EP3762611B8 - Pompe à vide dotée d'une soupape de surpression - Google Patents

Pompe à vide dotée d'une soupape de surpression Download PDF

Info

Publication number
EP3762611B8
EP3762611B8 EP19711684.1A EP19711684A EP3762611B8 EP 3762611 B8 EP3762611 B8 EP 3762611B8 EP 19711684 A EP19711684 A EP 19711684A EP 3762611 B8 EP3762611 B8 EP 3762611B8
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
relief valve
pressure relief
valve
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19711684.1A
Other languages
German (de)
English (en)
Other versions
EP3762611A1 (fr
EP3762611B1 (fr
Inventor
Matthew Richard WICKES
Neil Turner
Alan Ernest Kinnaird Holbrook
Sivabalan KAILASAM
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of EP3762611A1 publication Critical patent/EP3762611A1/fr
Application granted granted Critical
Publication of EP3762611B1 publication Critical patent/EP3762611B1/fr
Publication of EP3762611B8 publication Critical patent/EP3762611B8/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/18Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00Control; Monitoring or safety arrangements
    • F04C2270/21Pressure difference

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Safety Valves (AREA)
  • Rotary Pumps (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)
EP19711684.1A 2018-03-09 2019-03-08 Pompe à vide dotée d'une soupape de surpression Active EP3762611B8 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1803859.6A GB2571792B (en) 2018-03-09 2018-03-09 A vacuum pump with a pressure relief valve
PCT/GB2019/050650 WO2019171074A1 (fr) 2018-03-09 2019-03-08 Pompe à vide dotée d'une soupape de surpression

Publications (3)

Publication Number Publication Date
EP3762611A1 EP3762611A1 (fr) 2021-01-13
EP3762611B1 EP3762611B1 (fr) 2023-08-30
EP3762611B8 true EP3762611B8 (fr) 2023-10-11

Family

ID=61973005

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19711684.1A Active EP3762611B8 (fr) 2018-03-09 2019-03-08 Pompe à vide dotée d'une soupape de surpression

Country Status (5)

Country Link
EP (1) EP3762611B8 (fr)
CN (1) CN111801498B (fr)
GB (1) GB2571792B (fr)
TW (3) TW201938915A (fr)
WO (3) WO2019171074A1 (fr)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB772999A (en) * 1954-09-24 1957-04-17 Heraeus Gmbh W C Improvements in or relating to roots-type mechanical high-vacuum pumps
BE790061A (fr) * 1971-10-14 1973-02-01 Ransburg Corp Pompe volumetrique rotative
SU987182A1 (ru) * 1981-07-13 1983-01-07 Омский политехнический институт Винтовой компрессор
US8272846B2 (en) * 2006-12-05 2012-09-25 Carrier Corporation Integral slide valve relief valve
DE102008034073A1 (de) * 2008-07-22 2010-01-28 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe, insbesondere Wälzkolbenpumpe
DE102008060540A1 (de) * 2008-12-04 2010-06-10 Pfeiffer Vacuum Gmbh Wälzkolbenvakuumpumpe
BRPI1105143B1 (pt) * 2011-12-15 2021-07-27 Embraco Indústria De Compressores E Soluções Em Refrigeração Ltda Conjunto de válvulas de sucção para compressor alternativo
CN206439185U (zh) * 2017-01-23 2017-08-25 北京市四方特种油品厂 罗茨泵

Also Published As

Publication number Publication date
GB2571792B (en) 2020-12-16
EP3762611A1 (fr) 2021-01-13
TW201938915A (zh) 2019-10-01
GB201803859D0 (en) 2018-04-25
WO2019171075A1 (fr) 2019-09-12
CN111801498A (zh) 2020-10-20
WO2019171076A1 (fr) 2019-09-12
TW201938916A (zh) 2019-10-01
CN111801498B (zh) 2023-03-10
WO2019171074A1 (fr) 2019-09-12
EP3762611B1 (fr) 2023-08-30
TW201940815A (zh) 2019-10-16
GB2571792A (en) 2019-09-11

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