the present case, this means a distance lying parallel to a plane which is defined by the first and second linear directions. Said distance can therefore in particular be a distance from the central axis (parallel to the third linear direction).

According to one embodiment, the connecting leaf springs arranged at a distance from one another result in partial sections in the volume between the central part and the two side parts. According to one embodiment, these subsections are designed as empty spaces, so that the coupling member has a low weight.

In one embodiment, the distance between the central part and the two side parts is, for example, at least a few millimeters, for example approx. 10 mm, and according to one embodiment, 12.5 mm. This distance can be the same for both side parts. The connecting leaf springs forming this distance are dimensioned accordingly, for example.

At this point it should be emphasized that the connecting leaf springs do not necessarily have to have a constant thickness along their extension, but that the thickness can change along their extension. The connecting leaf springs do not all have to be designed in the same way, but can - depending on the desired stiffness property of the coupling member - have different thicknesses.

According to one embodiment, the coupling member is monolithic, for example made of stainless steel. Thus, according to one embodiment, both the central part and the two side parts and the connecting leaf springs connecting these parts are made from one piece of material, for example a piece of stainless steel.

According to another embodiment, the coupling member 30 is constructed in several parts, and the two side parts and the central part are manufactured as separate components. In this variant, for example, each of the side parts has a support section which extends parallel to the first and second linear directions and on which the connecting leaf springs are arranged. The support sections thus carry the connecting leaf springs. The central part then has a plurality of counterparts for connection to the connecting leaf springs. The respective connection between the counterpart and the connecting leaf spring can be implemented with a number of screw connections, or it can be achieved in some other way.

Regardless of whether the coupling member is made in one piece (monolithic) or in several parts, a mounting surface on the top of the coupling member is designed for coupling to the second linear guide, with, for example, only the two side parts forming the mounting surface on the top of the coupling member, but not that Central part. The side parts form, for example, a flat mounting surface. If the coupling member is constructed in several parts, mounting blocks are provided on the support sections on the respective underside of the side parts of the coupling member, which protrude to the top and there form the mounting surface for the coupling to the second linear guide, which will be explained more clearly with the aid of the description of the figures .

A mounting surface on the underside of the coupling member is designed for coupling to the first carriage, the central part, for example, having a section with a U-profile has, and an inside of the U-profile forms the mounting surface on the underside of the coupling member. For example, only the central part, but not the two side parts, is involved in the formation of the mounting surface on the underside of the coupling member. The first carriage is embedded, for example, in the section with the U-profile, so that the two legs of the U-profile of the section of the central part laterally enclose the first carriage and the inside of the U-profile rests on the first carriage.

According to one embodiment, the first carriage and the coupling member have a common vertical extension area in that the first carriage is let into the U-profile-shaped section of the central part of the coupling member along the third linear direction; the inside of the U-profile forms the mounting surface on the underside of the coupling member.

According to one embodiment, the top and the bottom each extend at least in sections parallel to both the first and the second linear direction.

As mentioned, the positioning device of the second aspect is, for example, designed in a portal design. A wide variety of implementations are conceivable here. For example, the positioning device has two first linear guides which are arranged parallel to one another and which both guide a respective first carriage, and a respective coupling element can be arranged on both first carriages in accordance with one of the embodiments described above and form a coupling to the second linear guide.

According to another embodiment, the positioning device comprises two (or more than two) outer linear guides, which are arranged adjacent and parallel to the first linear guide and each guide at least one auxiliary carriage along the first linear direction, the second linear guide (via the coupling member) to the first carriage is coupled, and also to the two auxiliary vehicles. To form the coupling between the second linear guide and the two auxiliary carriages, a respective coupling leaf spring can be attached to each of the two auxiliary carriages, which is arranged in a plane parallel to the first linear direction and the third linear direction. These coupling leaf springs also allow pivoting / rotation around the third linear direction (as the axis of rotation) to a certain extent, but prevent pivoting / rotation around the first linear direction (as the axis of rotation) as well as around the second linear direction (as the axis of rotation).

Further details and advantages of the invention will become clear in the following description of some exemplary embodiments with reference to the figures.

Fig. 1

exemplarisch und schematisch einen Ausschnitt einer Aufsicht auf eine Positioniereinrichtung gemäß einer oder mehreren Ausfiihrungsformen;

Fig. 2A

exemplarisch und schematisch einen Ausschnitt einer perspektivischen Ansicht einer Positioniereinrichtung gemäß einer oder mehreren Ausfiihrungsformen;

Fig. 2B-C

jeweils exemplarisch und schematisch einen Ausschnitt einer Querschnittsansicht einer Positioniereinrichtung gemäß einer oder mehreren Ausfiihrungsformen; und

Fig. 3

exemplarisch und schematisch perspektivische Ansichten eines Kopplungsglieds gemäß einer oder mehreren Ausfiihrungsformen;

Fig. 4

exemplarisch und schematisch perspektivische Ansichten und einer Explosionsansicht eines Kopplungsglieds gemäß einer oder mehreren Ausfiihrungsformen; und

Fig. 5

exemplarisch und schematisch einen Ausschnitt einer perspektivischen Ansicht eines Hilfswagens gemäß einer oder mehreren Ausfiihrungsformen.

Show it:

Fig. 1

exemplarily and schematically a section of a plan view of a positioning device according to one or more embodiments;

Figure 2A

exemplarily and schematically a section of a perspective view of a positioning device according to one or more embodiments;

Figures 2B-C

each exemplarily and schematically a detail of a cross-sectional view of a positioning device according to one or more embodiments; and

Fig. 3

exemplary and schematic perspective views of a coupling member according to one or more embodiments;

Fig. 4

exemplary and schematic perspective views and an exploded view of a coupling member according to one or more embodiments; and

Fig. 5

exemplarily and schematically a section of a perspective view of an auxiliary vehicle according to one or more embodiments.

Figure 1 shows schematically and by way of example a positioning device 100. The positioning device 100 is designed in a portal design and comprises two first linear guides 10A and 10B.

The two first linear guides 10A and 10B guide a respective first carriage 11A or 11B along a first linear direction X. A respective guide rail or guide groove or other guide means 12A or 12B can be provided for this guide.

The positioning device 100 further comprises a second linear guide 20, which guides a second carriage 21 along a second linear direction Y which is essentially perpendicular to the first linear direction X.

The second linear guide 20 is coupled to the two first carriages 11A, 11B and is thus movable along the first linear direction X. Corresponding electric drives are provided to effect the movement in the first and second linear directions X and Y.

The second linear guide 20 is thus designed, for example, as a transverse bar which is arranged above (with respect to a third linear direction Z, which is perpendicular to the first and second linear directions X, Y) of the first linear guides 10A, 10B.

To form the coupling between the second linear guide 20 and the first carriage 11A, a coupling member 30 is provided, wherein Figures 3 and 4th illustrate two embodiments of this coupling member 30, which are described in detail later. In the Figures 2A-C The arrangement of the coupling member 30 in another embodiment of the positioning device 100 is shown schematically and by way of example, and this is also referred to below Figures 2A-C Referenced. It should be noted here that the Figures 2A-C the positioning device 100 with the coupling member 30 according to FIG Figure 3 show, the otherwise unchanged positioning device 100, however, in a different embodiment with the coupling member 30 according to FIG Figure 4 can be equipped.

The coupling member 30 has an upper side 301 and a lower side 302. To form the coupling between the second linear guide 20 and the first carriage 11A, the upper side 301 of the coupling member 30 is attached to the second linear guide 20, and the lower side 302 to the first carriage 11A.

In the following, reference is always made to this first carriage 11A, with a further coupling member 90 (see FIG. Fig. 1 ) can be provided that establishes the coupling between the second linear guide 20 and the further carriage 11B, which is guided in the first linear direction X, as in FIG Fig. 1 shown schematically. This further coupling member 90 can in particular be designed as a coupling leaf spring (that is, different from the coupling member 30), which with reference to FIG Figures 2A-C and Figure 5 is detailed.

The coupling member 30 has a central part 31 which is flanked by two side parts 32; a side part 32 is therefore located on each of two opposite longitudinal sides of the central part 31. The coupling member 30 is essentially symmetrical in relation to the first and second linear directions X and Y.

The two side parts 32 are each arranged at a distance in the second linear direction Y from the central part 31, various configurations being possible here, as on the basis of FIG Figures 3 and 4th will be made clear. A plurality of connecting leaf springs 33 connect the central part 31 and the two side parts 32 to one another.

The plurality of connecting leaf springs 33 is, for example, in both here in FIG Figures 3 and 4th Six illustrated embodiments, three of which each form the connection to one of the side parts 32. Each side part 32 is therefore connected to the central part 31 via three connecting leaf springs 33, for example. One related to the first total extension (i.e. length 1, s. Figure 3 ) centrally arranged connecting leaf spring 33 is, for example in a plane whose normal is parallel to the first linear direction X. The two other connecting leaf springs 33 are provided at end sections, for example, and are arranged there at an angle of 25 ° to 80 ° or 45 ° to 60 ° in terms of amount, based on the second linear direction Y. At the same time, as shown, a symmetrical arrangement of the connecting leaf springs 33 is provided such that the angles of the connecting leaf springs 33, which connect the left side part 32 to the central part 31, correspond to the angles of the connecting leaf springs 33, which the right side part 32 to the central part 31 connect.

The coupling member 30 is designed in such a way that it allows a pivoting / rotation about the central axis C of the central part 31 (parallel to the third linear direction Z as the axis of rotation through the center of the central part 31) to a certain extent, but the rotation about the first linear direction X (as the axis of rotation) and in particular around the second linear direction Y (as the axis of rotation) largely avoided or even completely prevented. For this purpose, the planes in which the connecting leaf springs 33 are arranged intersect in the central axis C of the central part 31.

For example, the first total extension of the coupling member 30 in the first linear direction X, that is, its length 1, is at least 1.5 times as long as the second total extension in the second linear direction Y, that is, its width b. The length 1 can even be at least twice as long as the width b. A third overall extension of the coupling member 30 in the third linear direction Z, that is to say a height h, is, for example, less than the width b. According to both embodiments of Fig. 3 and 4th the length 1 is, for example, 200 mm, the width b 100 mm, and the height h 30 mm.

Whereas a pivoting / rotation about the second linear direction Y (as a rotation axis) - as stated - is undesirable, a pivoting / rotation about the third linear direction Z (as a rotation axis) to a certain extent may be desirable. For this purpose, each of the connecting leaf springs 33 is arranged in a plane parallel to the third linear direction Z, as stated. As shown, the connecting leaf springs 33 are arranged in a star shape relative to one another. The planes in which the connecting leaf springs 33 are arranged intersect in the central axis C. This axis C thus forms the axis of rotation (based on a rotation about the third linear direction Z) of the coupling member 30.

In the embodiments shown in the drawings, a total of six connecting leaf springs 33 are provided, which are at an angle, based on the second linear direction Y, of either 0 ° (the two central connecting leaf springs 33) or about 60 ° (the four connecting leaf springs 33 at the end sections ) are arranged around the central part 31 to connect with side parts 32. However, according to one embodiment, no connecting leaf springs are provided between the central part 31 and the side parts 32, which would extend parallel to the first linear direction X. Although the angular positions, in particular of the connecting leaf springs 33, can be selected differently at the end sections in order to achieve certain rigidity properties.

The connecting leaf springs 33 are designed for a pivoting of the side parts 32 about the central axis C (as a rotation axis parallel to the third linear direction Z). The connecting leaf springs 33 are also designed in such a way that pivoting / rotation about the second linear direction Y (as the axis of rotation) is largely avoided or completely prevented, whereas pivoting / rotation about the third linear direction Z (as the axis of rotation) is possible to a certain extent is. The extent to which a pivoting / rotation about this axis is made possible can be determined by a corresponding arrangement and dimensioning of the connecting leaf springs 33.

In addition, due to the design and arrangement of the connecting leaf springs 33, the coupling member 30 is designed in such a way that pivoting / rotation about the first linear direction X (as the axis of rotation) is largely avoided or completely prevented. However, the loads relating to a pivoting / rotation about the second linear direction Y (as the axis of rotation) are comparatively high due to the strong acceleration forces acting parallel to the first linear direction X and due to the arrangement of the second linear guide 20 above the first linear guides 10A, 10B 'and 10B ", and thus a higher rigidity regarding a pivoting / rotation about the second linear direction Y (as the axis of rotation) is desired. In particular, according to one embodiment of the coupling member 30, the rigidity regarding a pivoting / rotation about the second linear direction Y (as the axis of rotation) can be greater than the rigidity relating to a pivoting / rotation about the first linear direction X (as the axis of rotation).

Depending on the desired rigidity of the coupling member 30, the thicknesses of the connecting leaf springs 33 can be dimensioned. For example, it is within the scope of the present invention that the thicknesses of the connecting leaf springs 33 differ from one another and / or that the thickness of a respective one of the connecting leaf springs 33 varies along their extension.

With reference to the Figures 2A-C as well as continue to the Fig. 3 and 4th an exemplary installation of the coupling member 30 in the positioning device 100 is discussed in somewhat greater detail below.

The coupling member 30 has an upper side 301 and a lower side 302, and is arranged, for example, in the positioning device 100 such that a mounting surface 3020 on the lower side 302, which is formed only by the central part 31, is attached to the first carriage 11A, and that a Mounting surface 3010 on the upper side 301, which is formed only by the side parts 32, is fastened to the second linear guide 20. The second linear guide 20 is not attached to the central part 31, and the first carriage 11A is not attached to the side parts 32.

In the illustrated embodiments, the central part 31 has a section with a U-profile, an inner side of the U-profile forming the mounting surface 3020 on the underside 302 of the coupling member 30. As shown, the first carriage 11A is embedded in the section with the U-profile so that the two legs of the U-profile of the section of the central part 31 laterally enclose the first carriage 11A and the inside of the U-profile rests on the first carriage . The positioning device 100 can thus have a small height overall.

As in Fig. 4 , View (C), instead of just one first carriage 11A, several, for example two, carriage 11A can also be provided. The division into several first carriages 11A can bring about a weight reduction, since the connection to the coupling member 30 is not formed along the entire length 1, but only partially, like Fig. 4 , View (C).

The connection to the first carriage (s) 11A can be established via one or more screws. For this purpose, corresponding recesses or threads 35, 1155 are provided both on the carriage (s) 11A and in the U-profile section of the central part 31, six in each case in the illustrated embodiments (not all of which are provided with the reference numerals for the sake of clarity are).

Only the central part 31, but not the two side parts 32, is involved in the formation of the mounting surface 3020 on the underside 302 of the coupling member 30. That is, the two side parts 32 do not act directly on the first carriage 11A, but only indirectly via the connecting leaf springs 33 and the central part 31.

On the other hand, only the two side parts 32 form the mounting surface 3010 on the upper side 301 of the coupling member 30, but not the central part 31. That is, only the two side parts 32 are attached directly to the second linear guide 20. The formation of this attachment can in turn be accomplished by using one or more screws. These are corresponding recesses or threads 36 are provided in the side parts 32 as well as on the second linear guide 20 (not shown) (not all of which are provided with the reference symbols for the sake of clarity).

Instead of screws, fastening pins or other fastening means can also engage in the recesses / threads 35, 36, 1155, which effect the connection between the coupling member 30 and the first / first carriage 11A on the one hand and the connection between the coupling member 30 and the second linear guide 20 on the other.

According to the Figures 2A-C In the illustrated embodiment, the positioning device 100 further comprises two outer linear guides 10B 'and 10B ", which are arranged adjacent and parallel to the first linear guide 10A and each guide at least one (two in the illustrated embodiments) auxiliary carriages 11B', 11B" along the first linear direction X. The guides 10A, 10B 'and 10B "are attached to a base structure 50 of the positioning device 100 (see also FIG Fig. 4 , View A)).

The second linear guide 20 is coupled both to the first carriage 11A and to the total of four auxiliary carriages 11B ', 11B "and is thus moved along the first linear direction X. The first linear guide 10A, as mentioned, guides the first carriage 11A along the first Linear direction X. A rail 12A is provided for this guide. The two outer linear guides 10B 'and 10B "are designed in a similar manner and each comprise a correspondingly arranged rail 12 B', 12 B" for guiding the auxiliary carriages 11B 'and 11B ". .

The magnetic paths 60 ′, 60 ″ of two linear motors are also attached to the base structure 50. The details of these components will not be discussed in greater detail here EP 0 793 870 B1 , some variants are known as to how a magnetic path for a positioning device can be formed in the present form.

The second linear guide 20 is coupled both to the first carriage 11A and to the four auxiliary carriages 11B ′ and 11B ″. In the embodiment shown, the second linear guide 20 is moved along the first linear direction X by correspondingly energizing the linear motors.

For coupling the second linear guide 20 to the first auxiliary carriage 11A, the coupling member 30 is provided, which is configured in accordance with the above statements.

To form the coupling between the second linear guide 20 and the auxiliary carriages 11B ', 11B ", a respective coupling leaf spring 70', 70" is attached to each of these auxiliary carriages 11B ', 11B ", in a plane parallel to the first linear direction X and the third linear direction Z is arranged.

The coupling leaf springs 70 ', 70 "form the coupling to the second linear guide 20. The coupling of the coupling leaf springs 70', 70" to the second linear guide 20 is designed in such a way that a rotation / pivoting of the second linear guide 20 about the third linear direction Z ( as a rotation axis) is made possible to a certain extent, but a pivoting / rotation about the first linear direction X (as a rotation axis) and about the second linear direction Y (as a rotation axis) is avoided.

According to one embodiment of the positioning device 100, only a single coupling member 30 is provided for coupling the second linear guide 20 to the first linear guide 10A and the guides 10B ', 10B ". The coupling of the second linear guide 20 to the auxiliary carriages 11B', 11B" takes place via additional ones Coupling elements that are not configured like the coupling member 30, but in a different way, for example as said coupling leaf springs 70 ', 70 ". Due to the coupling leaf springs 70', 70", the positioning device 100 can tolerate, for example, a thermally induced expansion of the second linear guide 20.

An exemplary embodiment of the auxiliary carriages 11B ', 11B "is shown in FIG Figure 5 illustrated. The auxiliary trolley 11B '(the other auxiliary trolleys are designed in the same way) is equipped with two attachment elements 72' and 73 ', and the coupling leaf spring 70' is located on the uppermost attachment element 72 '. The coupling leaf spring 70 ′ merges into a further coupling means 71 ′, which is designed for attachment to the second linear guide 20.

Referring to the Figure 2C the second linear direction 20 guides the second carriage 21 along the second linear direction Y. The second carriage 21 is provided with a functional element 28, which is addressed and controlled, for example, via a flexible strand 27. Examples of various functional elements have already been mentioned above, and it should be emphasized again at this point that the present invention is not limited to a specific functional element or a specific field of application of the positioning device 100.

The following will refer to the Figures 3 and 4th further exemplary features of the coupling member 30 are explained.

In both embodiments, the two side parts 32, which flank the central part 31 on both sides, and the central part 31 have the same length 1. The two side parts 32 flank the central part 31, but without completely surrounding it. Thus, the central part 31 and the two side parts 32 jointly form the end faces 39 of the coupling member 30 that are perpendicular to the first linear direction.

In both embodiments, the plurality of connecting leaf springs 33 is six, as already described, three of which each form the connection to one of the side parts 32. Each side part 32 is therefore connected to the central part 31 via three connecting leaf springs 33, for example. A connecting leaf spring 33, which is arranged centrally in relation to the length 1, lies, for example, in a plane whose normal is parallel to the first linear direction X. The two other connecting leaf springs 33 are provided, for example, at the end sections and are arranged there at an angle of 25 ° to 80 ° or 45 ° to 60 ° with respect to the second linear direction Y.

The two connecting leaf springs 33 provided at the end sections are spaced further from the central axis C (in the radial direction to this axis) than the central connecting leaf springs 33, e.g. at least 1.41 (root of 2) times, or at least twice as far as the central ones Connecting leaf springs 33.

The connecting leaf springs 33 limit according to the in Figure 3 The illustrated embodiment of the coupling member 30 sections of the volume between the central part 31 and the two side parts 32. These sections are designed as empty spaces and thus also enable pivoting / rotation about the third linear direction Z (as the axis of rotation).

This in Figure 3 The coupling member 30 shown is, for example, made from one piece, that is to say monolithic. That is, the central part 31, the two side parts 32 and the connecting leaf springs 33 are made from one piece of material, for example one piece of stainless steel.

Furthermore, the central part 31 in this embodiment consists essentially of the section with the U-profile. As in view (A) of the Figure 3 shown, the inside of the U-profile, which forms the mounting surface 3020, is structured by recess areas. Coupling pieces 111 of the first carriages 11A (see FIG. Figure 4 , View (C)) embedded in a form-fitting manner. The U-shaped section of the central part 31 of in Figure 4 The embodiment shown can equally be formed on the corresponding inside (not shown here).

At the in Fig. 4 In the embodiment shown, the coupling member 30 is constructed in several parts, and the two side parts 32 and the central part 31 are separate components manufactured. Each of the side parts 32 has a support section 321 which extends parallel to the first and second linear directions X, Y and on which the connecting leaf springs 33 for the end sections are arranged. In addition, mounting blocks 325 are provided on the support sections 321, which protrude to the upper side 301 and there form the mounting surface 3010 for coupling to the second linear guide 20. The two support sections 321 with the connecting leaf springs 33 and the mounting blocks 325 can each be designed monolithically. On each of the side parts 32, one of the two mounting blocks 325 is connected to one of the central connecting leaf springs 33 which, in the embodiment shown, are provided on the central part 31 (see FIG. Figure 4C , according to which in the left side part 32 of the X-direction front mounting block 325 is coupled to the left central connecting leaf spring 33 to the central part 31, and in accordance with that of the right side part 32 of the X-direction rear mounting block 325 to the right central connecting leaf spring 33 is coupled to the central part 31).

The central part 31 has a plurality of counterparts 339 for connection to the connecting leaf springs 33. For each connecting leaf spring 33, at least one counterpart 339 is provided, e.g. two counterpart 339. The respective connection between counterpart (s) 339 and connecting leaf spring 33 is implemented with a number of screw connections. For example, five screws are provided for each side of one of the leaf springs 33, so that a total of 60 screws would have to be used to form the connection between the side parts 32 and the central part 31. Alternative variants to this would of course be within the scope of the invention.

With the multi-part design according to Fig. 4 the central part 31 and the two side parts 32 are geometrically matched to one another, so that an overall compact coupling member 30 is created. On the two longitudinal sides, indentations are formed in the central part 31, into which the mounting blocks 325 are let, but without making contact with the central part 31. In the embodiment shown, the indentations are adapted to the alignment of the connecting leaf springs 33 on the end sections. The flanks of the indentations form the counterparts 339 and receive the connecting leaf springs 33 at the end sections. No indentation is provided in the area of the center of the central part 33; instead, the central connecting leaf springs 33 project there from the top 301 to the bottom 302, so that they can be connected to the mounting blocks 325 via said 10 screws each (or in some other way).

Due to its geometric design, the coupling member 30 described here has high rigidity with regard to translational forces along the three linear directions X, Y and Z and high rigidity with regard to rotational forces about the first linear direction X (as the axis of rotation) and in particular about the second linear direction Y (as a rotation axis). With a view In response to the rotational forces about the third linear direction Z (as the axis of rotation), the coupling member 30 has a flexibility in order to allow a rotation / pivoting about this axis up to a certain degree.

The coupling member 30 makes it possible to provide the positioning device 100 with a small tilt error (so-called Abbe error). This can be further promoted by the coupling member 30 having a third overall extension (height h, see FIG. Fig. 3 ) in the third linear direction Z, which is significantly smaller than both the first overall extent (length 1) and the second overall extent (width b). For example, the height h is not more than 50%, and not more than 30% of the length 1. It is also advantageous here to let the first carriage into the U-shaped section of the central part 31 of the coupling member 30, so that an overall lower Construction is achieved.

According to one embodiment, the first carriages 11A (or the first carriages 11A) and the coupling member 30 have a common vertical extent in that the first carriage 11A (or the first carriages 11A) along the third linear direction into the U-shaped section of the Central part 31 of the coupling member 30 is embedded; an inside of the U-profile forms the mounting surface 3020 on the underside 302 of the coupling member 30.

The coupling member 30 can - as stated - be made of a stainless steel, or another material that enables a high modulus of elasticity (“Young modulus”).

Claims (15)

Coupling member (30) for a positioning device (100) which has a first linear guide (10A) for guiding a first carriage (11A) along a first linear direction (X) and a second linear guide (20) for guiding a second carriage (21) along a second linear direction (Y), which is essentially perpendicular to the first linear direction (X), the coupling member (30) being designed to form a coupling between the first carriage (11A) and the second linear guide (20) and characterized by: - a central part (31); - Two side parts (32), each arranged at a distance in the second linear direction (Y) from the central part (31) and flanking the central part (31); and - A plurality of connecting leaf springs (33) which form a connection between the central part (31) and the two side parts (32), the planes in which the connecting leaf springs (33) are arranged in a central axis (C) of the central part (31) cut. Coupling link (30) according to claim 1, wherein each of the connecting leaf springs (33) is arranged in a plane parallel to a third linear direction (Z), the third linear direction (Z) being perpendicular to both the first linear direction (X) and the second linear direction (Y) is. Coupling member (30) according to Claim 1 or 2, the connecting leaf springs (33) being designed as a rotation axis for pivoting the two side parts (32) about the central axis (C). Coupling member (30) according to one of the preceding claims, wherein the central part (31) at least partially forms end faces (39) of the coupling member (30) which are perpendicular to the first linear direction (X), and / or wherein the two side parts (32) form the central part ( 31) not completely surrounded. A coupling member (30) according to any one of the preceding claims, wherein - A mounting surface (3010) on an upper side (301) of the coupling member (30) is designed for coupling to the second linear guide (20); - A mounting surface (3020) on an underside (302) of the coupling member (30) is designed for coupling to the first carriage (11A). Coupling member (30) according to claim 5, wherein the central part (31) has a section with a U-profile, an inner side of the U-profile forming the mounting surface (3020) on the underside (302) of the coupling member (30). Coupling member (30) according to Claim 5 or 6, only the two side parts (32) forming the mounting surface (3010) on the upper side (301) of the coupling member (30), but not the central part (31). Coupling member (30) according to one of the preceding claims 5 to 7, wherein only the central part (31), but not the two side parts (32), is involved in the formation of the mounting surface (3020) on the underside (302) of the coupling member (30) . Coupling link (30) according to one of the preceding claims, wherein the plurality of connecting leaf springs (33) is six, three of which each form the connection to one of the side parts (32). Coupling member (30) according to one of the preceding claims, wherein some of the connecting leaf springs (33) are provided at end portions of the coupling member (30), and there are arranged at a greater distance from the central axis (C) than each of at least two of the connecting leaf springs (33). , which are arranged centrally, based on a total extension in the first linear direction (X). Coupling member (30) according to one of the preceding claims, wherein the coupling member (30) is monolithic, for example made of a stainless steel. Coupling member (30) according to one of the preceding claims 1-10, wherein the coupling member (30) is constructed in several parts, for example from a stainless steel, and the two side parts (32) and the central part (31) are manufactured as separate components. Coupling link (30) according to claim 12, wherein each of the side parts (32) has a support section (321) which extends parallel to the first and second linear directions (X, Y) and on which the connecting leaf springs (33) are arranged, and wherein the central part ( 31) has a plurality of counterparts (339) for connection to the connecting leaf springs (33). Coupling link (30) according to Claim 13, the respective connection between the counterpart (339) and the connecting leaf spring (33) being designed with a number of screw connections. Positioning device (100), comprising - A first linear guide (10A) for guiding a first carriage (11A) along a first linear direction (X); - A second linear guide (20) for guiding a second carriage (21) along a second linear direction (Y) which is essentially perpendicular to the first linear direction (X); and - A coupling member (30) which is designed to form a coupling between the first carriage (11A) and the second linear guide (20), characterized in that the coupling member (30) comprises: - a central part (31); - Two side parts (32), each arranged at a distance in the second linear direction (Y) from the central part (31) and flanking the central part (31); and - A plurality of connecting leaf springs (33) which form a connection between the central part (31) and the two side parts (32), the planes in which the connecting leaf springs (33) are arranged in a central axis (C) of the central part (31) cut.

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